Hybrid-driven modeling using a BiLSTM–AdaBoost algorithm for diameter prediction in the constant diameter stage of Czochralski silicon single crystals

During the preparation of electronic-grade silicon single crystals (SSC), accurately predicting the crystal diameter is crucial for obtaining high-quality crystals. In this paper, a hybrid-driven modeling method integrating Bidirectional Long Short-Term Memory network (BiLSTM) and Adaptive Boosting...

Full description

Saved in:

Bibliographic Details
Published in:	Scientific reports Vol. 15; no. 1; pp. 18100 - 20
Main Authors:	Liu, Yu-Yu, Liu, Ding, Wu, Shi-Hai, Jing, Yi-Ming
Format:	Journal Article
Language:	English
Published:	London Nature Publishing Group UK 24.05.2025 Nature Publishing Group Nature Portfolio
Subjects:	Adaptive boosting algorithms Algorithms Crystals Czochralski silicon single crystals Humanities and Social Sciences Hybrid drive modeling Long short-term memory Long short-term memory network Mechanistic modeling multidisciplinary Predictions Science Science (multidisciplinary) Silicon Single crystals Time series Long short-term memory network Mechanistic modeling Adaptive boosting algorithms Czochralski silicon single crystals Hybrid drive modeling
ISSN:	2045-2322, 2045-2322
Online Access:	Get full text
Tags:	Add Tag No Tags, Be the first to tag this record!

Be the first to leave a comment!