Employing a MEMS plasma switch for conditioning high-voltage kinetic energy harvesters

Triboelectric nanogenerators have attracted wide attention due to their promising capabilities of scavenging the ambient environmental mechanical energy. However, efficient energy management of the generated high-voltage for practical low-voltage applications is still under investigation. Autonomous...

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Veröffentlicht in:	Nature communications Jg. 11; H. 1; S. 3221 - 10
Hauptverfasser:	Zhang, Hemin, Marty, Frédéric, Xia, Xin, Zi, Yunlong, Bourouina, Tarik, Galayko, Dimitri, Basset, Philippe
Format:	Journal Article
Sprache:	Englisch
Veröffentlicht:	London Nature Publishing Group UK 26.06.2020 Nature Publishing Group Nature Portfolio
Schlagworte:	142/126 147/135 639/166/987 639/4077/4072 Actuation Circuits Conditioning Electric power generation Electronic circuits Energy Energy harvesting Energy management Engineering Sciences High voltages Humanities and Social Sciences Hysteresis Kinetic energy Micro and nanotechnologies Microelectromechanical systems Microelectronics Micromachining multidisciplinary Nanogenerators Power consumption Scavenging Science Science (multidisciplinary) Stability Switches Voltage
ISSN:	2041-1723, 2041-1723
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Abstract	Triboelectric nanogenerators have attracted wide attention due to their promising capabilities of scavenging the ambient environmental mechanical energy. However, efficient energy management of the generated high-voltage for practical low-voltage applications is still under investigation. Autonomous switches are key elements for improving the harvested energy per mechanical cycle, but they are complicated to implement at such voltages higher than several hundreds of volts. This paper proposes a self-sustained and automatic hysteresis plasma switch made from silicon micromachining, and implemented in a two-stage efficient conditioning circuit for powering low-voltage devices using triboelectric nanogenerators. The hysteresis of this microelectromechanical switch is controllable by topological design and the actuation of the switch combines the principles of micro-discharge and electrostatic pulling, without the need of any power-consuming control electronic circuits. The experimental results indicate that the energy harvesting efficiency is improved by two orders of magnitude compared to the conventional full-wave rectifying circuit. Conditioning efficiently high-voltage triboelectric nanogenerators for low-voltage applications remains a challenge. Here, the authors demonstrate two orders of magnitude improvement of the energy harvesting efficiency by applying a conditioning circuit with self-sustained and automatic hysteresis MEMS micro-plasma switches.
AbstractList	Triboelectric nanogenerators have attracted wide attention due to their promising capabilities of scavenging the ambient environmental mechanical energy. However, efficient energy management of the generated high-voltage for practical low-voltage applications is still under investigation. Autonomous switches are key elements for improving the harvested energy per mechanical cycle, but they are complicated to implement at such voltages higher than several hundreds of volts. This paper proposes a self-sustained and automatic hysteresis plasma switch made from silicon micromachining, and implemented in a two-stage efficient conditioning circuit for powering low-voltage devices using triboelectric nanogenerators. The hysteresis of this microelectromechanical switch is controllable by topological design and the actuation of the switch combines the principles of micro-discharge and electrostatic pulling, without the need of any power-consuming control electronic circuits. The experimental results indicate that the energy harvesting efficiency is improved by two orders of magnitude compared to the conventional full-wave rectifying circuit. Conditioning efficiently high-voltage triboelectric nanogenerators for low-voltage applications remains a challenge. Here, the authors demonstrate two orders of magnitude improvement of the energy harvesting efficiency by applying a conditioning circuit with self-sustained and automatic hysteresis MEMS micro-plasma switches. Triboelectric nanogenerators have attracted wide attention due to their promising capabilities of scavenging the ambient environmental mechanical energy. However, efficient energy management of the generated high-voltage for practical low-voltage applications is still under investigation. Autonomous switches are key elements for improving the harvested energy per mechanical cycle, but they are complicated to implement at such voltages higher than several hundreds