Influence of the magnetic field on the discharge physics of a high power impulse magnetron sputtering discharge

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Bibliographic Details
Published in:	Journal of physics. D, Applied physics Vol. 55; no. 1
Main Authors:	Rudolph, M, Brenning, N, Hajihoseini, H, Raadu, M A, Minea, T M, Anders, A, Gudmundsson, J T, Lundin, D
Format:	Journal Article
Language:	English
Published:	IOP Publishing 06.10.2021
Subjects:	high power impulse magnetron sputtering magnetron sputtering sputter deposition sputtering
ISSN:	0022-3727, 1361-6463
Online Access:	Get full text
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