Hybrid-driven modeling using a BiLSTM–AdaBoost algorithm for diameter prediction in the constant diameter stage of Czochralski silicon single crystals

During the preparation of electronic-grade silicon single crystals (SSC), accurately predicting the crystal diameter is crucial for obtaining high-quality crystals. In this paper, a hybrid-driven modeling method integrating Bidirectional Long Short-Term Memory network (BiLSTM) and Adaptive Boosting...

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Vydáno v:	Scientific reports Ročník 15; číslo 1; s. 18100 - 20
Hlavní autoři:	Liu, Yu-Yu, Liu, Ding, Wu, Shi-Hai, Jing, Yi-Ming
Médium:	Journal Article
Jazyk:	angličtina
Vydáno:	London Nature Publishing Group UK 24.05.2025 Nature Publishing Group Nature Portfolio
Témata:	Adaptive boosting algorithms Algorithms Crystals Czochralski silicon single crystals Humanities and Social Sciences Hybrid drive modeling Long short-term memory Long short-term memory network Mechanistic modeling multidisciplinary Predictions Science Science (multidisciplinary) Silicon Single crystals Time series Long short-term memory network Mechanistic modeling Adaptive boosting algorithms Czochralski silicon single crystals Hybrid drive modeling
ISSN:	2045-2322, 2045-2322
On-line přístup:	Získat plný text
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