Qiao, W., Gao, Z., Yuan, Q., Chen, L., Guo, Z., Huo, X., & Wang, Q. (2025). Computational Adaptive Optics for HAR Hybrid Trench Array Topography Measurement by Utilizing Coherence Scanning Interferometry. Sensors (Basel, Switzerland), 25(13), 4085. https://doi.org/10.3390/s25134085
Chicago Style (17th ed.) CitationQiao, Wenyou, Zhishan Gao, Qun Yuan, Lu Chen, Zhenyan Guo, Xiao Huo, and Qian Wang. "Computational Adaptive Optics for HAR Hybrid Trench Array Topography Measurement by Utilizing Coherence Scanning Interferometry." Sensors (Basel, Switzerland) 25, no. 13 (2025): 4085. https://doi.org/10.3390/s25134085.
MLA (9th ed.) CitationQiao, Wenyou, et al. "Computational Adaptive Optics for HAR Hybrid Trench Array Topography Measurement by Utilizing Coherence Scanning Interferometry." Sensors (Basel, Switzerland), vol. 25, no. 13, 2025, p. 4085, https://doi.org/10.3390/s25134085.