An Overview on Time-Resolved Optical Analysis of HiPIMS Discharge
The progress in the time‐resolved characterization of HiPIMS discharges performed during the last decade in our group is overviewed. Optical emission and absorption spectroscopy, as well as laser‐induced fluorescence‐based techniques have been mainly utilized. The results covering such important asp...
Uloženo v:
| Vydáno v: | Plasma processes and polymers Ročník 12; číslo 9; s. 1010 - 1027 |
|---|---|
| Hlavní autoři: | , , |
| Médium: | Journal Article |
| Jazyk: | angličtina |
| Vydáno: |
Weinheim
Blackwell Publishing Ltd
01.09.2015
Wiley Subscription Services, Inc |
| Témata: | |
| ISSN: | 1612-8850, 1612-8869 |
| On-line přístup: | Získat plný text |
| Tagy: |
Přidat tag
Žádné tagy, Buďte první, kdo vytvoří štítek k tomuto záznamu!
|
| Abstract | The progress in the time‐resolved characterization of HiPIMS discharges performed during the last decade in our group is overviewed. Optical emission and absorption spectroscopy, as well as laser‐induced fluorescence‐based techniques have been mainly utilized. The results covering such important aspects of the HiPIMS discharge as the density evolution of the discharge species, their ionization and excitation, propagation of secondary electrons in the discharge volume, dynamics of velocity distribution of the discharge species, gas rarefaction, etc. are discussed.
The two‐dimensional distributions of Ti and Ti ion density as a typical example of sputtered particles in HiPIMS discharge. This figure demonstrates spatial complementarity of neutral and ionized sputtered atoms in the discharge volume at low pressure (5 mTorr). The paper mainly deals with temporal and spatial behavior of the ground state species in HiPIMS discharges. |
|---|---|
| AbstractList | The progress in the time-resolved characterization of HiPIMS discharges performed during the last decade in our group is overviewed. Optical emission and absorption spectroscopy, as well as laser-induced fluorescence-based techniques have been mainly utilized. The results covering such important aspects of the HiPIMS discharge as the density evolution of the discharge species, their ionization and excitation, propagation of secondary electrons in the discharge volume, dynamics of velocity distribution of the discharge species, gas rarefaction, etc. are discussed. The progress in the time-resolved characterization of HiPIMS discharges performed during the last decade in our group is overviewed. Optical emission and absorption spectroscopy, as well as laser-induced fluorescence-based techniques have been mainly utilized. The results covering such important aspects of the HiPIMS discharge as the density evolution of the discharge species, their ionization and excitation, propagation of secondary electrons in the discharge volume, dynamics of velocity distribution of the discharge species, gas rarefaction, etc. are discussed. The two-dimensional distributions of Ti and Ti ion density as a typical example of sputtered particles in HiPIMS discharge. This figure demonstrates spatial complementarity of neutral and ionized sputtered atoms in the discharge volume at low pressure (5 mTorr). The paper mainly deals with temporal and spatial behavior of the ground state species in HiPIMS discharges. The progress in the time‐resolved characterization of HiPIMS discharges performed during the last decade in our group is overviewed. Optical emission and absorption spectroscopy, as well as laser‐induced fluorescence‐based techniques have been mainly utilized. The results covering such important aspects of the HiPIMS discharge as the density evolution of the discharge species, their ionization and excitation, propagation of secondary electrons in the discharge volume, dynamics of velocity distribution of the discharge species, gas rarefaction, etc. are discussed. The two‐dimensional distributions of Ti and Ti ion density as a typical example of sputtered particles in HiPIMS discharge. This figure demonstrates spatial complementarity of neutral and ionized sputtered atoms in the discharge volume at low pressure (5 mTorr). The paper mainly deals with temporal and spatial behavior of the ground state species in HiPIMS discharges. |
| Author | Britun, Nikolay Konstantinidis, Stephanos Snyders, Rony |
| Author_xml | – sequence: 1 givenname: Nikolay surname: Britun fullname: Britun, Nikolay email: nikolay.britun@umons.ac.be organization: Chimie des Interactions Plasma-Surface (ChIPS), CIRMAP, Université de Mons, 23 Place du Parc, B-7000 Mons, Belgium – sequence: 2 givenname: Stephanos surname: Konstantinidis fullname: Konstantinidis, Stephanos organization: Chimie des Interactions Plasma-Surface (ChIPS), CIRMAP, Université de Mons, 23 Place du Parc, B-7000 Mons, Belgium – sequence: 3 givenname: Rony surname: Snyders fullname: Snyders, Rony organization: Chimie des Interactions Plasma-Surface (ChIPS), CIRMAP, Université de Mons, 23 Place du Parc, B-7000 Mons, Belgium |
