Noncyclic Scheduling of Cluster Tools With a Branch and Bound Algorithm

Cluster tools, each of which consists of multiple processing modules, one material handling robot, and loadlocks, are widely used for wafer fabrication processes, such as lithography, etching, and deposition. There have been many approaches and algorithms for cyclic scheduling of cluster tools in wh...

Full description

Saved in:

Bibliographic Details
Published in:	IEEE transactions on automation science and engineering Vol. 12; no. 2; pp. 690 - 700
Main Authors:	Kim, Hyun-Jung, Lee, Jun-Ho, Lee, Tae-Eog
Format:	Journal Article
Language:	English
Published:	New York IEEE 01.04.2015 The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects:	Algorithms Analysis Branch and bound (B&B) algorithm cluster tool Clustering algorithms Efficiency Etching Job shop scheduling noncyclic scheduling Offset printing Optimal scheduling Petri net Robots Semiconductor device modeling Time factors
ISSN:	1545-5955, 1558-3783
Online Access:	Get full text
Tags:	Add Tag No Tags, Be the first to tag this record!

Abstract	Cluster tools, each of which consists of multiple processing modules, one material handling robot, and loadlocks, are widely used for wafer fabrication processes, such as lithography, etching, and deposition. There have been many approaches and algorithms for cyclic scheduling of cluster tools in which the robot repeats a specified sequence for processing identical wafers. However, the lot order size has recently been decreasing due to the larger wafer size and circuit width reductions. In modern fabs, each wafer lot can have different flow patterns and process times for the same process step, and heterogeneous lots are processed consecutively in a tool. Even some tools in a fab have idle time waiting for wafer lots depending on the work-in-process fluctuations. Such different wafer lots and frequent tool state changes cannot be handled with cyclic scheduling methods, and accordingly noncyclic scheduling methods for such cases are required. Therefore, we develop an efficient branch and bound (B&B) procedure for noncyclic scheduling problems of cluster tools to minimize the makespan. Since a timed Petri net (TPN) is known for its powerful modeling ability and analysis capability, the algorithm is developed based on a TPN. We verify the efficiency of the B&B procedure with various cluster tool scheduling problems. There have been many studies on scheduling cluster tools, but most of them utilize different scheduling approaches or develop problem specialized properties. It is impractical to implement all the different methods to a tool scheduler because the scheduling requirements continuously change depending on wafer types and tool architectures. Hence, it is required to have an efficient solution method to address diverse cluster tool scheduling problems in fabs especially for frequent lot switchings and tool state changes due to larger wafer size and smaller lot order size. Therefore, we develop an efficient branch and bound procedure for noncyclic scheduling of a cluster tool with the makespan measurement. Since TPNs have the powerful modeling ability and analysis capability, the algorithm is developed based on a TPN. From the experimental results, we observe that one lot with 25 wafers can be easily solved in a reasonable time. The proposed method can be used for many different scheduling problems of a cluster tool by generating each corresponding TPN model.
