Design of a Template-Based Electrophoretically Assisted Micro-Ultrasonic Machining Micro-Channel Machine Tool and Its Machining Experiment

In order to achieve the high-precision and high-efficiency machining of micro-channels for hard and brittle materials, the authors innovatively proposed a new technology called template-based electrophoretically assisted micro-ultrasonic machining (TBEPAMUSM). This technology transfers the micro-cha...

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Published in:	Micromachines (Basel) Vol. 14; no. 7; p. 1360
Main Authors:	Lian, Haishan, Zhang, Linpeng, Chen, Xiaojun, Deng, Cuiyuan, Mo, Yuandong
Format:	Journal Article
Language:	English
Published:	Switzerland MDPI AG 30.06.2023 MDPI
Subjects:	Abrasive machining Brittle materials Chipping Control systems Design Efficiency Electric fields Electrodes Electrophoresis electrophoretically assisted machining Innovations machine tool design Machine tools Machining machining experiment Machinists' tools micro-channel machining micro-ultrasonic machining Microchannels Modules New technology Power supply Pressure sensors Sensors Single crystals Soda-lime glass Surface roughness template Three dimensional motion Tool industry Tool setting Ultrasonic machining Ultrasonic transducers Ultrasonic vibration Vibration Working fluids Workpieces China template micro-channel machining machine tool design electrophoretically assisted machining machining experiment micro-ultrasonic machining
ISSN:	2072-666X, 2072-666X
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Abstract	In order to achieve the high-precision and high-efficiency machining of micro-channels for hard and brittle materials, the authors innovatively proposed a new technology called template-based electrophoretically assisted micro-ultrasonic machining (TBEPAMUSM). This technology transfers the micro-channel shape punch-pin to the workpiece material through micro-ultrasonic machining to form a micro-channel. At the same time, it uses the electrophoretic properties of ultra-fine abrasive particles to ensure the existence of abrasive particles in the machining area by applying a DC electric field. According to the new technology machining principle, a machine tool of TBEPAMUSM was designed and developed. The machine tool hardware adopts a C-shaped structure, including a marble platform, an ultrasonic vibration system, a micro three-dimensional motion platform, a working fluid tank, and a pressure sensor. The machine tool intelligent control system is developed based on LabVIEW, including the initialization module, fast positioning module, constant force tool setting module, constant force control machining module, and real-time coordinate display module. Micro-channels with different structures are machined on single-crystal silicon and soda-lime glass using the designed machine tool and the developed control system. The results show that: when electrophoresis assistance is applied in machining, the edge chipping phenomenon of the micro-channel is significantly reduced, the surface roughness is reduced by about 20%, and the machining efficiency is increased by about 4%.
AbstractList	In order to achieve the high-precision and high-efficiency machining of micro-channels for hard and brittle materials, the authors innovatively proposed a new technology called template-based electrophoretically assisted micro-ultrasonic machining (TBEPAMUSM). This technology transfers the micro-channel shape punch-pin to the workpiece material through micro-ultrasonic machining to form a micro-channel. At the same time, it uses the electrophoretic properties of ultra-fine abrasive particles to ensure the existence of abrasive particles in the machining area by applying a DC electric field. According to the new technology machining principle, a machine tool of TBEPAMUSM was designed and developed. The machine tool hardware adopts a C-shaped structure, including a marble platform, an ultrasonic vibration system, a micro three-dimensional motion platform, a working fluid tank, and a pressure sensor. The machine tool intelligent control system is developed based on LabVIEW, including the initialization module, fast positioning module, constant force tool setting module, constant force control machining module, and real-time coordinate display module. Micro-channels with different structures are machined on single-crystal silicon and soda-lime glass using the designed machine tool and the developed control system. The results show that: when electrophoresis assistance is applied in machining, the edge chipping phenomenon of the micro-channel is significantly reduced, the surface roughness is reduced by about 20%, and the machining efficiency is increased by about 4%. In order to achieve the high-precision and high-efficiency machining of micro-channels for hard and brittle materials, the authors innovatively proposed a