| BookMark | eNqFkMtOwzAQRS0EEqWwZR2JDZuUcRzHyTLi0VY8WvHeWSaZgEsaBztt6d-TqqhCSIjVzOKcq5m7R7YrUyEhhxR6FCA4qWtV9wKgHAA43SIdGtHAj-Mo2d7sHHbJnnMTAAY8hg5J08obzdHONS48U3n3eor-LTpTzjH3RnWjM1V6aaXKpdPOM4U30OPh9Z13pl32puwr7pOdQpUOD75nlzxcnN-fDvyrUX94ml75GQ9C6oc8T8IYOTCWsEihSEQeIsRBoULgRYTAw4DGOeQRL4oEXgQypqIQsgSEKijrkuN1bm3NxwxdI6ftCViWqkIzc5IKzjiLA5G06NEvdGJmtv1hRVEmGI1btEvCNZVZ45zFQma6UY02VWOVLiUFuepVrnqVm15brfdLq62eKrv8W0jWwkKXuPyHluNxOv7p-mtXuwY_N66y7zISTHD5dNOXg2f6eAlngbxkXyTqmUw |
| CitedBy_id | crossref_primary_10_1016_j_surfcoat_2021_127638 crossref_primary_10_1088_2058_6272_aa9e48 crossref_primary_10_1088_1361_6595_ab8fbb crossref_primary_10_1088_1361_6595_ac9c2b crossref_primary_10_1063_1_4938250 crossref_primary_10_1063_5_0198423 crossref_primary_10_1063_5_0096128 crossref_primary_10_1116_1_5016241 crossref_primary_10_1063_5_0009380 crossref_primary_10_1016_j_tsf_2017_09_027 crossref_primary_10_1088_1361_6463_aba01e crossref_primary_10_1116_1_5020151 crossref_primary_10_1063_5_0273474 crossref_primary_10_1088_1361_6463_aa7544 crossref_primary_10_1088_1361_6595_acc686 crossref_primary_10_1063_1_4977825 crossref_primary_10_1088_1361_6595_ab54e8 crossref_primary_10_1016_j_scriptamat_2023_115578 crossref_primary_10_1016_j_tsf_2019_137501 crossref_primary_10_1116_1_5121226 crossref_primary_10_1038_s41598_017_17846_5 crossref_primary_10_1063_1_4996186 crossref_primary_10_1088_1361_6463_aa560c crossref_primary_10_1063_5_0006586 crossref_primary_10_1088_1757_899X_387_1_012029 crossref_primary_10_1063_1_4977819 |
| Cites_doi | 10.1088/0022-3727/47/22/224001 10.1063/1.4919006 10.1016/j.surfcoat.2014.04.015 10.1088/0963-0252/17/3/035021 10.1088/0022-3727/40/17/015 10.1063/1.3656446 10.1063/1.1729530 10.1063/1.2907505 10.1002/ppap.200600103 10.1109/TPS.2005.845022 10.1063/1.3000446 10.1088/0022-3727/46/8/084007 10.1016/j.tsf.2014.02.063 10.1088/0963-0252/18/2/025008 10.1134/S1063780X11060122 10.1016/j.vacuum.2009.12.022 10.1016/S0584-8547(02)00087-3 10.1088/0022-3727/38/18/015 10.1016/j.tsf.2006.03.033 10.1016/S0257-8972(99)00292-3 10.1088/0963-0252/18/4/045025 10.1116/1.572994 10.1016/j.surfcoat.2009.11.013 10.1088/0022-3727/33/9/201 10.1088/0022-3727/41/18/185201 10.1088/0963-0252/21/3/035017 10.1116/1.574104 10.1063/1.2162671 10.1088/0963-0252/14/2/021 10.1016/S0042-207X(98)00408-4 10.1088/0963-0252/18/4/045008 10.1002/ppap.200730806 10.1063/1.1646452 10.1016/j.surfcoat.2014.02.020 10.1016/j.surfcoat.2014.08.043 10.1016/j.sab.2005.01.004 10.1016/S0257-8972(03)00690-X 10.1063/1.2404583 10.1063/1.2035311 10.1016/j.tsf.2010.06.055 10.1088/0022-3727/43/12/124012 10.1016/j.sab.2015.02.016 10.1088/0963-0252/21/2/025010 10.1116/1.3691832 10.1016/0030-4018(80)90319-3 10.1364/OL.39.006146 10.1063/1.4812579 10.1088/0022-3727/42/18/185202 10.1016/S0042-207X(99)00189-X 10.1063/1.4919007 10.1088/0963-0252/19/2/025010 10.1063/1.2159555 10.1088/0963-0252/17/4/045013 10.1088/0022-3727/46/21/215201 10.1143/JJAP.44.L737 10.1063/1.4819835 10.1063/1.4821514 10.1016/j.surfcoat.2011.03.081 10.1016/j.surfcoat.2008.05.009 10.1016/j.tsf.2015.02.048 10.1088/0963-0252/18/4/045026 10.1088/0022-3727/46/17/175202 10.1016/0375-9601(83)90614-X 10.1007/978-94-009-5758-9 10.1088/0963-0252/22/1/013001 |
| ContentType | Journal Article |
| Copyright | 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim |
| Copyright_xml | – notice: 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim |
| DBID | BSCLL AAYXX CITATION 7SR 8FD JG9 |
| DOI | 10.1002/ppap.201500051 |
| DatabaseName | Istex CrossRef Engineered Materials Abstracts Technology Research Database Materials Research Database |
| DatabaseTitle | CrossRef Materials Research Database Technology Research Database Engineered Materials Abstracts |
| DatabaseTitleList | Materials Research Database Materials Research Database |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Chemistry |
| EISSN | 1612-8869 |
| EndPage | 1027 |
| ExternalDocumentID | 3811498281 10_1002_ppap_201500051 PPAP201500051 ark_67375_WNG_HX1VK0D2_K |
| Genre | article |
| GroupedDBID | .3N .GA .Y3 05W 0R~ 10A 123 1L6 1OC 31~ 33P 3SF 3WU 4.4 50Y 50Z 51W 51X 52M 52N 52O 52P 52S 52T 52U 52W 52X 5VS 66C 702 7PT 8-0 8-1 8-3 8-4 8-5 8UM 930 A03 AAESR AAEVG AAHQN AAMMB AAMNL AANHP AANLZ AAONW AASGY AAXRX AAYCA AAZKR ABCQN ABCUV ABEML ABIJN ABPVW ACAHQ ACBWZ ACCZN ACGFS ACIWK ACPOU ACRPL ACSCC ACXBN ACXQS ACYXJ ADBBV ADEOM ADIZJ ADKYN ADMGS ADNMO ADOZA ADXAS ADZMN AEFGJ AEIGN AEIMD AENEX AEUYR AEYWJ AFBPY AFFPM AFGKR AFWVQ AFZJQ AGHNM AGQPQ AGXDD AGYGG AHBTC AIDQK AIDYY AITYG AIURR AJXKR ALAGY ALMA_UNASSIGNED_HOLDINGS ALUQN ALVPJ AMBMR AMYDB ASPBG ATUGU AUFTA AVWKF AZBYB AZFZN AZVAB BAFTC BDRZF BFHJK BHBCM BMNLL BMXJE BNHUX BROTX BRXPI BSCLL BY8 CS3 D-E D-F DCZOG DPXWK DR2 DRFUL DRSTM DU5 EBS EJD F00 F01 F04 F5P FEDTE G-S G.N GODZA H.T H.X HBH HF~ HGLYW HVGLF HZ~ IX1 J0M JPC KQQ LATKE LAW LC2 LC3 LEEKS LH4 LITHE LOXES LP6 LP7 LUTES LW6 LYRES MEWTI MK4 MRFUL MRSTM MSFUL MSSTM MXFUL MXSTM N04 N05 N9A NF~ O66 O9- OIG P2P P2W P2X P4D Q.N Q11 QB0 QRW R.K ROL RX1 SUPJJ UB1 W8V W99 WBKPD WFSAM WIH WIK WOHZO WQJ WXSBR WYISQ XG1 XV2 ZZTAW ~IA ~WT AAHHS ACCFJ AEEZP AEQDE AEUQT AFPWT AIWBW AJBDE RWI WRC AAYXX CITATION O8X 7SR 8FD JG9 |
| ID | FETCH-LOGICAL-c5241-45d948e5033936ae797d4e082fa405f6e054218d0d65ff90b7e33a640c907af13 |
| IEDL.DBID | DRFUL |
| ISICitedReferencesCount | 28 |