AbstractList	Cluster tools, each of which consists of multiple processing modules, one material handling robot, and loadlocks, are widely used for wafer fabrication processes, such as lithography, etching, and deposition. There have been many approaches and algorithms for cyclic scheduling of cluster tools in which the robot repeats a specified sequence for processing identical wafers. However, the lot order size has recently been decreasing due to the larger wafer size and circuit width reductions. In modern fabs, each wafer lot can have different flow patterns and process times for the same process step, and heterogeneous lots are processed consecutively in a tool. Even some tools in a fab have idle time waiting for wafer lots depending on the work-in-process fluctuations. Such different wafer lots and frequent tool state changes cannot be handled with cyclic scheduling methods, and accordingly noncyclic scheduling methods for such cases are required. Therefore, we develop an efficient branch and bound (B&B) procedure for noncyclic scheduling problems of cluster tools to minimize the makespan. Since a timed Petri net (TPN) is known for its powerful modeling ability and analysis capability, the algorithm is developed based on a TPN. We verify the efficiency of the B&B procedure with various cluster tool scheduling problems. There have been many studies on scheduling cluster tools, but most of them utilize different scheduling approaches or develop problem specialized properties. It is impractical to implement all the different methods to a tool scheduler because the scheduling requirements continuously change depending on wafer types and tool architectures. Hence, it is required to have an efficient solution method to address diverse cluster tool scheduling problems in fabs especially for frequent lot switchings and tool state changes due to larger wafer size and smaller lot order size. Therefore, we develop an efficient branch and bound procedure for noncyclic scheduling of a cluster tool with the makespan measurement. Since TPNs have the powerful modeling ability and analysis capability, the algorithm is developed based on a TPN. From the experimental results, we observe that one lot with 25 wafers can be easily solved in a reasonable time. The proposed method can be used for many different scheduling problems of a cluster tool by generating each corresponding TPN model. Cluster tools, each of which consists of multiple processing modules, one material handling robot, and loadlocks, are widely used for wafer fabrication processes, such as lithography, etching, and deposition. There have been many approaches and algorithms for cyclic scheduling of cluster tools in which the robot repeats a specified sequence for processing identical wafers. However, the lot order size has recently been decreasing due to the larger wafer size and circuit width reductions. In modern fabs, each wafer lot can have different flow patterns and process times for the same process step, and heterogeneous lots are processed consecutively in a tool. Even some tools in a fab have idle time waiting for wafer lots depending on the work-in-process fluctuations. Such different wafer lots and frequent tool state changes cannot be handled with cyclic scheduling methods, and accordingly noncyclic scheduling methods for such cases are required. Therefore, we develop an efficient branch and bound (B&B) procedure for noncyclic scheduling problems of cluster tools to minimize the makespan. Since a timed Petri net (TPN) is known for its powerful modeling ability and analysis capability, the algorithm is developed based on a TPN. We verify the efficiency of the B&B procedure with various cluster tool scheduling problems.
