Employing a MEMS plasma switch for conditioning high-voltage kinetic energy harvesters

Triboelectric nanogenerators have attracted wide attention due to their promising capabilities of scavenging the ambient environmental mechanical energy. However, efficient energy management of the generated high-voltage for practical low-voltage applications is still under investigation. Autonomous...

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Published in:	Nature communications Vol. 11; no. 1; pp. 3221 - 10
Main Authors:	Zhang, Hemin, Marty, Frédéric, Xia, Xin, Zi, Yunlong, Bourouina, Tarik, Galayko, Dimitri, Basset, Philippe
Format:	Journal Article
Language:	English
Published:	London Nature Publishing Group UK 26.06.2020 Nature Publishing Group Nature Portfolio
Subjects:	142/126 147/135 639/166/987 639/4077/4072 Actuation Circuits Conditioning Electric power generation Electronic circuits Energy Energy harvesting Energy management Engineering Sciences High voltages Humanities and Social Sciences Hysteresis Kinetic energy Micro and nanotechnologies Microelectromechanical systems Microelectronics Micromachining multidisciplinary Nanogenerators Power consumption Scavenging Science Science (multidisciplinary) Stability Switches Voltage
ISSN:	2041-1723, 2041-1723
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Abstract	Triboelectric nanogenerators have attracted wide attention due to their promising capabilities of scavenging the ambient environmental mechanical energy. However, efficient energy management of the generated high-voltage for practical low-voltage applications is still under investigation. Autonomous switches are key elements for improving the harvested energy per mechanical cycle, but they are complicated to implement at such voltages higher than several hundreds of volts. This paper proposes a self-sustained and automatic hysteresis plasma switch made from silicon micromachining, and implemented in a two-stage efficient conditioning circuit for powering low-voltage devices using triboelectric nanogenerators. The hysteresis of this microelectromechanical switch is controllable by topological design and the actuation of the switch combines the principles of micro-discharge and electrostatic pulling, without the need of any power-consuming control electronic circuits. The experimental results indicate that the energy harvesting efficiency is improved by two orders of magnitude compared to the conventional full-wave rectifying circuit. Conditioning efficiently high-voltage triboelectric nanogenerators for low-voltage applications remains a challenge. Here, the authors demonstrate two orders of magnitude improvement of the energy harvesting efficiency by applying a conditioning circuit with self-sustained and automatic hysteresis MEMS micro-plasma switches.
AbstractList	Triboelectric nanogenerators have attracted wide attention due to their promising capabilities of scavenging the ambient environmental mechanical energy. However, efficient energy management of the generated high-voltage for practical low-voltage applications is still under investigation. Autonomous switches are key elements for improving the harvested energy per mechanical cycle, but they are complicated to implement at such voltages higher than several hundreds of volts. This paper proposes a self-sustained and automatic hysteresis plasma switch made from silicon micromachining, and implemented in a two-stage efficient conditioning circuit for powering low-voltage devices using triboelectric nanogenerators. The hysteresis of this microelectromechanical switch is controllable by topological design and the actuation of the switch combines the principles of micro-discharge and electrostatic pulling, without the need of any power-consuming control electronic circuits. The experimental results indicate that the energy harvesting efficiency is improved by two orders of magnitude compared to the conventional full-wave rectifying circuit. Conditioning efficiently high-voltage triboelectric nanogenerators for low-voltage applications remains a challenge. Here, the authors demonstrate two orders of magnitude improvement of the energy harvesting efficiency by applying a conditioning circuit with self-sustained and automatic hysteresis MEMS micro-plasma switches. Triboelectric nanogenerators have attracted wide attention due to their promising capabilities of scavenging the ambient environmental mechanical energy. However, efficient energy management of the generated high-voltage for practical low-voltage applications is still under investigation. Autonomous switches are key elements for improving the harvested energy per mechanical cycle, but they are complicated to implement at such voltages higher than several hundreds of volts. This paper proposes a self-sustained and automatic hysteresis plasma switch made from silicon micromachining, and implemented in a two-stage efficient conditioning circuit for powering low-voltage devices using triboelectric nanogenerators. The hysteresis of this microelectromechanical switch is controllable by topological design and the actuation of the switch combines the principles of micro-discharge and electrostatic pulling, without the need of any power-consuming control electronic circuits. The experimental results indicate that the energy harvesting efficiency is improved by two orders of magnitude compared to the conventional full-wave rectifying circuit. Conditioning efficiently high-voltage triboelectric nanogenerators for low-voltage applications remains a challenge. Here, the authors demonstrate two orders of magnitude improvement of the energy harvesting efficiency by applying a conditioning circuit with self-sustained and automatic hysteresis MEMS micro-plasma switches. Conditioning efficiently high-voltage triboelectric nanogenerators for low-voltage applications remains a challenge. Here, the authors demonstrate two orders of magnitude improvement of the energy harvesting efficiency by applying a conditioning circuit with self-sustained and