A Ferroelectric CMOS Microelectrode Array with ZrO2 Recording and Stimulation Sites for In-Vitro Neural Interfacing

A CMOS-based microelectrode array (CMOS-MEA) is presented, where a 10-nm-thick antiferroelectric ZrO 2 layer is deposited in the post-CMOS process as functional electrode coating for 4225 recording sites and 1024 stimulation sites. Voltage noise measurements of the ZrO 2 recording sites of the CMOS-...

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Bibliographic Details

Published in:	2024 IEEE BioSensors Conference (BioSensors) pp. 1 - 4
Main Authors:	Becker, Maximilian T., Corna, Andrea, Xu, Bohan, Schroeder, Uwe, Amft, Oliver, Keil, Stefan, Thewes, Roland, Zeck, Gunther
Format:	Conference Proceeding
Language:	English
Published:	IEEE 28.07.2024
Subjects:	Biosensors Charge injection capacity CMOS-based Microelectrode Array Electric potential Ferroelectric Microelectrodes Microelectrodes Noise level Noise measurement Optimization Recording Retina Tin Voltage measurement Voltage noise
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