of volts. This paper proposes a self-sustained and automatic hysteresis plasma switch made from silicon micromachining, and implemented in a two-stage efficient conditioning circuit for powering low-voltage devices using triboelectric nanogenerators. The hysteresis of this microelectromechanical switch is controllable by topological design and the actuation of the switch combines the principles of micro-discharge and electrostatic pulling, without the need of any power-consuming control electronic circuits. The experimental results indicate that the energy harvesting efficiency is improved by two orders of magnitude compared to the conventional full-wave rectifying circuit. Conditioning efficiently high-voltage triboelectric nanogenerators for low-voltage applications remains a challenge. Here, the authors demonstrate two orders of magnitude improvement of the energy harvesting efficiency by applying a conditioning circuit with self-sustained and automatic hysteresis MEMS micro-plasma switches. Conditioning efficiently high-voltage triboelectric nanogenerators for low-voltage applications remains a challenge. Here, the authors demonstrate two orders of magnitude improvement of the energy harvesting efficiency by applying a conditioning circuit with self-sustained and automatic hysteresis MEMS micro-plasma switches. Triboelectric nanogenerators have attracted wide attention due to their promising capabilities of scavenging the ambient environmental mechanical energy. However, efficient energy management of the generated high-voltage for practical low-voltage applications is still under investigation. Autonomous switches are key elements for improving the harvested energy per mechanical cycle, but they are complicated to implement at such voltages higher than several hundreds of volts. This paper proposes a self-sustained and automatic hysteresis plasma switch made from silicon micromachining, and implemented in a two-stage efficient conditioning circuit for powering low-voltage devices using triboelectric nanogenerators. The hysteresis of this microelectromechanical switch is controllable by topological design and the actuation of the switch combines the principles of micro-discharge and electrostatic pulling, without the need of any power-consuming control electronic circuits. The experimental results indicate that the energy harvesting efficiency is improved by two orders of magnitude compared to the conventional full-wave rectifying circuit. Triboelectric nanogenerators have attracted wide attention due to their promising capabilities of scavenging the ambient environmental mechanical energy. However, efficient energy management of the generated high-voltage for practical low-voltage applications is still under investigation. Autonomous switches are key elements for improving the harvested energy per mechanical cycle, but they are complicated to implement at such voltages higher than several hundreds of volts. This paper proposes a self-sustained and automatic hysteresis plasma switch made from silicon micromachining, and implemented in a two-stage efficient conditioning circuit for powering low-voltage devices using triboelectric nanogenerators. The hysteresis of this microelectromechanical switch is controllable by topological design and the actuation of the switch combines the principles of micro-discharge and electrostatic pulling, without the need of any power-consuming control electronic circuits. The experimental results indicate that the energy harvesting efficiency is improved by two orders of magnitude compared to the conventional full-wave rectifying circuit.Triboelectric nanogenerators have attracted wide attention due to their promising capabilities of scavenging the ambient environmental mechanical energy. However, efficient energy management of the generated high-voltage for practical low-voltage applications is still under investigation. Autonomous switches are key elements for improving the harvested energy per mechanical cycle, but they are complicated to implement at such voltages higher than several hundreds of volts. This paper proposes a self-sustained and automatic hysteresis plasma switch made from silicon micromachining, and implemented in a two-stage efficient conditioning circuit for powering low-voltage devices using triboelectric nanogenerators. The hysteresis of this microelectromechanical switch is controllable by topological design and the actuation of the switch combines the principles of micro-discharge and electrostatic pulling, without the need of any power-consuming control electronic circuits. The experimental results indicate that the energy harvesting efficiency is improved by two orders of magnitude compared to the conventional full-wave rectifying circuit.