| ISICitedReferencesURI | http://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=Summon&SrcAuth=ProQuest&DestLinkType=CitingArticles&DestApp=WOS_CPL&KeyUT=000363732000015&url=https%3A%2F%2Fcvtisr.summon.serialssolutions.com%2F%23%21%2Fsearch%3Fho%3Df%26include.ft.matches%3Dt%26l%3Dnull%26q%3D |
| ISSN | 1612-8850 |
| IngestDate | Sun Nov 09 09:34:04 EST 2025 Sun Jul 13 05:01:30 EDT 2025 Tue Nov 18 20:53:07 EST 2025 Sat Nov 29 02:40:13 EST 2025 Wed Jan 22 17:01:43 EST 2025 Sun Sep 21 06:19:25 EDT 2025 |
| IsPeerReviewed | true |
| IsScholarly | true |
| Issue | 9 |
| Language | English |
| License | http://onlinelibrary.wiley.com/termsAndConditions#vor |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-LOGICAL-c5241-45d948e5033936ae797d4e082fa405f6e054218d0d65ff90b7e33a640c907af13 |
| Notes | ArticleID:PPAP201500051 istex:E0F3503B96CDB3027A007B8A47CADD364F25BF1F ark:/67375/WNG-HX1VK0D2-K ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 14 content type line 23 |
| PQID | 1713731835 |
| PQPubID | 1036335 |
| PageCount | 18 |
| ParticipantIDs | proquest_miscellaneous_1753538279 proquest_journals_1713731835 crossref_citationtrail_10_1002_ppap_201500051 crossref_primary_10_1002_ppap_201500051 wiley_primary_10_1002_ppap_201500051_PPAP201500051 istex_primary_ark_67375_WNG_HX1VK0D2_K |
| PublicationCentury | 2000 |
| PublicationDate | September 2015 |
| PublicationDateYYYYMMDD | 2015-09-01 |
| PublicationDate_xml | – month: 09 year: 2015 text: September 2015 |
| PublicationDecade | 2010 |
| PublicationPlace | Weinheim |
| PublicationPlace_xml | – name: Weinheim |
| PublicationTitle | Plasma processes and polymers |
| PublicationTitleAlternate | Plasma Process. Polym |
| PublicationYear | 2015 |
| Publisher | Blackwell Publishing Ltd Wiley Subscription Services, Inc |
| Publisher_xml | – name: Blackwell Publishing Ltd – name: Wiley Subscription Services, Inc |
| References | S. Konstantinidis, A. Ricard, M. Ganciu, J. P. Dauchot, C. Ranea, M. Hecq, J. Appl. Phys. 2004, 95, 2900. K. B. Gylfason, J. Alami, U. Helmersson, J. T. Gudmundsson, J. Phys. D. Appl. Phys. 2005, 38, 3417. A. Pajdarová, J. Vlček, P. Kudláček, J. Lukáš, Plasma Sources Sci. Technol. 2009, 18, 025008. N. Britun, T. Minea, S. Konstantinidis, R. Snyders, J. Phys. D Appl. Phys. 2014, 47, 224001. R; Payling, P. Larkins, Optical Emission Lines of the Elements (CD-ROM). Wiley & Sons, Inc, New York 2000. J. T. Gudmundsson, N. Brenning, D. Lundin, U. Helmersson, J. Vac. Sci. Technol. A 2012, 30, 030801. T. Godfroid, J. P. Dauchot, M. Hecq, Surf. Coatings Technol. 2003, 174-175, 1276. J. T. Gudmundsson, Vacuum 2010, 84, 1360. N. Britun, M. Palmucci, S. Konstantinidis, R. Snyders, J. Appl. Phys. 2015, 117, 163303. U. Helmersson, M. Lattemann, J. Bohlmark, A. P. Ehiasarian, J. T. Gudmundsson, Thin Solid Films 2006, 513, 1. K. Sarakinos, D. Magnfält, V. Elofsson, B. Lü, Surf. Coatings Technol. 2014, 257, 326. A. Ehiasarian, A. Vetushka, A. Hecimovic, S. Konstantinidis, J. Appl. Phys. 2008, 104, 083305. A. Anders, Surf. Coatings Technol. 2011, 205, S1. C. Vitelaru, D. Lundin, N. Brenning, T. Minea, Appl. Phys. Lett. 2013, 103, 104105. A. Fridman, L. A. Kennedy, Plasma Physics and Engineering. Taylor and Francis, New York 2011. E. Kay, J. Appl. Phys. 1963, 34, 760. B. Liebig, N. S. J. Braithwaite, P. J. Kelly, J. W. Bradley, Thin Solid Films 2010, 519, 1699. N. Britun, J. G. Han, S.-G. Oh, Plasma Sources Sci. Technol. 2008, 17, 045013. L. Li, A. Nikiforov, N. Britun, R. Snyders, C. Leys, Spectrochim. Acta Part B 2015, 107, 75. J. Bohlmark, J. T. Gudmundsson, J. Alami, M. Latteman, U. Helmersson, IEEE Trans. Plasma Sci. 2005, 33, 346. V. Linss, Spectrochim. Acta Part B At. Spectrosc. 2005, 60, 253. N. Britun, M. Palmucci, S. Konstantinidis, R. Snyders, J. Appl. Phys. 2015, 117, 163302. S. Mazouffre, Plasma Sources Sci. Technol. 2013, 22, 013001. D. Ohebsian, N. Sadeghi, C. Trassy, J. M. Mermet, Opt. Comm. 1980, 32, 81. D. Lundin, P. Larsson, E. Wallin, M. Lattemann, N. Brenning, U. Helmersson, Plasma Sources Sci. Technol. 2008, 17, 035021. M. Palmucci, N. Britun, T. Silva, R. Snyders, S. Konstantinidis, J. Phys. D. Appl. Phys. 2013, 46, 215201. R. W. B. Pearse, A. G. Gaydon, The Identification of Molecular Spectra, 4th ed., Chapman and Hall, London 1976. N. Britun, M. Gaillard, J. G. Han, J. Phys. D. Appl. Phys. 2008, 41, 185201. A. Plain, A. Ricard, Phys. Lett. A 1983, 95, 235. P. J. Kelly, R. D. Arnell, Vacuum 2000, 56, 159. K. Sarakinos, J. Alami, S. Konstantinidis, Surf. Coatings Technol. 2010, 204, 1661. M. Palmucci, N. Britun, S. Konstantinidis, R. Snyders, J. Appl. Phys. 2013, 114, 113302. A. V. Kozyrev, N. S. Sochugov, K. V. Oskomov, A. N. Zakharov, A. N. Odivanova, Plasma Phys. Rep. 2011, 37, 621. A. Anders, Surf. Coatings Technol. 2014, 257, 308. N. Britun, J. G. Han, S.-G. Oh, Appl. Phys. Lett. 2008, 92, 141503. K. Sasaki, N. Nafarizal, J. Phys. D. Appl. Phys. 2010, 43, 124012. M. Ganciu, S. Konstantinidis, Y. J. P. Paint, J. P. Dauchot, M. Hecq, L. de Poucques, P. Vašina, M. Meško, J. C. Imbert, J. Bretagne, M. J. Touzeau, Optoelec. Adv. Mat. 2005, 7, 2481. N. Britun, M. Gaillard, S.-G. Oh, J. G. Han, J. Phys. D. Appl. Phys. 2007, 40, 5098. N. Nafarizal, N. Takada, K. Shibagaki, K. Nakamura, Y. Sago, K. Sasaki, Jpn. J. Appl. Phys. 2005, 44, L737. M. Ratova, G. T. West, P. J. Kelly, Surf. Coatings Technol. 