Adaptive Filtered-X LMS algorithm for active vibration control on micron positioning stage

The objective of this study is to develop an active vibration control (AVC) system to suppress the relative displacement between lens set and granite platform using a micron positioning stage, installed between lens set and gantry. This control system applies Filtered-X LMS adaptive algorithm as the...

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Veröffentlicht in:	2012 International Conference on Control, Automation and Information Sciences S. 370 - 374
Hauptverfasser:	Yun-Hui Liu, Hong-Jen Lee
Format:	Tagungsbericht
Sprache:	Englisch
Veröffentlicht:	IEEE 01.11.2012
Schlagworte:	active control Actuators Adaptive control Filtered-X LMS adaptive algorithm Filtering algorithms Finite impulse response filter Frequency control Lenses micron positioning stage piezoelectric actuator Vibrations
ISBN:	1467308129, 9781467308120
Online-Zugang:	Volltext
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