Accurate measurement of thin film mechanical properties using nanoindentation

For decades, nanoindentation has been used for measuring mechanical properties of films with the widely used assumption that if the indentation depth does not exceed 10% of the film thickness, the substrate influence is negligible. The 10% rule was originally deduced for much thicker metallic films...

Celý popis

Uložené v:

Podrobná bibliografia
Vydané v:	Journal of materials research Ročník 37; číslo 7; s. 1373 - 1389
Hlavní autori:	Zak, S., Trost, C. O. W., Kreiml, P., Cordill, M. J.
Médium:	Journal Article
Jazyk:	English
Vydavateľské údaje:	Cham Springer International Publishing 14.04.2022 Springer Nature B.V
Predmet:	Applied and Technical Physics Biomaterials Chemistry and Materials Science Elastic deformation Elastic limit Film thickness Hardness measurement Inorganic Chemistry Materials Engineering Materials research Materials Science Mechanical properties Modulus of elasticity Nanoindentation Nanotechnology Silicon substrates Thin films Elastic properties Simulation Hardness Nanoindentation Thin film
ISSN:	0884-2914, 2044-5326
On-line prístup:	Získať plný text
Tagy:	Pridať tag Žiadne tagy, Buďte prvý, kto otaguje tento záznam!

Abstract	For decades, nanoindentation has been used for measuring mechanical properties of films with the widely used assumption that if the indentation depth does not exceed 10% of the film thickness, the substrate influence is negligible. The 10% rule was originally deduced for much thicker metallic films on steel substrates and involved only the hardness measurement. Thus, the boundaries of usability for measuring thin film elastic modulus may differ. Two known material systems of Mo and MoTa thin films on Si substrates are examined with nanoindentation and numerical modeling to show the limitations in measuring elastic moduli. An assessment of the hardness and elastic modulus as a function of contact depth and accurate modeling of the film/substrate deformation confirms the 10% rule for hardness measurements. For elastic modulus, the indentation depths should be much smaller. Results provide a recommended testing protocol for accurate assessment of thin film elastic modulus using nanoindentation. Graphical abstract
AbstractList	For decades, nanoindentation has been used for measuring mechanical properties of films with the widely used assumption that if the indentation depth does not exceed 10% of the film thickness, the substrate influence is negligible. The 10% rule was originally deduced for much thicker metallic films on steel substrates and involved only the hardness measurement. Thus, the boundaries of usability for measuring thin film elastic modulus may differ. Two known material systems of Mo and MoTa thin films on Si substrates are examined with nanoindentation and numerical modeling to show the limitations in measuring elastic moduli. An assessment of the hardness and elastic modulus as a function of contact depth and accurate modeling of the film/substrate deformation confirms the 10% rule for hardness measurements. For elastic modulus, the indentation depths should be much smaller. Results provide a recommended testing protocol for accurate assessment of thin film elastic modulus using nanoindentation. Graphical abstract For decades, nanoindentation has been used for measuring mechanical properties of films with the widely used assumption that if the indentation depth does not exceed 10% of the film thickness, the substrate influence is negligible. The 10% rule was originally deduced for much thicker metallic films on steel substrates and involved only the hardness measurement. Thus, the boundaries of usability for measuring thin film elastic modulus may differ. Two known material systems of Mo and MoTa thin films on Si substrates are examined with nanoindentation and numerical modeling to show the limitations in measuring elastic moduli. An assessment of the hardness and elastic modulus as a function of contact depth and accurate modeling of the film/substrate deformation confirms the 10% rule for hardness measurements. For elastic modulus, the indentation depths should be much smaller. Results provide a recommended testing protocol for accurate assessment of thin film elastic modulus using nanoindentation.
Author	Zak, S. Trost, C. O. W. Kreiml, P. Cordill, M. J.
