The Materials for Sensitive Elements of Angular Velocity Sensors on Bulk Acoustic Waves

The criteria for the selection of the materials of the plate piezoelectric transducers and the acoustic duct of the sensitive element of the angular velocity sensors are determined. The following materials are considered for piezo plates: quartz (SiO 2 ), lithium niobate (LiNbO 3 ) and lithium tanta...

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Bibliographic Details

Published in:	IEEE NW Russia Young Researchers in Electrical and Electronic Engineering Conference pp. 1256 - 1259
Main Authors:	Durukan, Yasemin, Shevelko, Michail M., Peregudov, Alexandr N., Popkova, Ekaterina S.
Format:	Conference Proceeding
Language:	English
Published:	IEEE 26.01.2021
Subjects:	Angular velocity bulk acoustic wave Ducts Glass Lithium niobate monocrystalline media piezoelectric effect Piezoelectric transducers sensitive element of angular velocity sensor Sensors Silicon compounds ultrasound
ISSN:	2376-6565
Online Access:	Get full text
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