Strategy-Oriented Exact Pattern Grouping Approaches for Integrated Circuit Designs

Exact layout pattern grouping has been utilized in recent years in integrated circuit design for manufacturability (DFM) applications. In this paper, we have developed several approaches of exact layout pattern grouping for different purposes. For achieving a small cluster count and largest repeatin...

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Vydané v:2022 International Workshop on Advanced Patterning Solutions (IWAPS) s. 1 - 4
Hlavní autori: Gan, Yuan, Ding, Ming, Han, Chunying, Yan, Changlian, Jiang, Junhai, Zhang, Rongjia, Yu, Zongqiang
Médium: Konferenčný príspevok..
Jazyk:English
Vydavateľské údaje: IEEE 21.10.2022
Predmet:
clip shifting
Clustering algorithms
Conferences
exact layout pattern grouping
Integrated circuit synthesis
Layout
Random access memory
strategy-oriented
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Abstract Exact layout pattern grouping has been utilized in recent years in integrated circuit design for manufacturability (DFM) applications. In this paper, we have developed several approaches of exact layout pattern grouping for different purposes. For achieving a small cluster count and largest repeating patterns, we have developed greedy mode and rich mode; For selecting layout patterns in non-period regions, orphan strategy is adopted. Moreover, clip shifting is supported in all grouping modes above, which reduces the cluster count effectively and efficiently. The performances of the developed algorithms are validated by numerical experiments on a full-chip layout GDSII file containing millions of polygons.
AbstractList Exact layout pattern grouping has been utilized in recent years in integrated circuit design for manufacturability (DFM) applications. In this paper, we have developed several approaches of exact layout pattern grouping for different purposes. For achieving a small cluster count and largest repeating patterns, we have developed greedy mode and rich mode; For selecting layout patterns in non-period regions, orphan strategy is adopted. Moreover, clip shifting is supported in all grouping modes above, which reduces the cluster count effectively and efficiently. The performances of the developed algorithms are validated by numerical experiments on a full-chip layout GDSII file containing millions of polygons.
Author Han, Chunying
Yan, Changlian
Yu, Zongqiang
Ding, Ming
Zhang, Rongjia
Gan, Yuan
Jiang, Junhai
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  givenname: Ming
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  givenname: Changlian
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  givenname: Rongjia
  surname: Zhang
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  organization: Dongfang Jingyuan Electron Limited,Beijing,China
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  givenname: Zongqiang
  surname: Yu
  fullname: Yu, Zongqiang
  email: zongqiang.yu@dfjy-jx.com
  organization: Dongfang Jingyuan Electron Limited,Beijing,China
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Snippet Exact layout pattern grouping has been utilized in recent years in integrated circuit design for manufacturability (DFM) applications. In this paper, we have...
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SubjectTerms clip shifting
Clustering algorithms
Conferences
exact layout pattern grouping
Integrated circuit synthesis
Layout
Random access memory
strategy-oriented
Title Strategy-Oriented Exact Pattern Grouping Approaches for Integrated Circuit Designs
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