Optimized rapid thermal process for high efficiency silicon solar cells
Rapid thermal processing is opening new possibilities for a low-cost and environmentally safe silicon solar cell production, keeping the process time at high temperature in the order of 1 min, due to enhanced diffusion and oxidation mechanisms. Controlling the surface concentration of the junction i...
Uložené v:
| Vydané v: | Solar energy materials and solar cells Ročník 65; číslo 1; s. 495 - 501 |
|---|---|
| Hlavní autori: | , , , , , |
| Médium: | Journal Article Konferenčný príspevok.. |
| Jazyk: | English |
| Vydavateľské údaje: |
Amsterdam
Elsevier B.V
2001
Elsevier |
| Predmet: | |
| ISSN: | 0927-0248, 1879-3398 |
| On-line prístup: | Získať plný text |
| Tagy: |
Pridať tag
Žiadne tagy, Buďte prvý, kto otaguje tento záznam!
|
| Shrnutí: | Rapid thermal processing is opening new possibilities for a low-cost and environmentally safe silicon solar cell production, keeping the process time at high temperature in the order of 1
min, due to enhanced diffusion and oxidation mechanisms. Controlling the surface concentration of the junction is one of the major parameters, in order to obtain suitable front surface recombination velocities. Simultaneous diffusion of phosphorus and aluminum is used to realize emitter and back surface field in a single high-temperature step, with optimized gettering effect. Controlling the mentioned parameters on industrial 1
Ω
cm Cz material lead in 17.5% efficient solar cells on a surface of 25
cm
2. All results are discussed in terms of process temperature, dopant source concentration and effective process time, below 1
min including high heating and cooling rates. |
|---|---|
| Bibliografia: | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
| ISSN: | 0927-0248 1879-3398 |
| DOI: | 10.1016/S0927-0248(00)00132-X |