Author	Tae-Eog Lee Jun-Ho Lee Hyun-Jung Kim
Author_xml	– sequence: 1 givenname: Hyun-Jung surname: Kim fullname: Kim, Hyun-Jung – sequence: 2 givenname: Jun-Ho surname: Lee fullname: Lee, Jun-Ho – sequence: 3 givenname: Tae-Eog surname: Lee fullname: Lee, Tae-Eog
BookMark	eNp9kE9PAjEQxRuDiYB-AOOliefF_t12j0AUTYgewHhsSreFkqXF7u6Bb-9uIB48eJl5ybzfTOaNwCDEYAG4x2iCMSqe1tPV84QgTCeEFJRzcgWGmHOZUSHpoNeMZ7zg_AaM6nqPEGGyQEOweI_BnEzlDVyZnS3byoctjA7Oq7ZubILrGKsafvlmBzWcJR1MJ0IJZ7Ht6rTaxtTNDrfg2umqtneXPgafL8_r-Wu2_Fi8zafLzDBKm6zg0pFN4XiJsdg4lGOjtcy1KCV1yFiZ4w0riBTGMW2owawsqSXECMqsM5aOweN57zHF79bWjdrHNoXupMK5YExwjHnnEmeXSbGuk3XK-EY3PoYmaV8pjFSfmupTU31q6pJaR-I_5DH5g06nf5mHM-Ottb_-PO_-kIT-AOomeY8
CODEN	ITASC7
CitedBy_id	crossref_primary_10_1109_TASE_2020_3014078 crossref_primary_10_1109_TASE_2023_3296087 crossref_primary_10_1109_TASE_2023_3275703 crossref_primary_10_1109_TASE_2016_2531105 crossref_primary_10_1109_TSM_2018_2811125 crossref_primary_10_1109_TASE_2015_2443107 crossref_primary_10_1109_TSM_2015_2390644 crossref_primary_10_1109_TASE_2017_2764105 crossref_primary_10_1109_TASE_2015_2478482 crossref_primary_10_1109_TASE_2020_3002560 crossref_primary_10_1109_TCST_2016_2598762 crossref_primary_10_1109_TASE_2024_3399818 crossref_primary_10_1109_TSM_2017_2721970 crossref_primary_10_3390_pr5040083 crossref_primary_10_1016_j_jmsy_2024_09_018 crossref_primary_10_1177_1687814016646503 crossref_primary_10_1109_TSM_2016_2530810 crossref_primary_10_1109_TSM_2015_2415523 crossref_primary_10_1109_LRA_2024_3396112 crossref_primary_10_1016_j_ifacol_2017_08_391 crossref_primary_10_1109_TASE_2020_3047924 crossref_primary_10_1109_TASE_2018_2874664 crossref_primary_10_1080_00207543_2015_1035813 crossref_primary_10_1109_ACCESS_2020_2988274 crossref_primary_10_1109_TASE_2017_2682271 crossref_primary_10_1109_TASE_2022_3203408 crossref_primary_10_1080_00207543_2021_1887533 crossref_primary_10_1109_TASE_2018_2878063 crossref_primary_10_1007_s10479_018_3098_2 crossref_primary_10_1080_00207543_2018_1553314 crossref_primary_10_1109_TASE_2014_2313979 crossref_primary_10_1109_TASE_2017_2690443 crossref_primary_10_1109_TSMC_2016_2598303 crossref_primary_10_1016_j_ifacol_2018_06_309 crossref_primary_10_1109_TSMC_2022_3222915 crossref_primary_10_1109_TASE_2017_2771751 crossref_primary_10_1109_TCST_2019_2902329 crossref_primary_10_1109_TSMC_2020_2964032 crossref_primary_10_1109_TSMC_2018_2852724 crossref_primary_10_1177_1687814017693217 crossref_primary_10_1109_TASE_2019_2930046 crossref_primary_10_1109_TASE_2022_3188858 crossref_primary_10_1109_TASE_2020_3009984 crossref_primary_10_1109_TASE_2016_2642997 crossref_primary_10_1109_ACCESS_2021_3077503 crossref_primary_10_1109_TASE_2025_3562191 crossref_primary_10_1109_TSM_2017_2759063 crossref_primary_10_1109_TSM_2022_3166908 crossref_primary_10_1109_TSM_2019_2910399 crossref_primary_10_1109_TASE_2021_3122576 crossref_primary_10_1109_TASE_2018_2868004 crossref_primary_10_1109_TSMC_2015_2507140 crossref_primary_10_1109_TASE_2020_3029737 crossref_primary_10_1016_j_jmsy_2023_02_002 crossref_primary_10_1109_TSM_2020_2998734 crossref_primary_10_1109_LRA_2025_3546072 crossref_primary_10_3233_JIFS_18096 crossref_primary_10_1109_TSMC_2023_3317390 crossref_primary_10_1109_TSMC_2016_2600583 crossref_primary_10_1080_00207543_2016_1243819 crossref_primary_10_1080_02533839_2018_1516515 crossref_primary_10_1109_TASE_2018_2815157 crossref_primary_10_1109_TSMC_2017_2721979 crossref_primary_10_1109_TASE_2015_2503325 crossref_primary_10_1109_TSMC_2019_2899590 crossref_primary_10_1016_j_eswa_2024_124471