ArticleNumber	3221
Author	Zhang, Hemin Bourouina, Tarik Marty, Frédéric Zi, Yunlong Galayko, Dimitri Xia, Xin Basset, Philippe
Author_xml	– sequence: 1 givenname: Hemin orcidid: 0000-0002-1067-1137 surname: Zhang fullname: Zhang, Hemin organization: ESYCOM, Univ Gustave Eiffel, CNRS, CNAM, ESIEE Paris, Department of Engineering, The Nanoscience Centre, University of Cambridge – sequence: 2 givenname: Frédéric surname: Marty fullname: Marty, Frédéric organization: ESYCOM, Univ Gustave Eiffel, CNRS, CNAM, ESIEE Paris – sequence: 3 givenname: Xin surname: Xia fullname: Xia, Xin organization: The Chinese University of Hong Kong, Shatin, N.T – sequence: 4 givenname: Yunlong orcidid: 0000-0002-5133-4057 surname: Zi fullname: Zi, Yunlong organization: The Chinese University of Hong Kong, Shatin, N.T – sequence: 5 givenname: Tarik orcidid: 0000-0003-2342-7149 surname: Bourouina fullname: Bourouina, Tarik organization: ESYCOM, Univ Gustave Eiffel, CNRS, CNAM, ESIEE Paris – sequence: 6 givenname: Dimitri orcidid: 0000-0002-7056-7489 surname: Galayko fullname: Galayko, Dimitri email: dimitri.galayko@sorbonne-universite.fr organization: Sorbonne Université, LIP6 – sequence: 7 givenname: Philippe orcidid: 0000-0002-9790-8247 surname: Basset fullname: Basset, Philippe email: philippe.basset@esiee.fr organization: ESYCOM, Univ Gustave Eiffel, CNRS, CNAM, ESIEE Paris
BackLink	https://hal.science/hal-03090276$$DView record in HAL
BookMark	eNp9Ustu1DAUjVARfdAfYBWJDSwCfjvZIFXV0FaaigWPreX4kXhI7MHODJq_x2kqoLOoN_a9Pufcc-17Xpz44E1RvIHgAwS4_pgIJIxXAIEKcgCbir4ozhAgMIcIn_x3Pi0uU9qAvHADa0JeFacY0QZSyM6KH6txO4SD810py_vV_ddyO8g0yjL9dpPqSxtiqYLXbnLBz6jedX21D8MkO1P-dN5MTpXGm9gdyl7GvUmTiel18dLKIZnLx_2i-P559e36tlp_ubm7vlpXikE-Va0GmBGpuZRaQsUNwwjb2jZA5RhqgjVkFHBrjLII1hxo3TDdNg2jmqkWXxR3i64OciO20Y0yHkSQTjwkQuyEjNnhYAS0mlhGbWspIJLLRta5ECfI0Na0hGatT4vWdteORivjpyiHJ6JPb7zrRRf2gmOYDdVZ4P0i0B_Rbq_WYs4BDBqAONvDjH33WCyGX7v8aGJ0SZlhkN6EXRKIwBoiTgHO0LdH0E3YRZ-fdUZxDkBDZ0G0oFQMKUVj_zqAQMwTI5aJEXlixMPEiLnl-oik3CTnr84NuuF5Kl6oKdfxnYn_XD3D-gM0PNYD
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DBID	C6C AAYXX CITATION 3V. 7QL 7QP 7QR 7SN 7SS 7ST 7T5 7T7 7TM 7TO 7X7 7XB 88E 8AO 8FD 8FE 8FG 8FH 8FI 8FJ 8FK ABUWG AEUYN AFKRA ARAPS AZQEC BBNVY BENPR BGLVJ BHPHI C1K CCPQU DWQXO FR3 FYUFA GHDGH GNUQQ H94 HCIFZ K9. LK8 M0S M1P M7P P5Z P62 P64 PHGZM PHGZT PIMPY PJZUB PKEHL PPXIY PQEST PQGLB PQQKQ PQUKI PRINS RC3 SOI 7X8 1XC VOOES 5PM DOA
DOI	10.1038/s41467-020-17019-5
DatabaseName	Springer Nature OA Free Journals CrossRef ProQuest Central (Corporate) Bacteriology Abstracts (Microbiology B) Calcium & Calcified Tissue Abstracts Chemoreception Abstracts Ecology Abstracts Entomology Abstracts (Full archive) Environment Abstracts Immunology Abstracts Industrial and Applied Microbiology Abstracts (Microbiology A) Nucleic Acids Abstracts Oncogenes and Growth Factors Abstracts Health & Medical Collection ProQuest Central (purchase pre-March 2016) Medical Database (Alumni Edition) ProQuest Pharma Collection Technology Research Database ProQuest SciTech Collection ProQuest Technology Collection ProQuest Natural Science Collection Hospital Premium Collection Hospital Premium Collection (Alumni Edition) ProQuest Central (Alumni) (purchase pre-March 2016) ProQuest Central (Alumni) ProQuest One Sustainability (subscription) ProQuest Central UK/Ireland Advanced Technologies & Computer Science Collection ProQuest Central Essentials Biological Science Collection ProQuest Central (subscription) Technology collection Natural