An Overview on Time-Resolved Optical Analysis of HiPIMS Discharge

The progress in the time‐resolved characterization of HiPIMS discharges performed during the last decade in our group is overviewed. Optical emission and absorption spectroscopy, as well as laser‐induced fluorescence‐based techniques have been mainly utilized. The results covering such important asp...

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Veröffentlicht in:Plasma processes and polymers Jg. 12; H. 9; S. 1010 - 1027
Hauptverfasser: Britun, Nikolay, Konstantinidis, Stephanos, Snyders, Rony
Format: Journal Article
Sprache:Englisch
Veröffentlicht: Weinheim Blackwell Publishing Ltd 01.09.2015
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Schlagworte:
Absorption spectroscopy
Density
Discharge
Excitation
Ground state
HiPIMS
Ionization
LIF
LIF imaging
Plasma
plasma diagnostics
Rarefaction
resonant absorption
Titanium
Velocity distribution
ISSN:1612-8850, 1612-8869
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Zusammenfassung:The progress in the time‐resolved characterization of HiPIMS discharges performed during the last decade in our group is overviewed. Optical emission and absorption spectroscopy, as well as laser‐induced fluorescence‐based techniques have been mainly utilized. The results covering such important aspects of the HiPIMS discharge as the density evolution of the discharge species, their ionization and excitation, propagation of secondary electrons in the discharge volume, dynamics of velocity distribution of the discharge species, gas rarefaction, etc. are discussed. The two‐dimensional distributions of Ti and Ti ion density as a typical example of sputtered particles in HiPIMS discharge. This figure demonstrates spatial complementarity of neutral and ionized sputtered atoms in the discharge volume at low pressure (5 mTorr). The paper mainly deals with temporal and spatial behavior of the ground state species in HiPIMS discharges.
Bibliographie:ArticleID:PPAP201500051
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ISSN:1612-8850
1612-8869
DOI:10.1002/ppap.201500051