APA (7th ed.) Citation

Ding, Y., Zhang, Y., Ren, Y. M., Orkoulas, G., & Christofides, P. D. (2019). Machine learning-based modeling and operation for ALD of SiO2 thin-films using data from a multiscale CFD simulation. Chemical engineering research & design, 151, 131-145. https://doi.org/10.1016/j.cherd.2019.09.005

Chicago Style (17th ed.) Citation

Ding, Yangyao, Yichi Zhang, Yi Ming Ren, Gerassimos Orkoulas, and Panagiotis D. Christofides. "Machine Learning-based Modeling and Operation for ALD of SiO2 Thin-films Using Data from a Multiscale CFD Simulation." Chemical Engineering Research & Design 151 (2019): 131-145. https://doi.org/10.1016/j.cherd.2019.09.005.

MLA (9th ed.) Citation

Ding, Yangyao, et al. "Machine Learning-based Modeling and Operation for ALD of SiO2 Thin-films Using Data from a Multiscale CFD Simulation." Chemical Engineering Research & Design, vol. 151, 2019, pp. 131-145, https://doi.org/10.1016/j.cherd.2019.09.005.