automatic hysteresis MEMS micro-plasma switches. Triboelectric nanogenerators have attracted wide attention due to their promising capabilities of scavenging the ambient environmental mechanical energy. However, efficient energy management of the generated high-voltage for practical low-voltage applications is still under investigation. Autonomous switches are key elements for improving the harvested energy per mechanical cycle, but they are complicated to implement at such voltages higher than several hundreds of volts. This paper proposes a self-sustained and automatic hysteresis plasma switch made from silicon micromachining, and implemented in a two-stage efficient conditioning circuit for powering low-voltage devices using triboelectric nanogenerators. The hysteresis of this microelectromechanical switch is controllable by topological design and the actuation of the switch combines the principles of micro-discharge and electrostatic pulling, without the need of any power-consuming control electronic circuits. The experimental results indicate that the energy harvesting efficiency is improved by two orders of magnitude compared to the conventional full-wave rectifying circuit. Triboelectric nanogenerators have attracted wide attention due to their promising capabilities of scavenging the ambient environmental mechanical energy. However, efficient energy management of the generated high-voltage for practical low-voltage applications is still under investigation. Autonomous switches are key elements for improving the harvested energy per mechanical cycle, but they are complicated to implement at such voltages higher than several hundreds of volts. This paper proposes a self-sustained and automatic hysteresis plasma switch made from silicon micromachining, and implemented in a two-stage efficient conditioning circuit for powering low-voltage devices using triboelectric nanogenerators. The hysteresis of this microelectromechanical switch is controllable by topological design and the actuation of the switch combines the principles of micro-discharge and electrostatic pulling, without the need of any power-consuming control electronic circuits. The experimental results indicate that the energy harvesting efficiency is improved by two orders of magnitude compared to the conventional full-wave rectifying circuit.Triboelectric nanogenerators have attracted wide attention due to their promising capabilities of scavenging the ambient environmental mechanical energy. However, efficient energy management of the generated high-voltage for practical low-voltage applications is still under investigation. Autonomous switches are key elements for improving the harvested energy per mechanical cycle, but they are complicated to implement at such voltages higher than several hundreds of volts. This paper proposes a self-sustained and automatic hysteresis plasma switch made from silicon micromachining, and implemented in a two-stage efficient conditioning circuit for powering low-voltage devices using triboelectric nanogenerators. The hysteresis of this microelectromechanical switch is controllable by topological design and the actuation of the switch combines the principles of micro-discharge and electrostatic pulling, without the need of any power-consuming control electronic circuits. The experimental results indicate that the energy harvesting efficiency is improved by two orders of magnitude compared to the conventional full-wave rectifying circuit.
ArticleNumber	3221
Author	Zhang, Hemin Bourouina, Tarik Marty, Frédéric Zi, Yunlong Galayko, Dimitri Xia, Xin Basset, Philippe
Author_xml	– sequence: 1 givenname: Hemin orcidid: 0000-0002-1067-1137 surname: Zhang fullname: Zhang, Hemin organization: ESYCOM, Univ Gustave Eiffel, CNRS, CNAM, ESIEE Paris, Department of Engineering, The Nanoscience Centre, University of Cambridge – sequence: 2 givenname: Frédéric surname: Marty fullname: Marty, Frédéric organization: ESYCOM, Univ Gustave Eiffel, CNRS, CNAM, ESIEE Paris – sequence: 3 givenname: Xin surname: Xia fullname: Xia, Xin organization: The Chinese University of Hong Kong, Shatin, N.T – sequence: 4 givenname: Yunlong orcidid: 0000-0002-5133-4057 surname: Zi fullname: Zi, Yunlong organization: The Chinese University of Hong Kong, Shatin, N.T – sequence: 5 givenname: Tarik orcidid: 0000-0003-2342-7149 surname: Bourouina fullname: Bourouina, Tarik organization: ESYCOM, Univ Gustave Eiffel, CNRS, CNAM, ESIEE Paris – sequence: 6 givenname: Dimitri orcidid: 0000-0002-7056-7489 surname: Galayko fullname: Galayko, Dimitri email: dimitri.galayko@sorbonne-universite.fr organization: Sorbonne Université, LIP6 – sequence: 7 givenname: Philippe orcidid: 0000-0002-9790-8247 surname: Basset fullname: Basset, Philippe email: philippe.basset@esiee.fr organization: ESYCOM, Univ Gustave Eiffel, CNRS, CNAM, ESIEE Paris
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Snippet	Triboelectric nanogenerators have attracted wide attention due to their promising capabilities of scavenging the ambient environmental mechanical energy.... Conditioning efficiently high-voltage triboelectric nanogenerators for low-voltage applications remains a challenge. Here, the authors demonstrate two orders...
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StartPage	3221
SubjectTerms	142/126 147/135 639/166/987 639/4077/4072 Actuation Circuits Conditioning Electric power generation Electronic circuits Energy Energy harvesting Energy management Engineering Sciences High voltages Humanities and Social Sciences Hysteresis Kinetic energy Micro and nanotechnologies Microelectromechanical systems Microelectronics Micromachining multidisciplinary Nanogenerators Power consumption Scavenging Science Science (multidisciplinary) Stability Switches Voltage
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Title	Employing a MEMS plasma switch for conditioning high-voltage kinetic energy harvesters
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Volume	11
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