Author_xml	– sequence: 1 givenname: S. orcidid: 0000-0003-1329-8072 surname: Zak fullname: Zak, S. email: stanislav.zak@oeaw.ac.at organization: Erich Schmid Institute of Materials Science, Austrian Academy of Sciences – sequence: 2 givenname: C. O. W. orcidid: 0000-0002-7570-688X surname: Trost fullname: Trost, C. O. W. organization: Erich Schmid Institute of Materials Science, Austrian Academy of Sciences – sequence: 3 givenname: P. orcidid: 0000-0002-8337-5267 surname: Kreiml fullname: Kreiml, P. organization: Erich Schmid Institute of Materials Science, Austrian Academy of Sciences – sequence: 4 givenname: M. J. orcidid: 0000-0003-1142-8312 surname: Cordill fullname: Cordill, M. J. organization: Erich Schmid Institute of Materials Science, Austrian Academy of Sciences, Department of Materials Science, Montanuniversität Leoben
BookMark	eNp9kD9PwzAQxS1UJNrCF2CKxBw4O3btjFXFP6mIBWbr4tqtq9QpdjLw7TEECYmh0w33fvfevRmZhC5YQq4p3FIh5F3ilZCqBMZKAMFpSc_IlAHnpajYYkKmoBQvWU35BZmltAegAiSfkpelMUPE3hYHi2mI9mBDX3Su6Hc-FM63h7wwOwzeYFscY3e0sfc2FUPyYVsEDJ0Pm8xg77twSc4dtsle_c45eX-4f1s9levXx-fVcl0azuq-FI5Tg0rVjtcCKVML2wBVAgyXFdsYBDSSOWUkNBIb4xQiNxKBUdaYGqo5uRnv5kAfg0293ndDDNlSMwmKKagWIqvYqDKxSylap4_RHzB-agr6uzY91qZzbfqnNk0zpP5Bxo_P9RF9exqtRjRln7C18S_VCeoLGF2EuA
CitedBy_id	crossref_primary_10_1002_admt_202400383 crossref_primary_10_1016_j_jpowsour_2025_238143 crossref_primary_10_1016_j_elecom_2025_107912 crossref_primary_10_1016_j_cej_2025_165758 crossref_primary_10_1016_j_triboint_2025_110663 crossref_primary_10_1007_s10854_025_15144_9 crossref_primary_10_1016_j_jalmes_2023_100043 crossref_primary_10_3390_ma18143255 crossref_primary_10_1016_j_surfcoat_2023_130096 crossref_primary_10_1016_j_vacuum_2024_113146 crossref_primary_10_1016_j_optmat_2025_117059 crossref_primary_10_1038_s40494_025_01940_3 crossref_primary_10_1155_2023_6676473 crossref_primary_10_1016_j_surfcoat_2023_129733 crossref_primary_10_3390_ma17030592 crossref_primary_10_1002_admi_202400025 crossref_primary_10_1016_j_matdes_2025_114008 crossref_primary_10_1016_j_surfin_2024_104451 crossref_primary_10_1016_j_wear_2025_206152 crossref_primary_10_1016_j_matdes_2025_113873 crossref_primary_10_1016_j_actamat_2023_119078 crossref_primary_10_1016_j_ceramint_2024_11_005 crossref_primary_10_1016_j_jnucmat_2025_156149 crossref_primary_10_1016_j_jmrt_2025_08_162 crossref_primary_10_1021_acsami_5c05434 crossref_primary_10_1063_5_0259851 crossref_primary_10_1016_j_surfcoat_2024_131037 crossref_primary_10_1038_s41598_023_39905_w crossref_primary_10_1016_j_jallcom_2024_174569 crossref_primary_10_1016_j_tsf_2023_139849 crossref_primary_10_1016_j_matdes_2025_113643 crossref_primary_10_1016_j_matdes_2022_111000 crossref_primary_10_1016_j_ceramint_2024_01_181 crossref_primary_10_1016_j_wear_2025_206087 crossref_primary_10_1177_00325899241273503 crossref_primary_10_1016_j_jnucmat_2025_155644 crossref_primary_10_1016_j_matdes_2023_111711 crossref_primary_10_1038_s41598_024_77457_9 crossref_primary_10_1016_j_measurement_2024_115894 crossref_primary_10_1016_j_enganabound_2025_106259 crossref_primary_10_1016_j_mee_2024_112283 crossref_primary_10_1002_adma_202406179 crossref_primary_10_1016_j_tsf_2023_140163 crossref_primary_10_2351_7_0001677 crossref_primary_10_3390_met15010040 crossref_primary_10_1016_j_actamat_2024_119979 crossref_primary_10_3390_ma17194891 crossref_primary_10_1002_jmor_21773 crossref_primary_10_1016_j_tsf_2025_140764 crossref_primary_10_1063_5_0263283 crossref_primary_10_1002_admi_202400644 crossref_primary_10_1016_j_surfcoat_2023_129433 crossref_primary_10_3390_ma16020528 crossref_primary_10_1016_j_polymer_2024_127350 crossref_primary_10_1016_j_nexres_2025_100578 crossref_primary_10_1557_s43578_023_01057_y crossref_primary_10_1016_j_surfin_2023_103181 crossref_primary_10_3390_cryst13030536 crossref_primary_10_1016_j_surfcoat_2025_132535 crossref_primary_10_1007_s11665_023_08590_1 crossref_primary_10_1016_j_euromechsol_2024_105250 crossref_primary_10_1016_j_surfcoat_2025_132160 crossref_primary_10_1002_cssc_202501288 crossref_primary_10_1016_j_ijmecsci_2024_109103 crossref_primary_10_1007_s11340_025_01173_2 crossref_primary_10_1016_j_matchemphys_2025_130956 crossref_primary_10_1016_j_jallcom_2025_180842 crossref_primary_10_1016_j_porgcoat_2023_107491 crossref_primary_10_1007_s11998_024_01019_x crossref_primary_10_1108_ILT_12_2024_0484 crossref_primary_10_3390_ma17030741 crossref_primary_10_1016_j_surfcoat_2024_131690 crossref_primary_10_1016_j_rineng_2024_103447 crossref_primary_10_1002_smll_202406479 crossref_primary_10_1016_j_jmrt_2025_01_135 crossref_primary_10_1088_2053_1591_ad898b crossref_primary_10_1116_6_0003136 crossref_primary_10_1016_j_vacuum_2024_113413 crossref_primary_10_1088_1361_648X_acda08 crossref_primary_10_1016_j_jmapro_2024_10_005 crossref_primary_10_1016_j_jallcom_2025_179937 crossref_primary_10_1109_TMAT_2025_3561740 crossref_primary_10_1016_j_matdes_2025_114437 crossref_primary_10_1111_str_12474 crossref_primary_10_1016_j_matdes_2025_114237 crossref_primary_10_1016_j_mechrescom_2023_104153 crossref_primary_10_1016_j_commatsci_2024_113042 crossref_primary_10_1016_j_chphi_2024_100551