Cites_doi	10.1109/TSMCA.2012.2187890 10.1109/41.334574 10.1109/70.63257 10.1109/TASE.2013.2285221 10.1109/TSM.2011.2180547 10.1142/3376 10.1109/TSM.2006.879414 10.1109/TASE.2011.2178023 10.1109/TSM.2009.2039243 10.1287/mnsc.17.12.B782 10.1109/70.964658 10.1080/00207543.2011.590949 10.1109/TASE.2010.2046891 10.1109/66.705370 10.1016/0005-1098(94)90024-8 10.1109/TASE.2005.851236 10.1109/TSM.2003.815203 10.1109/TASE.2012.2192476 10.1109/TSM.2008.2000425 10.1109/TASE.2012.2217128 10.1080/00207540802552659 10.1287/mnsc.35.2.164 10.1109/TASE.2010.2046893 10.1016/j.ejor.2004.09.019 10.1109/5.24143 10.1109/70.988976 10.1007/3-540-56689-9_43 10.1109/TASE.2010.2046736 10.1109/70.964662 10.1109/TSM.2012.2199338 10.1109/TASE.2013.2255037 10.1109/TASE.2009.2039567 10.1016/S0377-2217(82)80007-6 10.1109/TSM.2012.2199329 10.1109/5326.760564 10.1109/TASE.2007.912716 10.1109/TSM.2006.873402 10.1080/00207543.2013.765071 10.1080/00207543.2012.758392 10.1109/70.282537 10.1109/TASE.2008.2008633 10.1109/TSM.2012.2222945 10.1109/TASE.2011.2160452 10.1109/TASE.2012.2220355 10.1109/TSMCB.2011.2170678
ContentType	Journal Article
Copyright	Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) Apr 2015
Copyright_xml	– notice: Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) Apr 2015
DBID	97E RIA RIE AAYXX CITATION 7SC 7SP 7TB 8FD FR3 JQ2 L7M L~C L~D
DOI	10.1109/TASE.2013.2293552
DatabaseName	IEEE All-Society Periodicals Package (ASPP) 2005–Present IEEE All-Society Periodicals Package (ASPP) 1998–Present IEEE/IET Electronic Library (IEL) (UW System Shared) CrossRef Computer and Information Systems Abstracts Electronics & Communications Abstracts Mechanical & Transportation Engineering Abstracts Technology Research Database Engineering Research Database ProQuest Computer Science Collection Advanced Technologies Database with Aerospace Computer and Information Systems Abstracts Academic Computer and Information Systems Abstracts Professional
DatabaseTitle	CrossRef Technology Research Database Computer and Information Systems Abstracts – Academic Mechanical & Transportation Engineering Abstracts Electronics & Communications Abstracts ProQuest Computer Science Collection Computer and Information Systems Abstracts Engineering Research Database Advanced Technologies Database with Aerospace Computer and Information Systems Abstracts Professional
DatabaseTitleList	Technology Research Database
Database_xml	– sequence: 1 dbid: RIE name: IEEE Electronic Library (IEL) url: https://ieeexplore.ieee.org/ sourceTypes: Publisher
DeliveryMethod	fulltext_linktorsrc
Discipline	Engineering
EISSN	1558-3783
EndPage	700
ExternalDocumentID	3660532591 10_1109_TASE_2013_2293552 6692882
Genre	orig-research
GrantInformation_xml	– fundername: Basic Science Research Program through the National Research Foundation of Korea