2014, 250, 7. N. Britun, M. Palmucci, S. Konstantinidis, M. Gaillard, R. Snyders, J. Appl. Phys. 2013, 114, 013301. D. Benzeggouta, M. C. Hugon, J. Bretagne, M. Ganciu, Plasma Sources Sci. Technol. 2009, 18, 045025. K. Sarakinos, J. Alami, C. Klever, M. Wuttig, Surf. Coatings Technol. 2008, 202, 5033. G. F. Kirkbright, M. Sargent, Atomic Absorption and Fluorescence Spectroscopy. Academic Press, London 1974. A. P. Ehiasarian, Y. A. Gonzalvo, T. D. Whitmore, Plasma Process. Polym. 2007, 4, S309. D. W. Hoffman, J. Vac. Sci. Technol. A 1985, 3, 561. D. Lundin, N. Brenning, D. Jädernäs, P. Larsson, E. Wallin, M. Lattemann, M. A. Raadu, U. Helmersson, Plasma Sources Sci. Technol. 2009, 18, 045008. D. Depla, S. Heirwegh, S. Mahieu, J. Haemers, R. De Gryse, J. Appl. Phys. 2007, 101, 013301. T. Kozák, A. Dagmar Pajdarová, J. Appl. Phys. 2011, 110, 103303. J. Amorim, G. Baravian, J. Jolly, J. Phys. D. Appl. Phys. 2000, 33, R51. A. C. Mitchell, M. W. Zemansky, Resonance Radiation and Excited Atoms. Plenum Press, Cambridge 1971. D. Lundin, M. Stahl, H. Kersten, U. Helmersson, J. Phys. D. Appl. Phys. 2009, 42, 185202. K. Niemi, V. Schulz-von der Gathen, H. F. Döbele, Plasma Sources Sci. Technol. 2005, 14, 375. V. Kouznetsov, K. Macák, J. M. Schneider, U. Helmersson, I. Petrov, Surf. Coatings Technol. 1999, 122, 290. A. N. Reed, P. J. Shamberger, J. J. Hu, C. Muratore, J. E. Bultman, A. A. Voevodin, Thin Solid Films 2015, 579, 30. N. Britun, S. Ershov, A.-A. Mel, S. El Konstantinidis, A. Ricard, R. Snyders, J. Phys. D. Appl. Phys. 2013, 46, 175202. G. J. Winter, A. Hecimovic, T. de los Arcos, M. Böke, V. Schulz-von der Gathen, J. Phys. D. Appl. Phys. 2013, 46, 084007. R. Alvarez, A. Rodero, M. C. Quintero, Spectrochim. Acta Part B 2002, 57, 1665. A. Hecimovic, T. de los Arcos, V. Schulz-von der Gathen, M. Böke, J. Winter, Plasma Sources Sci. Technol. 2012, 21, 035017. I. K. Fetisov, A. A. Filippov, G. V. Khodachenko, D. V. Mozgrin, A. A. Pisarev, Vacuum 1999, 53, 133. S. Berg, H. Blom, T. Larsson, C. Nender, J. Vac. Sci. Technol. A 1987, 5, 202. D. V. Mozgrin, I. K. Fetisov, G. V Khodachenko, Plasma Phys. Rep. 1995, 21, 400. K. Shibagaki, N. Nafarizal, K. Sasaki, J. Appl. Phys. 2005, 98, 043310. S. Konstantinidis, J. P. Dauchot, M. Ganciu, M. Hecq, Appl. Phys. Lett. 2006, 88, 021501. D. Benzeggouta, M. C. Hugon, J. Bretagne, Plasma Sources Sci. Technol. 2009, 18, 045026. C. Vitelaru, D. Lundin, G. D. Stancu, N. Brenning, J. Bretagne, T. Minea, Plasma Sources Sci. Technol. 2012, 21, 025010. P. Poolcharuansin, J. W. Bradley, Plasma Sources Sci. Technol. 2010, 19, 025010. S. Berg, E. Särhammar, T. Nyberg, Thin Solid Films 2014, 565, 186. T. Silva, N. Britun, T. Godfroid, R. Snyders, Opt. Lett. 2014, 39, 6146. S. Konstantinidis, J. P. Dauchot, M. Ganciu, A. Ricard, M. Hecq, J. Appl. Phys. 2006, 99, 013307. R. Snyders, J.-P. Dauchot, M. Hecq, Plasma Process. Polym. 2007, 4, 113. 2007; 101 2009; 42 2013; 22 2010; 19 2002; 57 1987; 5 1976 1974 1983; 95 2014; 250 1971 2008; 104 1999; 122 2003; 174–175 2005; 60 2015; 107 2014; 257 2011; 110 2010; 519 1963; 34 2011; 205 2000 2000; 56 1995; 21 1980; 32 2013; 114 1999; 53 2007; 4 2015; 579 2005; 38 2005; 33 2012; 21 2014; 565 2009; 18 2011 2010; 204 2013; 46 1985; 3 2006; 99 2008; 17 2014; 47 2013; 103 2008; 202 2011; 37 2008; 92 2006; 513 2005; 44 2010; 84 2012; 30 2010; 43 2004; 95 2006; 88 2000; 33 2005; 7 2005; 98 2015; 117 2008; 41 2007; 40 2014 2014; 39 2013 2005; 14 e_1_2_6_51_1 e_1_2_6_74_1 e_1_2_6_53_1 e_1_2_6_76_1 e_1_2_6_32_1 e_1_2_6_70_1 e_1_2_6_30_1 e_1_2_6_72_1 Mozgrin D. V. (e_1_2_6_3_1) 1995; 21 Ganciu M. (e_1_2_6_27_1) 2005; 7 Payling R (e_1_2_6_46_1) 2000 e_1_2_6_19_1 Mitchell A. C. (e_1_2_6_33_1) 1971 e_1_2_6_13_1 e_1_2_6_36_1 e_1_2_6_59_1 e_1_2_6_11_1 e_1_2_6_34_1 e_1_2_6_17_1 e_1_2_6_55_1 e_1_2_6_15_1 Kirkbright G. F. (e_1_2_6_24_1) 1974 e_1_2_6_38_1 e_1_2_6_57_1 e_1_2_6_62_1 e_1_2_6_64_1 e_1_2_6_43_1 e_1_2_6_20_1 e_1_2_6_41_1 e_1_2_6_9_1 e_1_2_6_5_1 e_1_2_6_7_1 e_1_2_6_1_1 e_1_2_6_49_1 e_1_2_6_22_1 e_1_2_6_66_1 e_1_2_6_28_1 e_1_2_6_45_1 e_1_2_6_26_1 e_1_2_6_47_1 e_1_2_6_68_1 e_1_2_6_52_1 e_1_2_6_73_1 e_1_2_6_54_1 e_1_2_6_75_1 e_1_2_6_10_1 e_1_2_6_31_1 e_1_2_6_50_1 e_1_2_6_71_1 e_1_2_6_14_1 e_1_2_6_35_1 e_1_2_6_12_1 e_1_2_6_18_1 e_1_2_6_39_1 e_1_2_6_56_1 e_1_2_6_16_1 e_1_2_6_37_1 e_1_2_6_58_1 e_1_2_6_63_1 e_1_2_6_42_1 e_1_2_6_65_1 e_1_2_6_21_1 e_1_2_6_40_1 e_1_2_6_61_1 Fridman A. (e_1_2_6_60_1) 2011 e_1_2_6_8_1 e_1_2_6_4_1 e_1_2_6_6_1 e_1_2_6_25_1 e_1_2_6_48_1 e_1_2_6_23_1 e_1_2_6_2_1 e_1_2_6_29_1 e_1_2_6_44_1 e_1_2_6_67_1 e_1_2_6_69_1 |