Cites_doi	10.1063/1.1707300 10.1007/s12206-010-0337-0 10.1557/s43578-021-00113-9 10.1016/j.msea.2013.02.037 10.1533/9780857096296.2.353 10.1016/0020-7683(88)90091-1 10.1016/j.surfcoat.2006.08.099 10.1038/srep22670 10.1016/S1359-6454(00)00378-5 10.1557/JMR.1999.0042 10.2320/matertrans.M2012400 10.1016/j.crme.2011.05.003 10.1109/JMEMS.2011.2174415 10.1016/j.mtla.2020.100774 10.1016/j.surfcoat.2004.03.037 10.1016/j.ijplas.2008.12.015 10.1557/JMR.2008.0205 10.1016/j.cam.2009.08.072 10.1016/j.actamat.2006.01.036 10.1177/0021998305059728 10.1016/S0040-6090(03)01071-X 10.1557/JMR.1992.1564 10.1016/j.actamat.2005.11.026 10.2495/CMEM-V6-N4-749-763 10.1007/978-1-4757-5943-3 10.1016/j.scriptamat.2005.02.009 10.1016/j.compstruct.2021.114143 10.1016/0020-7683(88)90039-X 10.1002/adem.202001409 10.2306/scienceasia513-1874.2006.32.411 10.1039/c3sm50279a 10.1016/S1359-6454(01)00328-7 10.1016/j.ijplas.2003.10.007 10.1016/s0022-5096(97)00086-0 10.1007/s40544-018-0245-3 10.1016/S1359-6454(02)00568-2 10.1016/S0921-5093(01)01076-0 10.1063/1.3455461 10.1557/jmr.2009.0144 10.1103/PhysRev.161.756 10.1021/ACS.JCIM.8B00393/SUPPL_FILE/CI8B00393_SI_006.PDF 10.1557/JMR.1990.0123 10.1016/S1359-6454(98)00301-2 10.1007/BF02913433 10.1016/j.scriptamat.2004.05.034 10.1016/0022-5096(90)90038-6 10.1016/0040-6090(87)90382-8 10.1146/annurev.ms.20.080190.002135 10.1016/j.tsf.2019.137452 10.1016/S0022-5096(01)00035-7 10.1016/j.tsf.2015.12.052 10.1107/S1600577514004962 10.1007/s11661-006-9011-7 10.1016/j.tsf.2007.08.131 10.1557/jmr.2009.0136 10.1080/21663831.2017.1331384 10.1016/0020-7225(65)90019-4 10.1016/s0921-5093(97)00176-7 10.1016/j.tsf.2017.09.051 10.1016/0040-6090(94)06357-5 10.1016/S0257-8972(97)00522-7 10.1007/978-0-585-35228-2_1
ContentType	Journal Article
Copyright	The Author(s) 2022 The Author(s) 2022. This work is published under http://creativecommons.org/licenses/by/4.0/ (the “License”). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License.
Copyright_xml	– notice: The Author(s) 2022 – notice: The Author(s) 2022. This work is published under http://creativecommons.org/licenses/by/4.0/ (the “License”). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License.
DBID	C6C AAYXX CITATION 7SR 8BQ 8FD JG9
DOI	10.1557/s43578-022-00541-1
DatabaseName	SpringerOpen Free (Free internet resource, activated by CARLI) CrossRef Engineered Materials Abstracts METADEX Technology Research Database Materials Research Database
DatabaseTitle	CrossRef Materials Research Database Engineered Materials Abstracts Technology Research Database METADEX
DatabaseTitleList	CrossRef Materials Research Database
DeliveryMethod	fulltext_linktorsrc
Discipline	Engineering Physics
EISSN	2044-5326
EndPage	1389
ExternalDocumentID	10_1557_s43578_022_00541_1
GrantInformation_xml	– fundername: Österreichische Akademie der Wissenschaften
GroupedDBID	-E. -~X .DC .FH 0E1 0R~ 2JN 4.4 406 5GY 5VS 74X 74Y 7WY 7~V 8FE 8FG 8UJ 8WZ A6W AAAZR AACDK AACJH AAGFV AAHNG AAIKC AAJBT AAKTX AAMNW AARAB AASML AATNV ABAKF ABBXD ABECU ABEFU ABGDZ ABJNI ABKKG ABMQK ABQTM ABROB ABTEG ABTKH ABTMW ABZCX ACAOD ACBEA ACBEK ACBMC ACDTI ACGFO ACGFS ACHSB ACIHN ACIMK ACIWK ACPIV ACUIJ ACXSD ACZBM ACZOJ ACZUX ADCGK ADFEC AEAQA AEFQL AEMSY AEMTW AENEX AESKC AEYYC AFBBN AFFUJ AFKRA AFLOS AFLVW AFUTZ AGMZJ AGQEE AIGIU AISIE AJPFC AJQAS ALMA_UNASSIGNED_HOLDINGS ALWZO AMTXH AMXSW AMYLF ARABE ATUCA BBLKV BENPR BEZIV BGHMG BGLVJ BMAJL BPHCQ C0O C6C CS3 CZ9 D1I DC4 DOHLZ DPUIP DU5 EBLON EBS F5P FIGPU HG- HST HZ~ I.6 I.9 IH6 IKXTQ IS6 IWAJR I~P J36 J38 J3A JHPGK JKPOH JZLTJ K60 K6~ KB. KC. L98 LLZTM M-V M0C NIKVX NPVJJ NQJWS O9- P2P PQBIZ PQQKQ PROAC PYCCK RAMDC RCA RNS ROL RR0 RSV S0W S6- S6U SJN SJYHP SNE SNPRN SOHCF SOJ SRMVM SSLCW T9M TAE TN5 TWZ UPT UT1 WH7 WQ3 WXU YQT ~02 8FL AAUYE AAYXX ABBRH ABDBE ABFSG ABJCF ABRTQ ABUWG ACSTC AEZWR AFDZB AFFHD AFHIU AFOHR AHPBZ AHWEU AIXLP ATHPR AYFIA CCPQU CITATION DWQXO HCIFZ KOV PDBOC PHGZM PHGZT PQBZA PQGLB 7SR 8BQ 8FD JG9