GroupedDBID	-~X 0R~ 29I 4.4 5GY 5VS 6IK 97E AAJGR AARMG AASAJ AAWTH ABAZT ABQJQ ABVLG ACGFO ACGFS ACIWK AENEX AETIX AGQYO AGSQL AHBIQ AIBXA AKJIK AKQYR ALMA_UNASSIGNED_HOLDINGS ATWAV BEFXN BFFAM BGNUA BKEBE BPEOZ CS3 DU5 EBS EJD F5P HZ~ H~9 IFIPE IPLJI JAVBF LAI M43 O9- OCL PQQKQ RIA RIE RNS AAYXX CITATION 7SC 7SP 7TB 8FD FR3 JQ2 L7M L~C L~D
ID	FETCH-LOGICAL-c433t-958f2b9f5d117bf061caa86a7d83f0ce861b49287cf4ac3c14dd3e22c734efce3
IEDL.DBID	RIE
ISICitedReferencesCount	86
ISICitedReferencesURI	http://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=Summon&SrcAuth=ProQuest&DestLinkType=CitingArticles&DestApp=WOS_CPL&KeyUT=000352502300028&url=https%3A%2F%2Fcvtisr.summon.serialssolutions.com%2F%23%21%2Fsearch%3Fho%3Df%26include.ft.matches%3Dt%26l%3Dnull%26q%3D
ISSN	1545-5955
IngestDate	Sun Sep 07 03:36:24 EDT 2025 Sat Nov 29 04:12:44 EST 2025 Tue Nov 18 21:59:15 EST 2025 Tue Aug 26 16:40:59 EDT 2025
IsPeerReviewed	false
IsScholarly	true
Issue	2
Language	English
License	https://ieeexplore.ieee.org/Xplorehelp/downloads/license-information/IEEE.html
LinkModel	DirectLink
MergedId	FETCHMERGED-LOGICAL-c433t-958f2b9f5d117bf061caa86a7d83f0ce861b49287cf4ac3c14dd3e22c734efce3
Notes	ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 14
PQID	1674475115
PQPubID	27623
PageCount	11
ParticipantIDs	crossref_citationtrail_10_1109_TASE_2013_2293552 proquest_journals_1674475115 crossref_primary_10_1109_TASE_2013_2293552 ieee_primary_6692882
PublicationCentury	2000
PublicationDate	2015-04-01
PublicationDateYYYYMMDD	2015-04-01
PublicationDate_xml	– month: 04 year: 2015 text: 2015-04-01 day: 01
PublicationDecade	2010
PublicationPlace	New York
PublicationPlace_xml	– name: New York
PublicationTitle	IEEE transactions on automation science and engineering
PublicationTitleAbbrev	TASE
PublicationYear	2015
Publisher	IEEE The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher_xml	– name: IEEE – name: The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
References	ref13 ref12 ref15 ref14 ref11 ref10 ref17 ref16 ref19 wang (ref41) 1998 billington (ref52) 2003; 2679 wu (ref18) 2013; 43 ref51 ref50 ref48 ref47 ref42 ref44 zhou (ref30) 1995 ref49 ref8 ref7 ref9 ref4 ref3 wu (ref45) 1999; 29 ref5 ref40 chan (ref24) 2004 ref35 ref34 ref37 ref36 ref33 lee (ref31) 1994; 10 ref2 ref1 ref39 ref38 paek (ref23) 2008 wu (ref6) 2010; 7 fehling (ref46) 1993; 674 ref26 ref25 ref20 ref22 ref21 divid (ref43) 1994; 30 ref28 ref27 ref29 kim (ref32) 2012
References_xml	– volume: 43 start-page: 1182 year: 2013 ident: ref18 article-title: A Petri-net-based scheduling strategy for dual-arm cluster tools with wafer revisiting publication-title: IEEE Trans Syst Man Cybern Syst doi: 10.1109/TSMCA.2012.2187890 – ident: ref44 doi: 10.1109/41.334574 – ident: ref34 doi: 10.1109/70.63257 – ident: ref22 doi: 10.1109/TASE.2013.2285221 – ident: ref21 doi: 10.1109/TSM.2011.2180547 – ident: ref2 doi: 10.1142/3376 – ident: ref39 doi: 10.1109/TSM.2006.879414 – start-page: 103 year: 2008 ident: ref23 article-title: Optimal scheduling of dual-armed cluster tools without swap restriction publication-title: Proc IEEE Int Conf Autom Sci Eng – ident: ref7 doi: 10.1109/TASE.2011.2178023 – ident: ref8 doi: 10.1109/TSM.2009.2039243 – ident: ref48 doi: 10.1287/mnsc.17.12.B782 – ident: ref28 doi: 10.1109/70.964658 – ident: ref29 doi: 10.1080/00207543.2011.590949 – ident: ref37 doi: 10.1109/TASE.2010.2046891 – ident: ref1 doi: 10.1109/66.705370 – volume: 30 start-page: 175 year: 1994 ident: