Electrostatic Potential Fluctuations on Oxide-Passivated Si(111) Surfaces Measured Using Integrated Scanning Probe Microscopy

Variations of the electrostatic potential were investigated for oxide-passivated n-Si(111) surfaces with atomically flat terraces by measuring the force acting on an ultra-sharp tungsten probe that was attached to the quartz resonator of an atomic force microscope. When the probe-sample gap maintain...

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Bibliographic Details
Published in:E-journal of surface science and nanotechnology Vol. 9; pp. 117 - 121
Main Authors: Kanayama, Toshihiko, Iitake, Masanori, Nishizawa, Masayasu, Bolotov, Leonid, Tada, Tetsuya
Format: Journal Article
Language:English
Published: Tokyo The Japan Society of Vacuum and Surface Science 01.01.2011
Japan Science and Technology Agency
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ISSN:1348-0391, 1348-0391
Online Access:Get full text
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