Study on factors influencing sensitivity of push pull thermal expansion flow gyroscope

The factors affecting the sensitivity of push-pull thermal expansion flow gyroscope are studied. In this paper, a two-dimensional geometric model of gyro sensor is established. Based on this model, the relationship between the working parameters such as heater power, thermistor spacing and the tempe...

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Vydané v:IEEE Information Technology, Networking, Electronic and Automation Control Conference (Online) Ročník 5; s. 303 - 306
Hlavní autori: Piao, Linhua, Wang, Yuxin, Li, Bei, Ding, Xia
Médium: Konferenčný príspevok..
Jazyk:English
Vydavateľské údaje: IEEE 15.10.2021
Predmet:
finite element analysis
Gyroscopes
MEMS
Sensitive gas
Sensitivity
Temperature
Temperature sensors
Thermal analysis
Thermal expansion
Thermal expansion flow gyroscope
Thermistors
ISSN:2693-3128
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Shrnutí:The factors affecting the sensitivity of push-pull thermal expansion flow gyroscope are studied. In this paper, a two-dimensional geometric model of gyro sensor is established. Based on this model, the relationship between the working parameters such as heater power, thermistor spacing and the temperature difference between thermistors in the sensor cavity is numerically calculated. The results show that the angular velocity is in the range of ±20%. When the power of heater is 70mW, duty cycle is 50%, frequency is 10Hz, and the distance between thermistors is 6.5mm, the optimal structure sensitivity of gyro is 0.0997mK/rad/s. The results lay a theoretical foundation for the structure design and performance optimization of the thermal expansion flow gyroscope.
ISSN:2693-3128
DOI:10.1109/ITNEC52019.2021.9587208