ID	FETCH-LOGICAL-c429t-5f41ca889f495a1286eb01850c4732dca0ac72f8c70b7abcf8aa4c7a0212bc903
IEDL.DBID	RSV
ISICitedReferencesCount	103
ISICitedReferencesURI	http://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=Summon&SrcAuth=ProQuest&DestLinkType=CitingArticles&DestApp=WOS_CPL&KeyUT=000777242400003&url=https%3A%2F%2Fcvtisr.summon.serialssolutions.com%2F%23%21%2Fsearch%3Fho%3Df%26include.ft.matches%3Dt%26l%3Dnull%26q%3D
ISSN	0884-2914
IngestDate	Wed Sep 17 23:57:09 EDT 2025 Tue Nov 18 21:51:05 EST 2025 Sat Nov 29 05:54:52 EST 2025 Fri Feb 21 02:45:58 EST 2025
IsDoiOpenAccess	true
IsOpenAccess	true
IsPeerReviewed	true
IsScholarly	true
Issue	7
Keywords	Elastic properties Simulation Hardness Nanoindentation Thin film
Language	English
LinkModel	DirectLink
MergedId	FETCHMERGED-LOGICAL-c429t-5f41ca889f495a1286eb01850c4732dca0ac72f8c70b7abcf8aa4c7a0212bc903
Notes	ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 14
ORCID	0000-0002-8337-5267 0000-0003-1329-8072 0000-0002-7570-688X 0000-0003-1142-8312
OpenAccessLink	https://link.springer.com/10.1557/s43578-022-00541-1
PQID	2708280365
PQPubID	626330
PageCount	17
ParticipantIDs	proquest_journals_2708280365 crossref_primary_10_1557_s43578_022_00541_1 crossref_citationtrail_10_1557_s43578_022_00541_1 springer_journals_10_1557_s43578_022_00541_1
PublicationCentury	2000
PublicationDate	2022-04-14
PublicationDateYYYYMMDD	2022-04-14
PublicationDate_xml	– month: 04 year: 2022 text: 2022-04-14 day: 14
PublicationDecade	2020
PublicationPlace	Cham
PublicationPlace_xml	– name: Cham – name: Warrendale
PublicationTitle	Journal of materials research
PublicationTitleAbbrev	Journal of Materials Research
PublicationYear	2022
Publisher	Springer International Publishing Springer Nature B.V
Publisher_xml	– name: Springer International Publishing – name: Springer Nature B.V
References	Nair, Cordill, Farkas, Gerberich (CR26) 2009; 24 Chen, Bull (CR49) 2007; 516 CR37 Korsunsky, McGurk, Bull, Page (CR7) 1998; 99 Chen, Liu, Wang (CR57) 2005; 191 Hawong, Nam, Kim, Kwon, Kwon, Park (CR38) 2010; 24 Guo, Rauchs, Zhang, Ponthot (CR65) 2010; 234 Fischer-Cripps (CR20) 2004 Tymiak, Kramer, Bahr, Wyrobek, Gerberich (CR29) 2001; 49 Nix (CR16) 2014 Oses, Gossett, Hicks, Rose, Mehl, Perim, Takeuchi, Sanvito, Scheffler, Lederer, Levy, Toher, Curtarolo (CR61) 2018; 58 Panich, Wangyao, Chomtohsuwan, Yong (CR51) 2006; 32 Bhattacharya, Nix (CR48) 1988; 24 Nix (CR1) 1989; 20A Boyd, Uttamchandani (CR55) 2012; 21 Saha, Xue, Huang, Nix (CR18) 2001; 49 Bückle, Westbrook, Conrad (CR2) 1973 Syngellakis, Habbab, Mellor (CR46) 2018; 6 Feng, Nix (CR33) 2004; 51 Lofaj, Németh (CR28) 2017; 644 Callister, Rethwisch (CR58) 2010 Saha, Nix (CR13) 2001; 321 Joslin, Oliver (CR14) 1990; 5 Durst, Backes, Göken (CR32) 2005; 52 Sun, Bell, Zheng (CR50) 1995; 258 Bucaille, Stauss, Felder, Michler (CR63) 2003; 51 Durst, Backes, Franke, Göken (CR24) 2006; 54 Siu, Ngan (CR23) 2013; 572 Kreiml, Rausch, Terziyska, Köstenbauer, Winkler, Mitterer, Cordill (CR59) 2020 Shi, Zhao, Huang, Xu, Ren, Bai, Li, Hu (CR45) 2013; 54 Nix (CR15) 1997; A234–236 Yu, Sanday, Rath (CR19) 1990; 38 Gao, Proudhon, Liu (CR47) 2019; 7 Cahoon, Broughton, Kutzak (CR4) 1971; 2 Hall (CR54) 1967; 161 Tabor (CR3) 1951 Chen, Bull (CR11) 2006; 201 Han, Saha, Nix (CR21) 2006; 54 Mindlin (CR36) 1939; 10 Burnett, Rickerby (CR8) 1987; 154 Huang, Pelegri (CR64) 2006; 40 Cordill, Moody, Gerberich (CR22) 2008; 23 Weidner, Biermann (CR40) 2021 Saringer, Tkadletz, Kratzer, Cordill (CR62) 2021 Saha, Nix (CR10) 2002; 50 Abu Al-Rub, Voyiadjis (CR31) 2004; 20 Felder, Roy, Darque-Ceretti (CR52) 2011; 339 Nix, Gao (CR34) 1998; 46 Cordill, Lund, Parker, Leighton, Nair, Farkas, Moody, Gerberich (CR27) 2009; 25 Hofer, Mori, Fian, Winkler, Mitterer (CR60) 2016; 599 Janeliukstis, Chen (CR41) 2021; 271 Kramer, Huang, Kriese, Robach, Nelson, Wright, Bahr, Gerberich (CR30) 1998; 47 Tsui, Pharr (CR9) 1999; 14 Cordill, Hallman, Moody, Adams, Gerberich (CR35) 2007; 38A Oliver, Pharr (CR53) 1992; 7 Leitner, Maier-Kiener, Kiener (CR25) 2017; 5 Niezrecki, Avitabile, Warren, Pingle, Helfrick (CR39) 2010; 1253 Xu, Rowcliffe (CR5) 2004; 447–448 Zhang, Barrett, Cloetens, Detlefs, Sanchez Del Rio (CR56) 2014; 21 Sneddon (CR17) 1965; 3 Li, Vlassak (CR12) 2009; 24 Bhattacharya, Nix (CR43) 1988; 24 Nasto, Ajdari, Lazarus, Vaziri, Reis (CR44) 2013; 9 