ref43 article-title: Petri nets for modeling of dynamic systems?A survey publication-title: Automatica doi: 10.1016/0005-1098(94)90024-8 – ident: ref11 doi: 10.1109/TASE.2005.851236 – ident: ref12 doi: 10.1109/TSM.2003.815203 – ident: ref10 doi: 10.1109/TASE.2012.2192476 – ident: ref5 doi: 10.1109/TSM.2008.2000425 – ident: ref27 doi: 10.1109/TASE.2012.2217128 – start-page: 568 year: 2004 ident: ref24 article-title: Generating scheduling constraints for discrete event dynamic systems publication-title: Proc Winter Simulation Conf – ident: ref36 doi: 10.1080/00207540802552659 – ident: ref50 doi: 10.1287/mnsc.35.2.164 – ident: ref38 doi: 10.1109/TASE.2010.2046893 – ident: ref47 doi: 10.1016/j.ejor.2004.09.019 – ident: ref42 doi: 10.1109/5.24143 – ident: ref35 doi: 10.1109/70.988976 – volume: 674 start-page: 148 year: 1993 ident: ref46 article-title: A concept of hierarchical Petri nets with building blocks publication-title: Advances in Petri Nets Lecture Notes in Computer Science doi: 10.1007/3-540-56689-9_43 – ident: ref19 doi: 10.1109/TASE.2010.2046736 – ident: ref15 doi: 10.1109/70.964662 – start-page: 1779 year: 2012 ident: ref32 article-title: Petri net-based non-cyclic scheduling with a branch and bound algorithm publication-title: Proc IEEE Int Conf Syst Man Cybern – ident: ref9 doi: 10.1109/TSM.2012.2199338 – ident: ref25 doi: 10.1109/TASE.2013.2255037 – ident: ref40 doi: 10.1109/TASE.2009.2039567 – ident: ref49 doi: 10.1016/S0377-2217(82)80007-6 – ident: ref3 doi: 10.1109/TSM.2012.2199329 – volume: 29 start-page: 192 year: 1999 ident: ref45 article-title: Necessary and sufficient conditions for deadlock-free operation in flexible manufacturing systems using a colored Petri net model publication-title: IEEE Trans Syst Man Cybern Part C Appl Rev doi: 10.1109/5326.760564 – ident: ref13 doi: 10.1109/TASE.2007.912716 – start-page: 9 year: 1998 ident: ref41 publication-title: Timed Petri Nets Theory and Application – ident: ref20 doi: 10.1109/TSM.2006.873402 – ident: ref16 doi: 10.1109/TSMCA.2012.2187890 – ident: ref51 doi: 10.1080/00207543.2013.765071 – ident: ref4 doi: 10.1080/00207543.2012.758392 – volume: 10 start-page: 123 year: 1994 ident: ref31 article-title: Scheduling flexible manufacturing systems using Petri nets and heuristic search publication-title: IEEE Trans Robot Autom doi: 10.1109/70.282537 – volume: 2679 start-page: 483 year: 2003 ident: ref52 article-title: The Petri net markup language: Concepts, technology, and tools publication-title: Application and Theory of Petri-Nets – volume: 7 start-page: 303 year: 2010 ident: ref6 article-title: A closed-form solution for schedulability and optimal scheduling of dual-arm cluster tools with wafer residency time constraint based on steady schedule analysis publication-title: IEEE Trans Autom Sci Eng doi: 10.1109/TASE.2008.2008633 – ident: ref17 doi: 10.1109/TSM.2012.2222945 – ident: ref14 doi: 10.1109/TASE.2011.2160452 – ident: ref26 doi: 10.1109/TASE.2012.2220355 – ident: ref33 doi: 10.1109/TSMCB.2011.2170678 – start-page: 211 year: 1995 ident: ref30 article-title: Petri net scheduling of FMS using branch and bound method publication-title: Proc IEEE Int Conf Ind Electron Control Instrum
SSID	ssj0024890
Score	2.3741574
Snippet	Cluster tools, each of which consists of multiple processing modules, one material handling robot, and loadlocks, are widely used for wafer fabrication...