| References_xml | – reference: M. Ratova, G. T. West, P. J. Kelly, Surf. Coatings Technol. 2014, 250, 7. – reference: R. Alvarez, A. Rodero, M. C. Quintero, Spectrochim. Acta Part B 2002, 57, 1665. – reference: T. Kozák, A. Dagmar Pajdarová, J. Appl. Phys. 2011, 110, 103303. – reference: V. Linss, Spectrochim. Acta Part B At. Spectrosc. 2005, 60, 253. – reference: S. Mazouffre, Plasma Sources Sci. Technol. 2013, 22, 013001. – reference: P. Poolcharuansin, J. W. Bradley, Plasma Sources Sci. Technol. 2010, 19, 025010. – reference: T. Godfroid, J. P. Dauchot, M. Hecq, Surf. Coatings Technol. 2003, 174-175, 1276. – reference: K. Sasaki, N. Nafarizal, J. Phys. D. Appl. Phys. 2010, 43, 124012. – reference: A. V. Kozyrev, N. S. Sochugov, K. V. Oskomov, A. N. Zakharov, A. N. Odivanova, Plasma Phys. Rep. 2011, 37, 621. – reference: K. Shibagaki, N. Nafarizal, K. Sasaki, J. Appl. Phys. 2005, 98, 043310. – reference: R; Payling, P. Larkins, Optical Emission Lines of the Elements (CD-ROM). Wiley & Sons, Inc, New York 2000. – reference: N. Britun, M. Palmucci, S. Konstantinidis, M. Gaillard, R. Snyders, J. Appl. Phys. 2013, 114, 013301. – reference: D. Lundin, P. Larsson, E. Wallin, M. Lattemann, N. Brenning, U. Helmersson, Plasma Sources Sci. Technol. 2008, 17, 035021. – reference: N. Britun, J. G. Han, S.-G. Oh, Plasma Sources Sci. Technol. 2008, 17, 045013. – reference: V. Kouznetsov, K. Macák, J. M. Schneider, U. Helmersson, I. Petrov, Surf. Coatings Technol. 1999, 122, 290. – reference: M. Palmucci, N. Britun, T. Silva, R. Snyders, S. Konstantinidis, J. Phys. D. Appl. Phys. 2013, 46, 215201. – reference: A. N. Reed, P. J. Shamberger, J. J. Hu, C. Muratore, J. E. Bultman, A. A. Voevodin, Thin Solid Films 2015, 579, 30. – reference: S. Berg, E. Särhammar, T. Nyberg, Thin Solid Films 2014, 565, 186. – reference: R. Snyders, J.-P. Dauchot, M. Hecq, Plasma Process. Polym. 2007, 4, 113. – reference: C. Vitelaru, D. Lundin, N. Brenning, T. Minea, Appl. Phys. Lett. 2013, 103, 104105. – reference: R. W. B. Pearse, A. G. Gaydon, The Identification of Molecular Spectra, 4th ed., Chapman and Hall, London 1976. – reference: S. Konstantinidis, A. Ricard, M. Ganciu, J. P. Dauchot, C. Ranea, M. Hecq, J. Appl. Phys. 2004, 95, 2900. – reference: N. Nafarizal, N. Takada, K. Shibagaki, K. Nakamura, Y. Sago, K. Sasaki, Jpn. J. Appl. Phys. 2005, 44, L737. – reference: A. Anders, Surf. Coatings Technol. 2014, 257, 308. – reference: P. J. Kelly, R. D. Arnell, Vacuum 2000, 56, 159. – reference: D. V. Mozgrin, I. K. Fetisov, G. V Khodachenko, Plasma Phys. Rep. 1995, 21, 400. – reference: A. Anders, Surf. Coatings Technol. 2011, 205, S1. – reference: B. Liebig, N. S. J. Braithwaite, P. J. Kelly, J. W. Bradley, Thin Solid Films 2010, 519, 1699. – reference: J. T. Gudmundsson, Vacuum 2010, 84, 1360. – reference: D. Ohebsian, N. Sadeghi, C. Trassy, J. M. Mermet, Opt. Comm. 1980, 32, 81. – reference: M. Ganciu, S. Konstantinidis, Y. J. P. Paint, J. P. Dauchot, M. Hecq, L. de Poucques, P. Vašina, M. Meško, J. C. Imbert, J. Bretagne, M. J. Touzeau, Optoelec. Adv. Mat. 2005, 7, 2481. – reference: D. Benzeggouta, M. C. Hugon, J. Bretagne, M. Ganciu, Plasma Sources Sci. Technol. 2009, 18, 045025. – reference: A. Pajdarová, J. Vlček, P. Kudláček, J. Lukáš, Plasma Sources Sci. Technol. 2009, 18, 025008. – reference: C. Vitelaru, D. Lundin, G. D. Stancu, N. Brenning, J. Bretagne, T. Minea, Plasma Sources Sci. Technol. 2012, 21, 025010. – reference: N. Britun, M. Gaillard, J. G. Han, J. Phys. D. Appl. Phys. 2008, 41, 185201. – reference: N. Britun, M. Palmucci, S. Konstantinidis, R. Snyders, J. Appl. Phys. 2015, 117, 163303. – reference: L. Li, A. Nikiforov, N. Britun, R. Snyders, C. Leys, Spectrochim. Acta Part B 2015, 107, 75. – reference: K. Sarakinos, J. Alami, C. Klever, M. Wuttig, Surf. Coatings Technol. 2008, 202, 5033. – reference: G. F. Kirkbright, M. Sargent, Atomic Absorption and Fluorescence Spectroscopy. Academic Press, London 1974. – reference: S. Konstantinidis, J. P. Dauchot, M. Ganciu, M. Hecq, Appl. Phys. Lett. 2006, 88, 021501. – reference: K. Sarakinos, J. Alami, S. Konstantinidis, Surf. Coatings Technol. 2010, 204, 1661. – reference: D. Lundin, M. Stahl, H. Kersten, U. Helmersson, J. Phys. D. Appl. Phys. 2009, 42, 185202. – reference: E. Kay, J. Appl. Phys. 1963, 34, 760. – reference: K. Niemi, V. Schulz-von der Gathen, H. F. Döbele, Plasma Sources Sci. Technol. 2005, 14, 375. – reference: J. T. Gudmundsson, N. Brenning, D. Lundin, U. Helmersson, J. Vac. Sci. Technol. A 2012, 30, 030801. – reference: S. Berg, H. Blom, T. Larsson, C. Nender, J. Vac. Sci. Technol. A 1987, 5, 202. – reference: I. K. Fetisov, A. A. Filippov, G. V. Khodachenko, D. V. Mozgrin, A. A. Pisarev, Vacuum 1999, 53, 133. – reference: N. Britun, M. Gaillard, S.-G. Oh, J. G. Han, J. Phys. D. Appl. Phys. 2007, 40, 5098. – reference: S. Konstantinidis, J. P. Dauchot, M. Ganciu, A. Ricard, M. Hecq, J. Appl. Phys. 2006, 99, 013307. – reference: N. Britun, J. G. Han, S.-G. Oh, Appl. Phys. Lett. 2008, 92, 141503. – reference: M. Palmucci, N. Britun, S. Konstantinidis, R. Snyders, J. Appl. Phys. 2013, 114, 113302. – reference: J. Amorim, G. Baravian, J. Jolly, J. Phys. D. Appl. Phys. 2000, 33, R51. – reference: D. Depla, S. Heirwegh, S. Mahieu, J. Haemers, R. De Gryse, J. Appl. Phys. 2007, 101, 013301. – reference: A. Fridman, L. A. Kennedy, Plasma Physics and Engineering. Taylor and Francis, New York 2011. – reference: N. Britun, T. Minea, S. Konstantinidis, R. Snyders, J. Phys. D Appl. Phys. 2014, 47, 224001. – reference: N. Britun, S. Ershov, A.-A. Mel, S. El Konstantinidis, A. Ricard, R. Snyders, J. Phys. D. Appl. Phys. 2013, 46, 175202. – reference: A. C. Mitchell, M. W. Zemansky, Resonance Radiation and Excited Atoms. Plenum Press, Cambridge 1971. – reference: N. Britun, M. Palmucci, S. Konstantinidis, R. Snyders, J. Appl. Phys. 2015, 117, 163302. – reference: A. P. Ehiasarian, Y. A. Gonzalvo, T. D. Whitmore, Plasma Process. Polym. 