Predictive Maintenance using Machine Learning Based Classification Models

Machine learning facilitates predictive maintenance due to the advantages it holds over traditional methods of maintaining semi-conductor devices such as preventive and breakdown maintenance. Several predictive models using machine learning on the Semiconductor Manufacturing process dataset (SECOM)...

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Bibliographic Details

Published in:	IOP conference series. Materials Science and Engineering Vol. 954; no. 1; pp. 12001 - 12009
Main Authors:	Chazhoor, Anisha, Mounika, Y, Vergin Raja Sarobin, M, Sanjana, M V, Yasashvini, R
Format:	Journal Article
Language:	English
Published:	IOP Publishing 01.10.2020
ISSN:	1757-8981, 1757-899X
Online Access:	Get full text
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