Science Collection Environmental Sciences and Pollution Management ProQuest One ProQuest Central Engineering Research Database Health Research Premium Collection Health Research Premium Collection (Alumni) ProQuest Central Student AIDS and Cancer Research Abstracts SciTech Premium Collection ProQuest Health & Medical Complete (Alumni) Biological Sciences Health & Medical Collection (Alumni Edition) PML(ProQuest Medical Library) Biological Science Database Advanced Technologies & Aerospace Database ProQuest Advanced Technologies & Aerospace Collection Biotechnology and BioEngineering Abstracts ProQuest Central Premium ProQuest One Academic Publicly Available Content Database ProQuest Health & Medical Research Collection ProQuest One Academic Middle East (New) One Health & Nursing ProQuest One Academic Eastern Edition (DO NOT USE) ProQuest One Applied & Life Sciences ProQuest One Academic (retired) ProQuest One Academic UKI Edition ProQuest Central China Genetics Abstracts Environment Abstracts MEDLINE - Academic Hyper Article en Ligne (HAL) Hyper Article en Ligne (HAL) (Open Access) PubMed Central (Full Participant titles) DOAJ Directory of Open Access Journals
DatabaseTitle	CrossRef Publicly Available Content Database ProQuest Central Student Oncogenes and Growth Factors Abstracts ProQuest Advanced Technologies & Aerospace Collection ProQuest Central Essentials Nucleic Acids Abstracts SciTech Premium Collection ProQuest Central China Environmental Sciences and Pollution Management ProQuest One Applied & Life Sciences ProQuest One Sustainability Health Research Premium Collection Natural Science Collection Health & Medical Research Collection Biological Science Collection Chemoreception Abstracts Industrial and Applied Microbiology Abstracts (Microbiology A) ProQuest Central (New) ProQuest Medical Library (Alumni) Advanced Technologies & Aerospace Collection ProQuest Biological Science Collection ProQuest One Academic Eastern Edition ProQuest Hospital Collection ProQuest Technology Collection Health Research Premium Collection (Alumni) Biological Science Database Ecology Abstracts ProQuest Hospital Collection (Alumni) Biotechnology and BioEngineering Abstracts Entomology Abstracts ProQuest Health & Medical Complete ProQuest One Academic UKI Edition Engineering Research Database ProQuest One Academic Calcium & Calcified Tissue Abstracts ProQuest One Academic (New) Technology Collection Technology Research Database ProQuest One Academic Middle East (New) ProQuest Health & Medical Complete (Alumni) ProQuest Central (Alumni Edition) ProQuest One Community College ProQuest One Health & Nursing ProQuest Natural Science Collection ProQuest Pharma Collection ProQuest Central ProQuest Health & Medical Research Collection Genetics Abstracts Health and Medicine Complete (Alumni Edition) ProQuest Central Korea Bacteriology Abstracts (Microbiology B) AIDS and Cancer Research Abstracts ProQuest SciTech Collection Advanced Technologies & Aerospace Database ProQuest Medical Library Immunology Abstracts Environment Abstracts ProQuest Central (Alumni) MEDLINE - Academic
DatabaseTitleList	Publicly Available Content Database CrossRef MEDLINE - Academic
Database_xml	– sequence: 1 dbid: DOA name: DOAJ Directory of Open Access Journals url: https://www.doaj.org/ sourceTypes: Open Website – sequence: 2 dbid: PIMPY name: Publicly Available Content Database url: http://search.proquest.com/publiccontent sourceTypes: Aggregation Database
DeliveryMethod	fulltext_linktorsrc
Discipline	Biology