2007, 4, S309. – reference: A. Ehiasarian, A. Vetushka, A. Hecimovic, S. Konstantinidis, J. Appl. Phys. 2008, 104, 083305. – reference: T. Silva, N. Britun, T. Godfroid, R. Snyders, Opt. Lett. 2014, 39, 6146. – reference: A. Hecimovic, T. de los Arcos, V. Schulz-von der Gathen, M. Böke, J. Winter, Plasma Sources Sci. Technol. 2012, 21, 035017. – reference: A. Plain, A. Ricard, Phys. Lett. A 1983, 95, 235. – reference: U. Helmersson, M. Lattemann, J. Bohlmark, A. P. Ehiasarian, J. T. Gudmundsson, Thin Solid Films 2006, 513, 1. – reference: D. Benzeggouta, M. C. Hugon, J. Bretagne, Plasma Sources Sci. Technol. 2009, 18, 045026. – reference: D. W. Hoffman, J. Vac. Sci. Technol. A 1985, 3, 561. – reference: D. Lundin, N. Brenning, D. Jädernäs, P. Larsson, E. Wallin, M. Lattemann, M. A. Raadu, U. Helmersson, Plasma Sources Sci. Technol. 2009, 18, 045008. – reference: J. Bohlmark, J. T. Gudmundsson, J. Alami, M. Latteman, U. Helmersson, IEEE Trans. Plasma Sci. 2005, 33, 346. – reference: G. J. Winter, A. Hecimovic, T. de los Arcos, M. Böke, V. Schulz-von der Gathen, J. Phys. D. Appl. Phys. 2013, 46, 084007. – reference: K. B. Gylfason, J. Alami, U. Helmersson, J. T. Gudmundsson, J. Phys. D. Appl. Phys. 2005, 38, 3417. – reference: K. Sarakinos, D. Magnfält, V. Elofsson, B. Lü, Surf. Coatings Technol. 2014, 257, 326. – year: 2011 – volume: 18 start-page: 025008 year: 2009 publication-title: Plasma Sources Sci. Technol. – volume: 32 start-page: 81 year: 1980 publication-title: Opt. Comm. – volume: 250 start-page: 7 year: 2014 publication-title: Surf. Coatings Technol. – volume: 4 start-page: 113 year: 2007 publication-title: Plasma Process. Polym. – volume: 95 start-page: 235 year: 1983 publication-title: Phys. Lett. A – volume: 21 start-page: 035017 year: 2012 publication-title: Plasma Sources Sci. Technol. – volume: 33 start-page: 346 year: 2005 publication-title: IEEE Trans. Plasma Sci. – volume: 204 start-page: 1661 year: 2010 publication-title: Surf. Coatings Technol. – volume: 257 start-page: 308 year: 2014 publication-title: Surf. Coatings Technol. – volume: 519 start-page: 1699 year: 2010 publication-title: Thin Solid Films – volume: 110 start-page: 103303 year: 2011 publication-title: J. Appl. Phys. – volume: 95 start-page: 2900 year: 2004 publication-title: J. Appl. Phys. – volume: 46 start-page: 175202 year: 2013 publication-title: J. Phys. D. Appl. Phys. – volume: 107 start-page: 75 year: 2015 publication-title: Spectrochim. Acta Part B – volume: 33 start-page: R51 year: 2000 publication-title: J. Phys. D. Appl. Phys. – year: 1971 – volume: 117 start-page: 163303 year: 2015 publication-title: J. Appl. Phys. – volume: 41 start-page: 185201 year: 2008 publication-title: J. Phys. D. Appl. Phys. – volume: 18 start-page: 045008 year: 2009 publication-title: Plasma Sources Sci. Technol. – volume: 39 start-page: 6146 year: 2014 publication-title: Opt. Lett. – volume: 17 start-page: 045013 year: 2008 publication-title: Plasma Sources Sci. Technol. – year: 2014 – volume: 40 start-page: 5098 year: 2007 publication-title: J. Phys. D. Appl. Phys. – volume: 46 start-page: 084007 year: 2013 publication-title: J. Phys. D. Appl. Phys. – volume: 579 start-page: 30 year: 2015 publication-title: Thin Solid Films – volume: 88 start-page: 021501 year: 2006 publication-title: Appl. Phys. Lett. – volume: 18 start-page: 045026 year: 2009 publication-title: Plasma Sources Sci. Technol. – volume: 38 start-page: 3417 year: 2005 publication-title: J. Phys. D. Appl. Phys. – volume: 56 start-page: 159 year: 2000 publication-title: Vacuum – volume: 60 start-page: 253 year: 2005 publication-title: Spectrochim. Acta Part B At. Spectrosc. – volume: 22 start-page: 013001 year: 2013 publication-title: Plasma Sources Sci. Technol. – volume: 57 start-page: 1665 year: 2002 publication-title: Spectrochim. Acta Part B – volume: 34 start-page: 760 year: 1963 publication-title: J. Appl. Phys. – volume: 257 start-page: 326 year: 2014 publication-title: Surf. Coatings Technol. – volume: 103 start-page: 104105 year: 2013 publication-title: Appl. Phys. Lett. – volume: 37 start-page: 621 year: 2011 publication-title: Plasma Phys. Rep. – year: 1976 – volume: 565 start-page: 186 year: 2014 publication-title: Thin Solid Films – volume: 4 start-page: S309 year: 2007 publication-title: Plasma Process. Polym. – volume: 17 start-page: 035021 year: 2008 publication-title: Plasma Sources Sci. Technol. – volume: 18 start-page: 045025 year: 2009 publication-title: Plasma Sources Sci. Technol. – volume: 21 start-page: 400 year: 1995 publication-title: Plasma Phys. Rep. – volume: 513 start-page: 1 year: 2006 publication-title: Thin Solid Films – volume: 43 start-page: 124012 year: 2010 publication-title: J. Phys. D. Appl. Phys. – volume: 42 start-page: 185202 year: 2009 publication-title: J. Phys. D. Appl. Phys. – volume: 14 start-page: 375 year: 2005 publication-title: Plasma Sources Sci. Technol. – volume: 19 start-page: 025010 year: 2010 publication-title: Plasma Sources Sci. Technol. – volume: 44 start-page: L737 year: 2005 publication-title: