Computational Adaptive Optics for HAR Hybrid Trench Array Topography Measurement by Utilizing Coherence Scanning Interferometry

High aspect ratio (HAR) sample-induced aberrations seriously affect the topography measurement for the bottom of the microstructure by coherence scanning interferometry (CSI). Previous research proposed an aberration compensating method using deformable mirrors at the conjugate position of the pupil...

Full description

Saved in:

Bibliographic Details
Published in:	Sensors (Basel, Switzerland) Vol. 25; no. 13; p. 4085
Main Authors:	Qiao, Wenyou, Gao, Zhishan, Yuan, Qun, Chen, Lu, Guo, Zhenyan, Huo, Xiao, Wang, Qian
Format:	Journal Article
Language:	English
Published:	Switzerland MDPI AG 30.06.2025 MDPI
Subjects:	aberration correction Algorithms Astigmatism coherence scanning interferometry Electric fields high aspect ratio Interferometry Light Mathematical optimization Measurement Optics Optimization Polynomials sample-induced aberrations Signal to noise ratio Simulation Topography virtual phase filter virtual phase filter sample-induced aberrations high aspect ratio coherence scanning interferometry aberration correction topography
ISSN:	1424-8220, 1424-8220
Online Access:	Get full text
Tags:	Add Tag No Tags, Be the first to tag this record!

Be the first to leave a comment!