Zeilinger, Todt, Krywka, Müller, Ecker, Sartory, Meindlhumer, Stefenelli, Daniel, Mitterer, Keckes (CR42) 2016; 6 Bull (CR6) 2019; 688 A Zeilinger (541_CR42) 2016; 6 JL Bucaille (541_CR63) 2003; 51 R Saha (541_CR13) 2001; 321 P Kreiml (541_CR59) 2020 N Panich (541_CR51) 2006; 32 H Li (541_CR12) 2009; 24 541_CR37 WC Guo (541_CR65) 2010; 234 EJ Boyd (541_CR55) 2012; 21 D Kramer (541_CR30) 1998; 47 AK Bhattacharya (541_CR48) 1988; 24 C Saringer (541_CR62) 2021 K Durst (541_CR32) 2005; 52 WD Callister (541_CR58) 2010 DL Joslin (541_CR14) 1990; 5 C Shi (541_CR45) 2013; 54 J Chen (541_CR11) 2006; 201 JR Cahoon (541_CR4) 1971; 2 X Huang (541_CR64) 2006; 40 WD Nix (541_CR1) 1989; 20A SJ Bull (541_CR6) 2019; 688 C Niezrecki (541_CR39) 2010; 1253 S Syngellakis (541_CR46) 2018; 6 C Gao (541_CR47) 2019; 7 ZH Xu (541_CR5) 2004; 447–448 NI Tymiak (541_CR29) 2001; 49 AC Fischer-Cripps (541_CR20) 2004 MJ Cordill (541_CR22) 2008; 23 KW Siu (541_CR23) 2013; 572 HY Yu (541_CR19) 1990; 38 JJ Hall (541_CR54) 1967; 161 A Weidner (541_CR40) 2021 AK Nair (541_CR26) 2009; 24 TY Tsui (541_CR9) 1999; 14 IN Sneddon (541_CR17) 1965; 3 WC Oliver (541_CR53) 1992; 7 H Bückle (541_CR2) 1973 G Feng (541_CR33) 2004; 51 RD Mindlin (541_CR36) 1939; 10 S Chen (541_CR57) 2005; 191 SM Han (541_CR21) 2006; 54 E Felder (541_CR52) 2011; 339 F Lofaj (541_CR28) 2017; 644 WD Nix (541_CR16) 2014 MJ Cordill (541_CR27) 2009; 25 L Zhang (541_CR56) 2014; 21 AK Bhattacharya (541_CR43) 1988; 24 K Durst (541_CR24) 2006; 54 MJ Cordill (541_CR35) 2007; 38A D Tabor (541_CR3) 1951 AM Hofer (541_CR60) 2016; 599 WD Nix (541_CR34) 1998; 46 C Oses (541_CR61) 2018; 58 R Saha (541_CR10) 2002; 50 PJ Burnett (541_CR8) 1987; 154 A Nasto (541_CR44) 2013; 9 RK Abu Al-Rub (541_CR31) 2004; 20 R Janeliukstis (541_CR41) 2021; 271 Y Sun (541_CR50) 1995; 258 JS Hawong (541_CR38) 2010; 24 J Chen (541_CR49) 2007; 516 AM Korsunsky (541_CR7) 1998; 99 A Leitner (541_CR25) 2017; 5 WD Nix (541_CR15) 1997; A234–236 R Saha (541_CR18) 2001; 49
References_xml	– volume: 10 start-page: 222 year: 1939 end-page: 241 ident: CR36 article-title: A review of the photoelastic method of stress analysis. I publication-title: J. Appl. Phys. doi: 10.1063/1.1707300 – volume: 24 start-page: 1279 year: 2010 end-page: 1287 ident: CR38 article-title: A study on the development of photoelastic experimental hybrid method for colour isochromatics (I) publication-title: J. Mech. Sci. Technol. doi: 10.1007/s12206-010-0337-0 – year: 2021 ident: CR62 article-title: Direct determination of the area function for nanoindentation experiments publication-title: J. Mater. Res. doi: 10.1557/s43578-021-00113-9 – year: 1951 ident: CR3 publication-title: Hardness of Metals – volume: 572 start-page: 56 year: 2013 end-page: 64 ident: CR23 article-title: Oscillation-induced softening in copper and molybdenum from nano- to micro-length scales publication-title: Mater. Sci. Eng. A. doi: 10.1016/j.msea.2013.02.037 – start-page: 453 year: 1973 end-page: 494 ident: CR2 article-title: Use of hardness test to determine other material properties publication-title: The Science of Hardness Testing and Its Research Applications – year: 2014 ident: CR16 article-title: Metallic thin films: stresses and mechanical properties publication-title: Met. Film. Electron. Opt. Magn. Appl. Struct. Process. Prop. doi: 10.1533/9780857096296.2.353 – volume: 24 start-page: 1287 year: 1988 end-page: 1298 ident: CR48 article-title: Analysis of elastic and plastic deformation associated with indentation testing of thin films on substrates publication-title: Int. J. Solids Struct. doi: 10.1016/0020-7683(88)90091-1 – volume: 201 start-page: 4289 year: 2006 end-page: 4293 ident: CR11 article-title: On the relationship between plastic zone radius and maximum depth during nanoindentation publication-title: Surf. Coat. Technol. doi: 10.1016/j.surfcoat.2006.08.099 – volume: 6 start-page: 22670 year: 2016 ident: CR42 article-title: In-situ observation of cross-sectional microstructural changes and stress distributions in fracturing TiN thin film during nanoindentation publication-title: Sci. Rep. doi: 10.1038/srep22670 – volume: 49 start-page: 1021 year: 2001 end-page: 1034 ident: CR29 article-title: Plastic strain and strain gradients at very small indentation depths publication-title: Acta Mater. doi: 10.1016/S1359-6454(00)00378-5 – volume: 14 start-page: 292 year: 1999 end-page: 301 ident: CR9 article-title: Substrate effects on nanoindentation mechanical property