Accurate measurement of thin film mechanical properties using nanoindentation

For decades, nanoindentation has been used for measuring mechanical properties of films with the widely used assumption that if the indentation depth does not exceed 10% of the film thickness, the substrate influence is negligible. The 10% rule was originally deduced for much thicker metallic films...

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Bibliographic Details
Published in:	Journal of materials research Vol. 37; no. 7; pp. 1373 - 1389
Main Authors:	Zak, S., Trost, C. O. W., Kreiml, P., Cordill, M. J.
Format:	Journal Article
Language:	English
Published:	Cham Springer International Publishing 14.04.2022 Springer Nature B.V
Subjects:	Applied and Technical Physics Biomaterials Chemistry and Materials Science Elastic deformation Elastic limit Film thickness Hardness measurement Inorganic Chemistry Materials Engineering Materials research Materials Science Mechanical properties Modulus of elasticity Nanoindentation Nanotechnology Silicon substrates Thin films Elastic properties Simulation Hardness Nanoindentation Thin film
ISSN:	0884-2914, 2044-5326
Online Access:	Get full text
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