An Overview on Time-Resolved Optical Analysis of HiPIMS Discharge

The progress in the time‐resolved characterization of HiPIMS discharges performed during the last decade in our group is overviewed. Optical emission and absorption spectroscopy, as well as laser‐induced fluorescence‐based techniques have been mainly utilized. The results covering such important asp...

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Veröffentlicht in:	Plasma processes and polymers Jg. 12; H. 9; S. 1010 - 1027
Hauptverfasser:	Britun, Nikolay, Konstantinidis, Stephanos, Snyders, Rony
Format:	Journal Article
Sprache:	Englisch
Veröffentlicht:	Weinheim Blackwell Publishing Ltd 01.09.2015 Wiley Subscription Services, Inc
Schlagworte:	Absorption spectroscopy Density Discharge Excitation Ground state HiPIMS Ionization LIF LIF imaging Plasma plasma diagnostics Rarefaction resonant absorption Titanium Velocity distribution
ISSN:	1612-8850, 1612-8869
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Abstract	The progress in the time‐resolved characterization of HiPIMS discharges performed during the last decade in our group is overviewed. Optical emission and absorption spectroscopy, as well as laser‐induced fluorescence‐based techniques have been mainly utilized. The results covering such important aspects of the HiPIMS discharge as the density evolution of the discharge species, their ionization and excitation, propagation of secondary electrons in the discharge volume, dynamics of velocity distribution of the discharge species, gas rarefaction, etc. are discussed. The two‐dimensional distributions of Ti and Ti ion density as a typical example of sputtered particles in HiPIMS discharge. This figure demonstrates spatial complementarity of neutral and ionized sputtered atoms in the discharge volume at low pressure (5 mTorr). The paper mainly deals with temporal and spatial behavior of the ground state species in HiPIMS discharges.
AbstractList	The progress in the time-resolved characterization of HiPIMS discharges performed during the last decade in our group is overviewed. Optical emission and absorption spectroscopy, as well as laser-induced fluorescence-based techniques have been mainly utilized. The results covering such important aspects of the HiPIMS discharge as the density evolution of the discharge species, their ionization and excitation, propagation of secondary electrons in the discharge volume, dynamics of velocity distribution of the discharge species, gas rarefaction, etc. are discussed. The progress in the time-resolved characterization of HiPIMS discharges performed during the last decade in our group is overviewed. Optical emission and absorption spectroscopy, as well as laser-induced fluorescence-based techniques have been mainly utilized. The results covering such important aspects of the HiPIMS discharge as the density evolution of the discharge species, their ionization and excitation, propagation of secondary electrons in the discharge volume, dynamics of velocity distribution of the discharge species, gas rarefaction, etc. are discussed. The two-dimensional distributions of Ti and Ti ion density as a typical example of sputtered particles in HiPIMS discharge. This figure demonstrates spatial complementarity of neutral and ionized sputtered atoms in the discharge volume at low pressure (5 mTorr). The paper mainly deals with temporal and spatial behavior of the ground state species in HiPIMS discharges. The progress in the time‐resolved characterization of HiPIMS discharges performed during the last decade in our group is overviewed. Optical emission and absorption spectroscopy, as well as laser‐induced fluorescence‐based techniques have been mainly utilized. The results covering such important aspects of the HiPIMS discharge as the density evolution of the discharge species, their ionization and excitation, propagation of secondary electrons in the discharge volume, dynamics of velocity distribution of the discharge species, gas rarefaction, etc. are discussed. The two‐dimensional distributions of Ti and Ti ion density as a typical example of sputtered particles in HiPIMS discharge. This figure demonstrates spatial complementarity of neutral and ionized sputtered atoms in the discharge volume at low pressure (5 mTorr). The paper mainly deals with temporal and spatial behavior of the ground state species in HiPIMS discharges.
Author	Britun, Nikolay Konstantinidis, Stephanos Snyders, Rony
Author_xml	– sequence: 1 givenname: Nikolay surname: Britun fullname: Britun, Nikolay email: nikolay.britun@umons.ac.be organization: Chimie des Interactions Plasma-Surface (ChIPS), CIRMAP, Université de Mons, 23 Place du Parc, B-7000 Mons, Belgium – sequence: 2 givenname: Stephanos surname: Konstantinidis fullname: Konstantinidis, Stephanos organization: Chimie des Interactions Plasma-Surface (ChIPS), CIRMAP, Université de Mons, 23 Place du Parc, B-7000 Mons, Belgium – sequence: 3 givenname: Rony surname: Snyders fullname: Snyders, Rony organization: Chimie des Interactions Plasma-Surface (ChIPS), CIRMAP, Université de Mons, 23 Place du Parc, B-7000 Mons, Belgium
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Snippet	The progress in the time‐resolved characterization of HiPIMS discharges performed during the last decade in our group is overviewed. Optical emission and... The progress in the time-resolved characterization of HiPIMS discharges performed during the last decade in our group is overviewed. Optical emission and...
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SubjectTerms	Absorption spectroscopy Density Discharge Excitation Ground state HiPIMS Ionization LIF LIF imaging Plasma plasma diagnostics Rarefaction resonant absorption Titanium Velocity distribution
Title	An Overview on Time-Resolved Optical Analysis of HiPIMS Discharge
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