EISSN	2041-1723
EndPage	10
ExternalDocumentID	oai_doaj_org_article_1fd4f65fbf504a7a9a88f9742e5beb45 PMC7319968 oai:HAL:hal-03090276v1 10_1038_s41467_020_17019_5
GroupedDBID	--- 0R~ 39C 3V. 53G 5VS 70F 7X7 88E 8AO 8FE 8FG 8FH 8FI 8FJ AAHBH AAJSJ ABUWG ACGFO ACGFS ACIWK ACMJI ACPRK ACSMW ADBBV ADFRT ADMLS ADRAZ AENEX AEUYN AFKRA AFRAH AHMBA AJTQC ALIPV ALMA_UNASSIGNED_HOLDINGS AMTXH AOIJS ARAPS ASPBG AVWKF AZFZN BBNVY BCNDV BENPR BGLVJ BHPHI BPHCQ BVXVI C6C CCPQU DIK EBLON EBS EE. EMOBN F5P FEDTE FYUFA GROUPED_DOAJ HCIFZ HMCUK HVGLF HYE HZ~ KQ8 LK8 M1P M48 M7P M~E NAO O9- OK1 P2P P62 PIMPY PQQKQ PROAC PSQYO RNS RNT RNTTT RPM SNYQT SV3 TSG UKHRP AASML AAYXX AFFHD CITATION PHGZM PHGZT PJZUB PPXIY PQGLB 7QL 7QP 7QR 7SN 7SS 7ST 7T5 7T7 7TM 7TO 7XB 8FD 8FK AZQEC C1K DWQXO FR3 GNUQQ H94 K9. P64 PKEHL PQEST PQUKI PRINS RC3 SOI 7X8 1XC 4.4 BAPOH CAG COF EJD LGEZI LOTEE NADUK NXXTH VOOES 5PM
ID	FETCH-LOGICAL-c617t-bd0364ad7aada1c7e6323f8f90cda11d43d16507feecf21870dd96db9965d6cb3
IEDL.DBID	M7P
ISICitedReferencesCount	88
ISICitedReferencesURI	http://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=Summon&SrcAuth=ProQuest&DestLinkType=CitingArticles&DestApp=WOS_CPL&KeyUT=000544946300003&url=https%3A%2F%2Fcvtisr.summon.serialssolutions.com%2F%23%21%2Fsearch%3Fho%3Df%26include.ft.matches%3Dt%26l%3Dnull%26q%3D
ISSN	2041-1723
IngestDate	Fri Oct 03 12:20:32 EDT 2025 Tue Nov 04 01:43:13 EST 2025 Tue Oct 14 21:03:33 EDT 2025 Sun Nov 09 09:43:03 EST 2025 Tue Oct 07 07:01:46 EDT 2025 Sat Nov 29 06:20:25 EST 2025 Tue Nov 18 20:59:25 EST 2025 Fri Feb 21 02:40:08 EST 2025
IsDoiOpenAccess	true
IsOpenAccess	true
IsPeerReviewed	true
IsScholarly	true
Issue	1
Language	English
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LinkModel	DirectLink
MergedId	FETCHMERGED-LOGICAL-c617t-bd0364ad7aada1c7e6323f8f90cda11d43d16507feecf21870dd96db9965d6cb3
Notes	ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 14 content type line 23
ORCID	0000-0002-7056-7489 0000-0002-9790-8247 0000-0002-5133-4057 0000-0003-2342-7149 0000-0002-1067-1137 0000-0002-9881-2036
OpenAccessLink	https://www.proquest.com/docview/2417700951?pq-origsite=%requestingapplication%
PMID	32591516
PQID	2417700951
PQPubID	546298
PageCount	10
ParticipantIDs	doaj_primary_oai_doaj_org_article_1fd4f65fbf504a7a9a88f9742e5beb45 pubmedcentral_primary_oai_pubmedcentral_nih_gov_7319968 hal_primary_oai_HAL_hal_03090276v1 proquest_miscellaneous_2418127503 proquest_journals_2417700951 crossref_primary_10_1038_s41467_020_17019_5 crossref_citationtrail_10_1038_s41467_020_17019_5 springer_journals_10_1038_s41467_020_17019_5
PublicationCentury	2000
PublicationDate	2020-06-26
PublicationDateYYYYMMDD	2020-06-26
PublicationDate_xml	– month: 06 year: 2020 text: 2020-06-26 day: 26
PublicationDecade	2020
PublicationPlace	London
PublicationPlace_xml	– name: London
PublicationTitle	Nature communications
PublicationTitleAbbrev	Nat Commun
PublicationYear	2020
Publisher	Nature Publishing Group UK Nature Publishing Group Nature Portfolio
Publisher_xml	– name: Nature Publishing Group UK – name: Nature Publishing Group – name: Nature Portfolio
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SSID	ssj0000391844
Score	2.6034079
Snippet	Triboelectric nanogenerators have attracted wide attention due to their promising capabilities of scavenging the ambient environmental mechanical energy.... Conditioning efficiently high-voltage triboelectric nanogenerators for low-voltage applications remains a challenge. Here, the authors demonstrate two orders...