SourceID	proquest crossref ieee
SourceType	Aggregation Database Enrichment Source Index Database Publisher
StartPage	690
SubjectTerms	Algorithms Analysis Branch and bound (B&B) algorithm cluster tool Clustering algorithms Efficiency Etching Job shop scheduling noncyclic scheduling Offset printing Optimal scheduling Petri net Robots Semiconductor device modeling Time factors
Title	Noncyclic Scheduling of Cluster Tools With a Branch and Bound Algorithm
URI	https://ieeexplore.ieee.org/document/6692882 https://www.proquest.com/docview/1674475115
Volume	12
WOSCitedRecordID	wos000352502300028&url=https%3A%2F%2Fcvtisr.summon.serialssolutions.com%2F%23%21%2Fsearch%3Fho%3Df%26include.ft.matches%3Dt%26l%3Dnull%26q%3D
hasFullText	1
inHoldings	1
isFullTextHit
isPrint
journalDatabaseRights	– providerCode: PRVIEE databaseName: IEEE Electronic Library (IEL) customDbUrl: eissn: 1558-3783 dateEnd: 99991231 omitProxy: false ssIdentifier: ssj0024890 issn: 1545-5955 databaseCode: RIE dateStart: 20040101 isFulltext: true titleUrlDefault: https://ieeexplore.ieee.org/ providerName: IEEE
link	http://cvtisr.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwlV1LSwMxEB60eNCDb7G-yMGTuHY32WyyxyqtHqQIVuxt2cwmWli70oe_3yRdq6II3gJ5EL5JMpNk5huA0whjZe-yKghZagIXehnkXOkgMiKUAilq6QOFb0WvJweD9G4JzhexMFpr73ymL1zR_-UXFc7cU1krSVJqLcJlWBYimcdqffLqSf-e4iyCgKec1z-YUZi2-u37jnPiYheUOjpx-k0H-aQqP05ir166G_-b2Cas12Ykac_lvgVLerQNa1_IBXfgulfZgxPLIZJ7K5nCuZw_kcqQq3Lm2BFIv6rKCXkcTp9JTi5dgg1bGBXk0mVaIu3yqRrbupddeOh2-lc3QZ02IcCYsWmQcmmoSg0vokgoYxU25rlMclFIZkILfhKp2M5XoIlzZBjFRcE0pShYrA1qtgeNUTXS-0CoDLny_D6JiZFqVSiaKGb3tEYlc92E8APIDGtOcZfaosz83SJMM4d95rDPauybcLbo8jon1Pir8Y4De9GwxrkJRx_SyuotN8lcOEUsrP3ID37vdQirdmw-d7s5gsZ0PNPHsIJv0-FkfOJX0ztfV8at
linkProvider	IEEE
linkToHtml	http://cvtisr.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwlV1LS8QwEB58gXrwLa6umoMnsdomTZseV1FXXBfBFb2VZproQt3KPvz9Jtm6KorgLdCEhm_ymCQz3wdwEGAozVlWej5LtGdTL72MS-UFOvZFjBSVcInCrbjdFo-Pye0UHE1yYZRSLvhMHduie8vPSxzZq7KTKEqo8QinYdYqZ_FxttYns55wNyrWJ_B4wnn1hhn4yUmncXduw7jYMaWWUJx-24WcrMqPtdhtMBfL_-vaCixVjiRpjC2_ClOqtwaLX-gF1-GyXZqlE4sukjtjm9wGnT-RUpOzYmT5EUinLIsBeegOn0lGTq3Ehin0cnJqtZZIo3gq--bbywbcX5x3zppeJZzgYcjY0Eu40FQmmudBEEtttmzMMhFlcS6Y9g38USBD098YdZghwyDMc6YoxZiFSqNimzDTK3tqCwgVPpeO4SfSIVIlc0kjycysVihFpmrgfwCZYsUqbsUtitSdLvwktdinFvu0wr4Gh5Mmr2NKjb8qr1uwJxUrnGtQ_7BWWk26QWoTKsLYeJB8-_dW-zDf7Ny00tZV-3oHFsx_-DgIpw4zw_5I7cIcvg27g_6eG1nv6kLJ-A
openUrl	ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Noncyclic+Scheduling+of+Cluster+Tools+With+a+Branch+and+Bound+Algorithm&rft.jtitle=IEEE+transactions+on+automation+science+and+engineering&rft.au=Kim%2C+Hyun-Jung&rft.au=Lee%2C+Jun-Ho&rft.au=Lee%2C+Tae-Eog&rft.date=2015-04-01&rft.issn=1545-5955&rft.eissn=1558-3783&rft.volume=12&rft.issue=2&rft.spage=690&rft.epage=700&rft_id=info:doi/10.1109%2FTASE.2013.2293552&rft.externalDBID=n%2Fa&rft.externalDocID=10_1109_TASE_2013_2293552
thumbnail_l	http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=1545-5955&client=summon
thumbnail_m	http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=1545-5955&client=summon
thumbnail_s	http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=1545-5955&client=summon