Noncyclic Scheduling of Cluster Tools With a Branch and Bound Algorithm

Cluster tools, each of which consists of multiple processing modules, one material handling robot, and loadlocks, are widely used for wafer fabrication processes, such as lithography, etching, and deposition. There have been many approaches and algorithms for cyclic scheduling of cluster tools in wh...

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Veröffentlicht in:	IEEE transactions on automation science and engineering Jg. 12; H. 2; S. 690 - 700
Hauptverfasser:	Kim, Hyun-Jung, Lee, Jun-Ho, Lee, Tae-Eog
Format:	Journal Article
Sprache:	Englisch
Veröffentlicht:	New York IEEE 01.04.2015 The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Schlagworte:	Algorithms Analysis Branch and bound (B&B) algorithm cluster tool Clustering algorithms Efficiency Etching Job shop scheduling noncyclic scheduling Offset printing Optimal scheduling Petri net Robots Semiconductor device modeling Time factors
ISSN:	1545-5955, 1558-3783
Online-Zugang:	Volltext
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