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SubjectTerms	142/126 147/135 639/166/987 639/4077/4072 Actuation Circuits Conditioning Electric power generation Electronic circuits Energy Energy harvesting Energy management Engineering Sciences High voltages Humanities and Social Sciences Hysteresis Kinetic energy Micro and nanotechnologies Microelectromechanical systems Microelectronics Micromachining multidisciplinary Nanogenerators Power consumption Scavenging Science Science (multidisciplinary) Stability Switches Voltage
SummonAdditionalLinks	– databaseName: DOAJ Directory of Open Access Journals dbid: DOA link: http://cvtisr.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwrV1Lb9QwEB6hCiQuiPIQgbYyiBtYzcPx41iqVj3QComHerP81K6AtNpsF_HvGTvZZVMJuHCMYyfReMbzTcb-BuA1F0zZEBQN0grKvK-psWWk6Kp9wEiOsdrlYhPi4kJeXqoPW6W-0p6wgR54ENxhFT2LvI02tiUzwigjZUQQXIfWBssye2kp1FYwldfgRmHowsZTMmUjD3uW14QULWUKctpOPFEm7Ef_MkvbIbew5u2dkrfSpdkLnT6EByN8JEfDZ-_CndA9gntDQcmfj-HLUMAXhxJDzk_OP5JrRMffDel_zHF6CCJUggGwn4-_YUliK6a4Qi1xWSFfEXHic0nI5wHJzCxWmUehfwKfT08-HZ_RsXICdYhIltT6lF40XhjjTeVE4E3dRJRb6fC68qzxFUIzEUNwEZ28KL1X3FsMflrPnW2ewk531YVnQNDAFbYxieOYi0oyK4KKvq0cR-ffFFCtpajdSCueqlt80zm93Ug9SF6j5HWWvG4LeLMZcz2Qavy197s0OZueiRA7N6Ca6FFN9L_UpIBXOLWTZ5wdvdepLSWZMDjnq6qAvfXM69GUe40QR4iMRAt4ubmNRpgyK6YLVze5j8xM-SgOMdGYyRund7r5LNN5iybtBJcFvF3r1u-X_1kqz_-HVF7A_TpZRMlpzfdgZ7m4Cftw162W835xkE3qFy_fJRY priority: 102 providerName: Directory of Open Access Journals
Title	Employing a MEMS plasma switch for conditioning high-voltage kinetic energy harvesters
URI	https://link.springer.com/article/10.1038/s41467-020-17019-5 https://www.proquest.com/docview/2417700951 https://www.proquest.com/docview/2418127503 https://hal.science/hal-03090276 https://pubmed.ncbi.nlm.nih.gov/PMC7319968 https://doaj.org/article/1fd4f65fbf504a7a9a88f9742e5beb45
Volume	11
WOSCitedRecordID	wos000544946300003&url=https%3A%2F%2Fcvtisr.summon.serialssolutions.com%2F%23%21%2Fsearch%3Fho%3Df%26include.ft.matches%3Dt%26l%3Dnull%26q%3D
hasFullText	1
inHoldings	1
isFullTextHit
isPrint
journalDatabaseRights	– providerCode: PRVAON databaseName: DOAJ Directory of Open Access Journals customDbUrl: eissn: 2041-1723 dateEnd: 99991231 omitProxy: false ssIdentifier: ssj0000391844 issn: 2041-1723 databaseCode: DOA dateStart: 20150101 isFulltext: true titleUrlDefault: https://www.doaj.org/ providerName: Directory of Open Access Journals – providerCode: PRVHPJ databaseName: ROAD: Directory of Open Access Scholarly Resources customDbUrl: eissn: 2041-1723 dateEnd: 99991231 omitProxy: