Combined scheduling algorithm for re-entrant batch-processing machines in semiconductor wafer manufacturing

In this paper, a new combined scheduling algorithm is proposed to address the problem of minimising total weighted tardiness on re-entrant batch-processing machines (RBPMs) with incompatible job families in the semiconductor wafer fabrication system (SWFS). The general combined scheduling algorithm...

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Bibliographic Details
Published in:	International journal of production research Vol. 53; no. 6; pp. 1866 - 1879
Main Authors:	Jia, Wenyou, Jiang, Zhibin, Li, You
Format:	Journal Article
Language:	English
Published:	London Taylor & Francis 19.03.2015 Taylor & Francis LLC
Subjects:	Algorithms batch-oriented combined scheduling algorithm Effectiveness studies family-oriented combined scheduling algorithm Integer programming Linear programming Mathematical models Mixed integer Operations research Platforms Production scheduling re-entrant batch-processing machine rolling horizon control strategy Scheduling Scheduling algorithms Semiconductors Simulation Strategy Wafers
ISSN:	0020-7543, 1366-588X
Online Access:	Get full text
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