Adaptive Filtered-X LMS algorithm for active vibration control on micron positioning stage

The objective of this study is to develop an active vibration control (AVC) system to suppress the relative displacement between lens set and granite platform using a micron positioning stage, installed between lens set and gantry. This control system applies Filtered-X LMS adaptive algorithm as the...

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Bibliographic Details

Published in:	2012 International Conference on Control, Automation and Information Sciences pp. 370 - 374
Main Authors:	Yun-Hui Liu, Hong-Jen Lee
Format:	Conference Proceeding
Language:	English
Published:	IEEE 01.11.2012
Subjects:	active control Actuators Adaptive control Filtered-X LMS adaptive algorithm Filtering algorithms Finite impulse response filter Frequency control Lenses micron positioning stage piezoelectric actuator Vibrations
ISBN:	1467308129, 9781467308120
Online Access:	Get full text
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