false ssIdentifier: ssj0000391844 issn: 2041-1723 databaseCode: M~E dateStart: 20100101 isFulltext: true titleUrlDefault: https://road.issn.org providerName: ISSN International Centre – providerCode: PRVPQU databaseName: Advanced Technologies & Aerospace Database customDbUrl: eissn: 2041-1723 dateEnd: 99991231 omitProxy: false ssIdentifier: ssj0000391844 issn: 2041-1723 databaseCode: P5Z dateStart: 20100101 isFulltext: true titleUrlDefault: https://search.proquest.com/hightechjournals providerName: ProQuest – providerCode: PRVPQU databaseName: Biological Science Database customDbUrl: eissn: 2041-1723 dateEnd: 99991231 omitProxy: false ssIdentifier: ssj0000391844 issn: 2041-1723 databaseCode: M7P dateStart: 20100101 isFulltext: true titleUrlDefault: http://search.proquest.com/biologicalscijournals providerName: ProQuest – providerCode: PRVPQU databaseName: Health & Medical Collection customDbUrl: eissn: 2041-1723 dateEnd: 99991231 omitProxy: false ssIdentifier: ssj0000391844 issn: 2041-1723 databaseCode: 7X7 dateStart: 20100101 isFulltext: true titleUrlDefault: https://search.proquest.com/healthcomplete providerName: ProQuest – providerCode: PRVPQU databaseName: ProQuest Central customDbUrl: eissn: 2041-1723 dateEnd: 99991231 omitProxy: false ssIdentifier: ssj0000391844 issn: 2041-1723 databaseCode: BENPR dateStart: 20100101 isFulltext: true titleUrlDefault: https://www.proquest.com/central providerName: ProQuest – providerCode: PRVPQU databaseName: Publicly Available Content Database customDbUrl: eissn: 2041-1723 dateEnd: 99991231 omitProxy: false ssIdentifier: ssj0000391844 issn: 2041-1723 databaseCode: PIMPY dateStart: 20100101 isFulltext: true titleUrlDefault: http://search.proquest.com/publiccontent providerName: ProQuest
link	http://cvtisr.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwpV1bb9MwFLbYBhIv3CcCozKIN7CWixM7T2hDnYZEq4ibCi-Wr7RiS0vTFfHvOXbSjkxiL7xEqu3YTY597vkOQi8LRktlbUksV4xQY1IiVewIiGpjwZKjNNWh2AQbj_lkUladw63p0io3PDEwajPX3kd-CJKGsaAQvFn8JL5qlI-udiU0dtCeR0lIQ-petfWxePRzTmn3rUyc8cOGBs7gbaYARE7ynjwKsP0gZaY-KfIvjfNqvuSVoGmQRSd3__cp7qE7nRaKj9ptcx_dsPUDdKutS_n7IfrS1gGGtbHEo-HoI16Akn0ucfNrBlTGoOhisKPNrPPmYg96TIDRrYA74R-guMK82IbPCvFULtcBjqF5hD6fDD-9PSVdAQaiQbFZEWV8lFIaJqWRiWa2yNLMcVfGGn4nhmYmAQ2POWu1A12BxcaUhVFgQ-Wm0CrbR7v1vLaPEQY-UUIb5XAf1a7kVDFbOpMnugAdIotQsiGD0B06uS-ScSZClDzjoiWdANKJQDqRR-jV9p5Fi81x7ehjT93tSI-rHRrmy--iO6YicYa6InfK5TGVTJaSw-MymtpcWUVhkhewN3pznB69F77Nx6rAxi_WSYQONsQXHUdoxCXlI_R82w1n2QdoZG3nF2EMD4D78DpYb8v1Vuz31LNpQAVnmU8o5xF6vdmcl4v_-608uf6_PkW3U39Y4oKkxQHaXS0v7DN0U69Xs2Y5QDtswsKVD9De8XBcfRgEp8YgnEO4Vvk36KnejaqvfwCogTks