new technology called template-based electrophoretically assisted micro-ultrasonic machining (TBEPAMUSM). This technology transfers the micro-channel shape punch-pin to the workpiece material through micro-ultrasonic machining to form a micro-channel. At the same time, it uses the electrophoretic properties of ultra-fine abrasive particles to ensure the existence of abrasive particles in the machining area by applying a DC electric field. According to the new technology machining principle, a machine tool of TBEPAMUSM was designed and developed. The machine tool hardware adopts a C-shaped structure, including a marble platform, an ultrasonic vibration system, a micro three-dimensional motion platform, a working fluid tank, and a pressure sensor. The machine tool intelligent control system is developed based on LabVIEW, including the initialization module, fast positioning module, constant force tool setting module, constant force control machining module, and real-time coordinate display module. Micro-channels with different structures are machined on single-crystal silicon and soda-lime glass using the designed machine tool and the developed control system. The results show that: when electrophoresis assistance is applied in machining, the edge chipping phenomenon of the micro-channel is significantly reduced, the surface roughness is reduced by about 20%, and the machining efficiency is increased by about 4%.In order to achieve the high-precision and high-efficiency machining of micro-channels for hard and brittle materials, the authors innovatively proposed a new technology called template-based electrophoretically assisted micro-ultrasonic machining (TBEPAMUSM). This technology transfers the micro-channel shape punch-pin to the workpiece material through micro-ultrasonic machining to form a micro-channel. At the same time, it uses the electrophoretic properties of ultra-fine abrasive particles to ensure the existence of abrasive particles in the machining area by applying a DC electric field. According to the new technology machining principle, a machine tool of TBEPAMUSM was designed and developed. The machine tool hardware adopts a C-shaped structure, including a marble platform, an ultrasonic vibration system, a micro three-dimensional motion platform, a working fluid tank, and a pressure sensor. The machine tool intelligent control system is developed based on LabVIEW, including the initialization module, fast positioning module, constant force tool setting module, constant force control machining module, and real-time coordinate display module. Micro-channels with different structures are machined on single-crystal silicon and soda-lime glass using the designed machine tool and the developed control system. The results show that: when electrophoresis assistance is applied in machining, the edge chipping phenomenon of the micro-channel is significantly reduced, the surface roughness is reduced by about 20%, and the machining efficiency is increased by about 4%.
Audience	Academic
Author	Chen, Xiaojun Zhang, Linpeng Mo, Yuandong Lian, Haishan Deng, Cuiyuan
AuthorAffiliation	2 School of Mechanical and Electrical Engineering, Guangdong University of Technology, Guangzhou 510006, China 1 School of Mechanical and Electrical Engineering, Lingnan Normal University, Zhanjiang 524048, China
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Cites_doi	10.1007/s00170-014-6666-x 10.1002/cyto.a.22427 10.3390/mi13020339 10.1504/IJAT.2009.021639 10.1007/s00216-012-5952-4 10.1002/smtd.202200717 10.1111/j.1151-2916.1984.tb19179.x 10.1016/j.bios.2022.114702 10.1016/j.measurement.2020.107844 10.1016/j.snb.2022.132644 10.1021/acsami.2c09446 10.1007/s00170-015-7629-6 10.1039/c0lc00561d 10.1002/(SICI)1522-2683(20000101)21:1<27::AID-ELPS27>3.0.CO;2-C 10.1016/j.nantod.2022.101615 10.1021/acsami.2c07660 10.1016/j.nantod.2020.100980 10.4028/www.scientific.net/AMR.76-78.696 10.1007/s00216-016-0161-1 10.1016/j.jmapro.2019.05.031 10.1016/j.jmapro.2020.11.027
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SubjectTerms	Abrasive machining Brittle materials Chipping Control systems Design Efficiency Electric fields Electrodes Electrophoresis electrophoretically assisted machining Innovations machine tool design Machine tools Machining machining experiment Machinists' tools micro-channel machining micro-ultrasonic machining Microchannels Modules New technology Power supply Pressure sensors Sensors Single crystals Soda-lime glass Surface roughness template Three dimensional motion Tool industry Tool setting Ultrasonic machining Ultrasonic transducers Ultrasonic vibration Vibration Working fluids Workpieces
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Title	Design of a Template-Based Electrophoretically Assisted Micro-Ultrasonic Machining Micro-Channel Machine Tool and Its Machining Experiment
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