Jpn. J. Appl. Phys. – volume: 84 start-page: 1360 year: 2010 publication-title: Vacuum – volume: 114 start-page: 013301 year: 2013 publication-title: J. Appl. Phys. – volume: 101 start-page: 013301 year: 2007 publication-title: J. Appl. Phys. – volume: 3 start-page: 561 year: 1985 publication-title: J. Vac. Sci. Technol. A – year: 2000 – volume: 122 start-page: 290 year: 1999 publication-title: Surf. Coatings Technol. – volume: 202 start-page: 5033 year: 2008 publication-title: Surf. Coatings Technol. – volume: 30 start-page: 030801 year: 2012 publication-title: J. Vac. Sci. Technol. A – volume: 99 start-page: 013307 year: 2006 publication-title: J. Appl. Phys. – volume: 205 start-page: S1 year: 2011 publication-title: Surf. Coatings Technol. – volume: 92 start-page: 141503 year: 2008 publication-title: Appl. Phys. Lett. – volume: 53 start-page: 133 year: 1999 publication-title: Vacuum – volume: 174–175 start-page: 1276 year: 2003 publication-title: Surf. Coatings Technol. – volume: 47 start-page: 224001 year: 2014 publication-title: J. Phys. D Appl. Phys. – volume: 21 start-page: 025010 year: 2012 publication-title: Plasma Sources Sci. Technol. – volume: 98 start-page: 043310 year: 2005 publication-title: J. Appl. Phys. – volume: 5 start-page: 202 year: 1987 publication-title: J. Vac. Sci. Technol. A – volume: 104 start-page: 083305 year: 2008 publication-title: J. Appl. Phys. – year: 1974 – volume: 7 start-page: 2481 year: 2005 publication-title: Optoelec. Adv. Mat. – volume: 117 start-page: 163302 year: 2015 publication-title: J. Appl. Phys. – volume: 46 start-page: 215201 year: 2013 publication-title: J. Phys. D. Appl. Phys. – volume: 114 start-page: 113302 year: 2013 publication-title: J. Appl. Phys. – year: 2013 – ident: e_1_2_6_15_1 doi: 10.1088/0022-3727/47/22/224001 – ident: e_1_2_6_25_1 doi: 10.1063/1.4919006 – ident: e_1_2_6_18_1 doi: 10.1016/j.surfcoat.2014.04.015 – ident: e_1_2_6_65_1 doi: 10.1088/0963-0252/17/3/035021 – volume-title: Atomic Absorption and Fluorescence Spectroscopy year: 1974 ident: e_1_2_6_24_1 – ident: e_1_2_6_54_1 doi: 10.1088/0022-3727/40/17/015 – ident: e_1_2_6_40_1 – ident: e_1_2_6_53_1 doi: 10.1063/1.3656446 – ident: e_1_2_6_8_1 doi: 10.1063/1.1729530 – volume-title: Resonance Radiation and Excited Atoms year: 1971 ident: e_1_2_6_33_1 – volume-title: Plasma Physics and Engineering year: 2011 ident: e_1_2_6_60_1 – ident: e_1_2_6_68_1 doi: 10.1063/1.2907505 – ident: e_1_2_6_45_1 doi: 10.1002/ppap.200600103 – ident: e_1_2_6_9_1 doi: 10.1109/TPS.2005.845022 – ident: e_1_2_6_39_1 doi: 10.1063/1.3000446 – ident: e_1_2_6_75_1 – ident: e_1_2_6_70_1 doi: 10.1088/0022-3727/46/8/084007 – ident: e_1_2_6_61_1 doi: 10.1016/j.tsf.2014.02.063 – ident: e_1_2_6_41_1 doi: 10.1088/0963-0252/18/2/025008 – ident: e_1_2_6_71_1 doi: 10.1134/S1063780X11060122 – ident: e_1_2_6_2_1 doi: 10.1016/j.vacuum.2009.12.022 – ident: e_1_2_6_23_1 doi: 10.1016/S0584-8547(02)00087-3 – ident: e_1_2_6_64_1 doi: 10.1088/0022-3727/38/18/015 – ident: e_1_2_6_6_1 doi: 10.1016/j.tsf.2006.03.033 – ident: e_1_2_6_5_1 doi: 10.1016/S0257-8972(99)00292-3 – ident: e_1_2_6_12_1 doi: 10.1088/0963-0252/18/4/045025 – ident: e_1_2_6_37_1 doi: 10.1116/1.572994 – ident: e_1_2_6_10_1 doi: 10.1016/j.surfcoat.2009.11.013 – ident: e_1_2_6_30_1 doi: 10.1088/0022-3727/33/9/201 – ident: e_1_2_6_52_1 doi: 10.1088/0022-3727/41/18/185201 – ident: e_1_2_6_22_1 doi: 10.1088/0963-0252/21/3/035017 – ident: e_1_2_6_62_1 doi: 10.1116/1.574104 – ident: e_1_2_6_38_1 doi: 10.1063/1.2162671 – ident: e_1_2_6_73_1 doi: 10.1088/0963-0252/14/2/021 – ident: e_1_2_6_4_1 doi: 10.1016/S0042-207X(98)00408-4 – volume-title: Optical Emission Lines of the Elements (CD‐ROM) year: 2000 ident: e_1_2_6_46_1 – ident: e_1_2_6_44_1 doi: 10.1088/0963-0252/18/4/045008 – ident: e_1_2_6_13_1 doi: 10.1002/ppap.200730806 – ident: e_1_2_6_31_1 doi: 10.1063/1.1646452 – ident: e_1_2_6_20_1 doi: 10.1016/j.surfcoat.2014.02.020 – ident: e_1_2_6_16_1 doi: 10.1016/j.surfcoat.2014.08.043 – ident: e_1_2_6_55_1 doi: 10.1016/j.sab.2005.01.004 – ident: e_1_2_6_26_1 – ident: e_1_2_6_47_1 doi: 10.1016/S0257-8972(03)00690-X – ident: e_1_2_6_59_1 doi: 10.1063/1.2404583 – ident: e_1_2_6_69_1 doi: 10.1063/1.2035311 – ident: e_1_2_6_21_1 doi: 10.1016/j.tsf.2010.06.055 – ident: e_1_2_6_51_1 doi: 10.1088/0022-3727/43/12/124012 – ident: e_1_2_6_74_1 – ident: e_1_2_6_35_1 doi: 10.1016/j.sab.2015.02.016 – ident: e_1_2_6_43_1 doi: 10.1088/0963-0252/21/2/025010 – ident: e_1_2_6_7_1 doi: 10.1116/1.3691832 – ident: e_1_2_6_49_1 doi: 10.1016/0030-4018(80)90319-3 – ident: e_1_2_6_57_1 doi: 10.1364/OL.39.006146 – ident: e_1_2_6_76_1 doi: 10.1063/1.4812579 – ident: e_1_2_6_66_1 doi: 10.1088/0022-3727/42/18/185202 – ident: e_1_2_6_1_1 doi: 10.1016/S0042-207X(99)00189-X – ident: e_1_2_6_32_1 doi: 10.1063/1.4919007 – volume: 7 start-page: 2481 year: 2005 ident: e_1_2_6_27_1 publication-title: Optoelec. Adv. Mat. – ident: e_1_2_6_42_1 doi: 10.1088/0963-0252/19/2/025010 – ident: e_1_2_6_36_1 doi: 10.1063/1.2159555 – ident: e_1_2_6_67_1 doi: 10.1088/0963-0252/17/4/045013 – ident: e_1_2_6_48_1 doi: 10.1088/0022-3727/46/21/215201 – ident: e_1_2_6_29_1 doi: 10.1063/1.4812579 – ident: e_1_2_6_50_1 doi: 10.1143/JJAP.44.L737 – volume: 21 start-page: 400 year: 1995 ident: e_1_2_6_3_1 publication-title: Plasma Phys. Rep. – ident: e_1_2_6_72_1 doi: 10.1063/1.4819835 – ident: e_1_2_6_28_1 doi: 10.1063/1.4821514 – ident: e_1_2_6_14_1 doi: 10.1016/j.surfcoat.2011.03.081 – ident: e_1_2_6_17_1 doi: 10.1016/j.surfcoat.2008.05.009 – ident: e_1_2_6_19_1 doi: 10.1016/j.tsf.2015.02.048 – ident: e_1_2_6_11_1 doi: 10.1088/0963-0252/18/4/045026 – ident: e_1_2_6_34_1 doi: 10.1088/0022-3727/46/17/175202 – ident: e_1_2_6_56_1 doi: 10.1016/0375-9601(83)90614-X – ident: e_1_2_6_58_1 doi: 10.1007/978-94-009-5758-9 – ident: e_1_2_6_63_1 doi: 10.1088/0963-0252/22/1/013001 |