linkProvider	ProQuest
linkToHtml	http://cvtisr.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMw1V3Nb9MwFH8aHQgufCMKAwyCE1jLhxM7B4QGbGq1tqrEQNvJOLZDK6AtTddp_xR_I89O0tFJ7LYDxziOEzu_9-X3_B7Ay5SzLLc2o1bknDJjIqryoKAoqo1FS46xSPtiE3wwEIeH2XADfjdnYVxYZcMTPaM2U-32yLdR0nDuFYJ3s1_UVY1y3tWmhEYFi317eoImW_m2-xH_76so2ts9-NChdVUBqlFaL2hunOtNGa6UUaHmNo2juBBFFmi8Dg2LTYhqCy-s1QUKQB4Yk6UmR8MgManOYxz3CmwyB_YWbA67_eHRalfH5VsXjNWnc4JYbJfM8yJnpfnU5zRZk4C-UADKtZELw_xLxz0foXnOTeul396t_23dbsPNWs8mOxVh3IENO7kL16rKm6f34EtV6RjnShTp7_Y_kRmaET8VKU_GiGOCqjzRU-fOr_ariUvrTJGVL5D_ku-omuO4xPqDk2Sk5kufcKK8D58vZVIPoDWZTuxDIMgJM2xjAp9jusgEy7nNCpOEOkUtKW5D2Px2qev8664MyA_p4wBiISuoSISK9FCRSRter56ZVdlHLuz93qFp1dNlDvcN0_k3WTMiGRaGFWlS5EUSMMVVpgROl7PIJrnNGQ7yArG4NkZnpyddm_PGBRFPl2EbthqwyZrnlfIMaW14vrqN3Mq5oNTETo99H-FLCuBy8DWIr71x_c5kPPJ5z3nsQuZFG940xHD28n-vyqOLv_UZXO8c9Huy1x3sP4YbkSPUIKVRugWtxfzYPoGrerkYl_OnNa0T-HrZZPIH3YOTBA
linkToPdf	http://cvtisr.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMw1V1bb9MwFD4a4yJeuCMKAwyCJ7CaixM7DwgNtmrTtqoSF028GMcXWgFtabpO-2v8Oo6dpKOT2NseeIzjOLHznZvP8TkAL3LOitLaglpRcsqMSagqI0dRVBuLlhxjiQ7FJni_Lw4Pi8Ea_G7PwviwypYnBkZtJtrvkXdR0nAeFIKua8IiBlu9t9Nf1FeQ8p7WtpxGDZE9e3KM5lv1ZncL__XLJOltf3y_Q5sKA1Sj5J7T0ng3nDJcKaNizW2eJqkTrog0XseGpSZGFYY7a7VDYcgjY4rclGgkZCbXZYrjXoLLHG1MH044yL4s93d85nXBWHNOJ0pFt2KBK3l7LSRBp9mKLAwlA1DCDX1A5l_a7tlYzTMO2yAHezf_5xW8BTca7Zts1uRyG9bs-A5cretxntyFz3X9Y5w3UeRg--ADmaJx8VOR6niE6Cao4BM98U7-eheb-GTPFBn8HLky-Y4KO45LbDhOSYZqtghpKKp78OlCJnUf1seTsX0ABPljgW1M4HNMu0KwktvCmSzWOepOaQfiFgJSN1nZfXGQHzJEB6RC1rCRCBsZYCOzDrxaPjOtc5Kc2_udR9ayp88nHhoms2-yYU8ydoa5PHOlyyKmuCqUwOlyltistCXDQZ4jLlfG2Nncl77N--iihOeLuAMbLfBkwwkreYq6Djxb3kYe5h1TamwnR6GPCIUGcDn4CtxX3rh6ZzwahmzoPPWB9KIDr1vCOH35v1fl4fnf-hSuIW3I_d3-3iO4nniajXKa5BuwPp8d2cdwRS_mo2r2JBA9ga8XTSN_AJEfmmc
openUrl	ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Employing+a+MEMS+plasma+switch+for+conditioning+high-voltage+kinetic+energy+harvesters&rft.jtitle=Nature+communications&rft.au=Zhang+Hemin&rft.au=Marty%2C+Fr%C3%A9d%C3%A9ric&rft.au=Xia+Xin&rft.au=Zi+Yunlong&rft.date=2020-06-26&rft.pub=Nature+Publishing+Group&rft.eissn=2041-1723&rft.volume=11&rft.issue=1&rft_id=info:doi/10.1038%2Fs41467-020-17019-5&rft.externalDBID=HAS_PDF_LINK
thumbnail_l	http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=2041-1723&client=summon
thumbnail_m	http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=2041-1723&client=summon
thumbnail_s	http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=2041-1723&client=summon