| SSID | ssj0030580 |
| Score | 2.220448 |
| SecondaryResourceType | review_article |
| Snippet | The progress in the time‐resolved characterization of HiPIMS discharges performed during the last decade in our group is overviewed. Optical emission and... The progress in the time-resolved characterization of HiPIMS discharges performed during the last decade in our group is overviewed. Optical emission and... |
| SourceID | proquest crossref wiley istex |
| SourceType | Aggregation Database Enrichment Source Index Database Publisher |
| StartPage | 1010 |
| SubjectTerms | Absorption spectroscopy Density Discharge Excitation Ground state HiPIMS Ionization LIF LIF imaging Plasma plasma diagnostics Rarefaction resonant absorption Titanium Velocity distribution |
| Title | An Overview on Time-Resolved Optical Analysis of HiPIMS Discharge |
| URI | https://api.istex.fr/ark:/67375/WNG-HX1VK0D2-K/fulltext.pdf https://onlinelibrary.wiley.com/doi/abs/10.1002%2Fppap.201500051 https://www.proquest.com/docview/1713731835 https://www.proquest.com/docview/1753538279 |
| Volume | 12 |
| WOSCitedRecordID | wos000363732000015&url=https%3A%2F%2Fcvtisr.summon.serialssolutions.com%2F%23%21%2Fsearch%3Fho%3Df%26include.ft.matches%3Dt%26l%3Dnull%26q%3D |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| journalDatabaseRights | – providerCode: PRVWIB databaseName: Wiley Online Library - Journals customDbUrl: eissn: 1612-8869 dateEnd: 99991231 omitProxy: false ssIdentifier: ssj0030580 issn: 1612-8850 databaseCode: DRFUL dateStart: 20040101 isFulltext: true titleUrlDefault: https://onlinelibrary.wiley.com providerName: Wiley-Blackwell |
| link | http://cvtisr.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwpV1bb9MwFD6CdhK8DNhFZBTkSYg9RUscO5fHqqUUbesiYFvfLMexpWpVWrVbt0d-Ar-RX4LtXGgfpknbW6ycRNbxuXw-tj8DfDZLe5zizM0pzVwiBHEzinM3DHzMOdVtW3C7PI1Go3g8TtK1U_wlP0RTcDOeYeO1cXCeLY__k4bO59zwTfrUwpCX0MbaeGkL2v0fg4vTOhprc7a3p2lgoz0_pl5N3Ojh480_bCSmttHx_QbqXMeuNvkM3jy_229huwKeqFtayjt4IYsdeNWr73vbhV63QOcrEzrkHZoVyBwO-fv7j6nvT1cyR-dzW_ZGNY0Jmik0nKTfz36i_mRpGZfkHlwMvv7qDd3qigVXUJ27XULzhMTSrGUmQchllEQ5kRoWKK6RnAqlRnQaBOReHlKlEi-LZBDwkHhCT6q58oN9aBWzQr4HxHOhiO8lUvgZiTCPqdCSMhZBoLhUxAG31i8TFf-4uQZjykrmZMyMalijGgeOGvl5ybzxoOQXO1yNGF9cm_1qEWVXo29sOPYvT7w-ZicOdOrxZJWrLpmvp-mRiWzUgcPmtda9WTnhhZzdGhka6MyAo8QBbEf3kS6xNO2mTevgKR99gNfmudzP1oHWzeJWfoQtsbqZLBefKjP_B9__-3g |
| linkProvider | Wiley-Blackwell |
| linkToHtml | http://cvtisr.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwrV1Lj9MwEB7BFmm5LG-RZQEjIThFmzh2HseqpXTVbjeC3aU3y3FsqWKVVu1u4chP4DfyS_A4D-gBISGOTiaRNZ4Zfx7b3wC8xq09yWnhl5wXPlOK-QWnpR9HIZWS27ZLuF1Ok9ksnc-zvDlNiHdhan6ILuGGnuHiNTo4JqSPf7GGrlYSCSdD7nDIbegxa0vWyHvDD6OLaRuOrT278mkW2VjXT3nQMjcG9Hj3DzszUw-V_HUHdv4OXt3sM7r3H_p9Hw4a6En6ta08gFu6egj7g7bi2yMY9CtytsXgob-QZUXwesiPb98xw3-11SU5W7nEN2mJTMjSkPEiPzn9SIaLjeNc0o_hYvTufDD2myILvuJ29vYZLzOWatzNzKJY6iRLSqYtMDDSYjkTa4vpLAwogzLmxmRBkegokjELlF1WSxNGT2CvWlb6KRBZKsPCINMqLFhCZcqVldSpiiIjtWEe-K2ChWoYyLEQxpWouZOpQNWITjUevO3kVzX3xh8l37jx6sTk-jOeWEu4-DR7L8bz8HISDKmYeHDUDqhonHUjQrtQTzC2cQ9eda-t7nHvRFZ6eYMyPLJzA00yD6gb3r90SeR5P-9ah__y0UvYH5-fTsX0ZDZ5BnfxeX267Qj2rtc3-jncUdvrxWb9orH5n_yc_2g |
| linkToPdf | http://cvtisr.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwrV1Lj9MwEB5Bi2AvvNGGXcBICE7RJo6dx7FqKV21dCNgl94sxw-pYpVG7W7hyE_Y37i_ZG3nAT0gJMTRySSyxp6Zz2P7G4A3dmuPU1z4ktLCJ0IQv6BY-nEUYs6pabuE29ksmc_TxSLLm9OE9i5MzQ_RJdysZTh_bQ1cVVIf_WINrSpuCSdD6nDIbegTW0mmB_3Rp_HprHXHZj678mkG2RjTT2nQMjcG-Gj3DzuRqW-V_GMHdv4OXl30GT_4D_1-CPcb6IkG9Vx5BLdU-RjuDduKb09gOCjRydY6D_UdrUpkr4dc_7yyGf7zrZLopHKJb9QSmaCVRpNlfvzxMxotN45zST2F0_H7L8OJ3xRZ8AU10dsnVGYkVXY3M4tirpIskUQZYKC5wXI6VgbTGRggAxlTrbOgSFQU8ZgEwiyruQ6jZ9ArV6XaB8Sl0CQMMiXCgiSYp1QYSZWKKNJcaeKB3yqYiYaB3BbCOGc1dzJmVjWsU40H7zr5qube-KPkWzdenRhff7Mn1hLKvs4_sMkiPJsGI8ymHhy2A8oaY92w0CzUE-vbqAevu9dG93bvhJdqdWllaGRiA04yD7Ab3r90ieX5IO9az__lo1dwNx-N2ex4Pj2APfu4Ptx2CL2L9aV6AXfE9mK5Wb9spvwNho_-4w |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=An+Overview+on+Time-Resolved+Optical+Analysis+of+HiPIMS+Discharge&rft.jtitle=Plasma+processes+and+polymers&rft.au=Britun%2C+Nikolay&rft.au=Konstantinidis%2C+Stephanos&rft.au=Snyders%2C+Rony&rft.date=2015-09-01&rft.pub=Wiley+Subscription+Services%2C+Inc&rft.issn=1612-8850&rft.eissn=1612-8869&rft.volume=12&rft.issue=9&rft.spage=1010&rft_id=info:doi/10.1002%2Fppap.201500051&rft.externalDBID=NO_FULL_TEXT&rft.externalDocID=3811498281 |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=1612-8850&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=1612-8850&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=1612-8850&client=summon |