measurement of soft films on hard substrates publication-title: J. Mater. Res. doi: 10.1557/JMR.1999.0042 – volume: 54 start-page: 958 year: 2013 end-page: 963 ident: CR45 article-title: Effects of indenter tilt on nanoindentation results of fused silica: an investigation by finite element analysis publication-title: Mater. Trans. doi: 10.2320/matertrans.M2012400 – volume: 339 start-page: 443 year: 2011 end-page: 457 ident: CR52 article-title: Characterization of the adhesion of thin film by cross-sectional nanoindentation. Analysis of the substrate edge chipping and the film delamination publication-title: Compt. Rend. Mec. doi: 10.1016/j.crme.2011.05.003 – volume: 21 start-page: 243 year: 2012 end-page: 249 ident: CR55 article-title: Measurement of the anisotropy of Young’s modulus in single-crystal silicon publication-title: J. Microelectromech.l Syst. doi: 10.1109/JMEMS.2011.2174415 – year: 2020 ident: CR59 article-title: Balancing the electro-mechanical and interfacial performance of Mo-based alloy films publication-title: Materialia doi: 10.1016/j.mtla.2020.100774 – volume: 191 start-page: 25 year: 2005 end-page: 32 ident: CR57 article-title: Investigation of the mechanical properties of thin films by nanoindentation, considering the effects of thickness and different coating-substrate combinations publication-title: Surf. Coat. Technol. doi: 10.1016/j.surfcoat.2004.03.037 – volume: 25 start-page: 2045 year: 2009 end-page: 2058 ident: CR27 article-title: The Nano-Jackhammer effect in probing near-surface mechanical properties publication-title: Int. J. Plasticity doi: 10.1016/j.ijplas.2008.12.015 – volume: 23 start-page: 1604 year: 2008 end-page: 1613 ident: CR22 article-title: Effects of dynamic indentation on the mechanical response of materials publication-title: J. Mater. Res. doi: 10.1557/JMR.2008.0205 – volume: 234 start-page: 2183 year: 2010 end-page: 2192 ident: CR65 article-title: Influence of friction in material characterization in microindentation measurement publication-title: J. Comput. Appl. Math. doi: 10.1016/j.cam.2009.08.072 – volume: 54 start-page: 2547 year: 2006 end-page: 2555 ident: CR24 article-title: Indentation size effect in metallic materials: modeling strength from pop-in to macroscopic hardness using geometrically necessary dislocations publication-title: Acta Mater. doi: 10.1016/j.actamat.2006.01.036 – volume: 40 start-page: 1393 year: 2006 end-page: 1407 ident: CR64 article-title: Mechanical characterization of thin film materials with nanoindentation measurements and FE analysis publication-title: J. Compos. Mater. doi: 10.1177/0021998305059728 – volume: 447–448 start-page: 399 year: 2004 end-page: 405 ident: CR5 article-title: Finite element analysis of substrate effects on indentation behaviour of thin films publication-title: Thin Solid Films doi: 10.1016/S0040-6090(03)01071-X – volume: 7 start-page: 1564 year: 1992 end-page: 1583 ident: CR53 article-title: An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments publication-title: J. Mater. Res. doi: 10.1557/JMR.1992.1564 – volume: 54 start-page: 1571 year: 2006 end-page: 1581 ident: CR21 article-title: Determining hardness of thin films in elastically mismatched film-on-substrate systems using nanoindentation publication-title: Acta Mater. doi: 10.1016/j.actamat.2005.11.026 – volume: 6 start-page: 749 year: 2018 end-page: 763 ident: CR46 article-title: Finite element simulation of spherical indentation experiments publication-title: Int. J. Comput. Methods Exp. Meas. doi: 10.2495/CMEM-V6-N4-749-763 – year: 2004 ident: CR20 publication-title: Nanoindentation doi: 10.1007/978-1-4757-5943-3 – volume: 52 start-page: 1093 year: 2005 end-page: 1097 ident: CR32 article-title: Indentation size effect in metallic materials: correcting for the size of the plastic zone publication-title: Scr. Mater. doi: 10.1016/j.scriptamat.2005.02.009 – volume: 271 year: 2021 ident: CR41 article-title: Review of digital image correlation application to large-scale composite structure testing publication-title: Compos. Struct. doi: 10.1016/j.compstruct.2021.114143 – volume: 24 start-page: 881 year: 1988 end-page: 891 ident: CR43 article-title: Finite element simulation of indentation experiments publication-title: Int. J. Solids Struct. doi: 10.1016/0020-7683(88)90039-X – year: 2010 ident: CR58 publication-title: Materials Science and Engineering: An Introduction – year: 2021 ident: CR40 article-title: Review on strain localization phenomena studied by high-resolution digital image correlation publication-title: Adv. Eng. Mater. doi: 10.1002/adem.202001409 – volume: 32 start-page: 411 year: 2006 end-page: 416 ident: CR51 article-title: Finite element analysis of the critical ratio of coating thickness to indentation depth of soft coating on a harder substrate by nanoindentation publication-title: ScienceAsia doi: 10.2306/scienceasia513-1874.2006.32.411 – volume: 9 start-page: 6796 year: 2013 end-page: 6803 ident: CR44 article-title: Localization of deformation in thin shells under indentation publication-title: Soft Matter doi: 10.1039/c3sm50279a – volume: 50 start-page: 23 year: 2002 end-page: 38 ident: CR10 article-title: Effects of the substrate on the determination of thin film mechanical properties by nanoindentation publication-title: Acta Mater. doi: 10.1016/S1359-6454(01)00328-7 – ident: CR37 – volume: 20 start-page: 1139 year: 2004 end-page: 1182 ident: CR31 article-title: Analytical and experimental determination of the material intrinsic length scale of strain gradient plasticity theory from micro- and nano-indentation experiments publication-title: Int. J. Plasticity doi: 10.1016/j.ijplas.2003.10.007 – volume: 46 start-page: 411 year: 1998 end-page: 425 ident: CR34 article-title: Indentation size effects in crystalline materials: a law for strain gradient plasticity publication-title: J. Mech. Phys. Solids doi: 10.1016/s0022-5096(97)00086-0 – volume: 7 start-page: 587 year: 2019 end-page: 602 ident: CR47 article-title: Three-dimensional finite element analysis of shallow indentation of rough strain-hardening surface publication-title: Friction. doi: 10.1007/s40544-018-0245-3 – volume: 51 start-page: 1663 year: 2003 end-page: 1678 ident: CR63 article-title: Determination of plastic properties of metals by instrumented indentation using different sharp indenters publication-title: Acta Mater. doi: 10.1016/S1359-6454(02)00568-2 – volume: 321 start-page: 898 year: 2001 end-page: 901 ident: CR13 article-title: Soft films on hard substrates — nanoindentation of tungsten films on sapphire substrates publication-title: Mater. Sci. Eng. A. doi: 10.1016/S0921-5093(01)01076-0 – volume: 1253 start-page: 219 year: 2010 end-page: 232 ident: CR39 article-title: A review of digital image correlation applied to structural dynamics publication-title: AIP Conf. Proc. doi: 10.1063/1.3455461 – volume: 24 start-page: 1114 year: 2009 end-page: 1126 ident: CR12 article-title: Determining the elastic modulus and hardness of an ultra-thin film on a substrate using nanoindentation publication-title: J. Mater. Res. doi: 10.1557/jmr.2009.0144 – volume: 161 start-page: 756 year: 1967 end-page: 761 ident: CR54 article-title: Electronic effects in the elastic constants of n-type silicon publication-title: Phys. Rev. doi: 10.1103/PhysRev.161.756 – volume: 58 start-page: 2477 year: 2018 end-page: 2490 ident: CR61 article-title: AFLOW-CHULL: cloud-oriented platform for autonomous phase stability analysis publication-title: J. Chem. Inf. Model. doi: 10.1021/ACS.JCIM.8B00393/SUPPL_FILE/CI8B00393_SI_006.PDF – volume: 5 start-page: 123 year: 1990 end-page: 126 ident: CR14 article-title: A new method for analyzing data from continuous depth-sensing microindentation tests publication-title: J. Mater. Res. doi: 10.1557/JMR.1990.0123 – volume: 47 start-page: 333 year: 1998 end-page: 343 ident: CR30 article-title: Yield strength predictions from the plastic zone around nanocontacts publication-title: Acta Mater. doi: 10.1016/S1359-6454(98)00301-2 – volume: 2 start-page: 1979 year: 1971 end-page: 1983 ident: CR4 article-title: The determination of yield strength from hardness measurements publication-title: Metall. Trans. doi: 10.1007/BF02913433 – volume: 51 start-page: 599 year: 2004 end-page: 603 ident: CR33 article-title: Indentation size effect in MgO publication-title: Scr. Mater. doi: 10.1016/j.scriptamat.2004.05.034 – volume: 38 start-page: 745 year: 1990 end-page: 764 ident: CR19 article-title: The effect of substrate on the elastic properties of films determined by the indentation test—axisymmetric Boussinesq problem publication-title: J. Mech. Phys. Solids doi: 10.1016/0022-5096(90)90038-6 – volume: 154 start-page: 403 year: 1987 end-page: 416 ident: CR8 article-title: The relationship between hardness and scratch adhesion publication-title: Thin Solid Films doi: 10.1016/0040-6090(87)90382-8 – volume: 20A start-page: 2217 year: 1989 end-page: 2245 ident: CR1 article-title: Mechanical properties of thin films publication-title: Metall. Trans. A. doi: 10.1146/annurev.ms.20.080190.002135 – volume: 688 year: 2019 ident: CR6 article-title: Microstructure and indentation response of TiN coatings: The effect of measurement method publication-title: Thin Solid Films doi: 10.1016/j.tsf.2019.137452 – volume: 49 start-page: 1997 year: 2001 end-page: 2014 ident: CR18 article-title: Indentation of a soft metal film on a hard substrate: strain gradient hardening effects publication-title: J. Mech. Phys. Solids. doi: 10.1016/S0022-5096(01)00035-7 – volume: 599 start-page: 1 year: 2016 end-page: 6 ident: CR60 article-title: Improvement of oxidation and corrosion resistance of Mo thin films by alloying with Ta publication-title: Thin Solid Films doi: 10.1016/j.tsf.2015.12.052 – volume: 21 start-page: 507 year: 2014 end-page: 517 ident: CR56 article-title: Anisotropic elasticity of silicon and its application to the modelling of X-ray optics publication-title: J. Synchrotron Radiat. doi: 10.1107/S1600577514004962 – volume: 38A start-page: 2154 year: 2007 end-page: 2159 ident: CR35 article-title: Thickness effects on the plasticity of gold films publication-title: Metall. Mater. Trans. A Phys. Metall. Mater. Sci. doi: 10.1007/s11661-006-9011-7 – volume: 516 start-page: 128 year: 2007 end-page: 135 ident: CR49 article-title: Loading rate effects on the fracture behaviour of solar control coatings during nanoindentation publication-title: Thin Solid Films doi: 10.1016/j.tsf.2007.08.131 – volume: 24 start-page: 1135 year: 2009 end-page: 1141 ident: CR26 article-title: Nanoindentation of thin films: simulations and experiments publication-title: J. Mater. Res. doi: 10.1557/jmr.2009.0136 – volume: 5 start-page: 486 year: 2017 end-page: 493 ident: CR25 article-title: Dynamic nanoindentation testing: is there an influence on a material’s hardness? publication-title: Mater. Res. Lett. doi: 10.1080/21663831.2017.1331384 – volume: 3 start-page: 47 year: 1965 end-page: 57 ident: CR17 article-title: The relation between load and penetration in the axisymmetric Boussinesq problem for a punch of arbitrary profile publication-title: Int. J. Eng. Sci. doi: 10.1016/0020-7225(65)90019-4 – volume: A234–236 start-page: 37 year: 1997 end-page: 44 ident: CR15 article-title: Elastic and plastic properties of thin films on substrates: nanoindentation techniques publication-title: Mater. Sci. Eng. A. doi: 10.1016/s0921-5093(97)00176-7 – volume: 644 start-page: 173 year: 2017 end-page: 181 ident: CR28 article-title: The effects of tip sharpness and coating thickness on nanoindentation measurements in hard coatings on softer substrates by FEM publication-title: Thin Solid Films doi: 10.1016/j.tsf.2017.09.051 – volume: 258 start-page: 198 year: 1995 end-page: 204 ident: CR50 article-title: Finite element analysis of the critical ratio of coating thickness to indentation depth for coating property measurements by nanoindentation publication-title: Thin Solid Films doi: 10.1016/0040-6090(94)06357-5 – volume: 99 start-page: 171 year: 1998 end-page: 183 ident: CR7 article-title: On the hardness of coated systems publication-title: Surf. Coatings Technol. doi: 10.1016/S0257-8972(97)00522-7 – volume: 46 start-page: 411 year: 1998 ident: 541_CR34 publication-title: J. Mech. Phys. Solids doi: 10.1016/s0022-5096(97)00086-0 – volume: 5 start-page: 486 year: 2017 ident: 541_CR25 publication-title: Mater. Res. Lett. doi: 10.1080/21663831.2017.1331384 – volume: 7 start-page: 587 year: 2019 ident: 541_CR47 publication-title: Friction. doi: 10.1007/s40544-018-0245-3 – volume: 54 start-page: 2547 year: 2006 ident: 541_CR24 publication-title: Acta Mater. doi: 10.1016/j.actamat.2006.01.036 – volume: 20A start-page: 2217 year: 1989 ident: 541_CR1 publication-title: Metall. Trans. A. doi: 10.1146/annurev.ms.20.080190.002135 – ident: 541_CR37 doi: 10.1007/978-0-585-35228-2_1 – volume: 572 start-page: 56 year: 2013 ident: 541_CR23 publication-title: Mater. Sci. Eng. A. doi: 10.1016/j.msea.2013.02.037 – volume: 38 start-page: 745 year: 1990 ident: 541_CR19 publication-title: J. Mech. Phys. Solids doi: 10.1016/0022-5096(90)90038-6 – volume: 51 start-page: 599 year: 2004 ident: 541_CR33 publication-title: Scr. Mater. doi: 10.1016/j.scriptamat.2004.05.034 – volume: 271 year: 2021 ident: 541_CR41 publication-title: Compos. Struct. doi: 10.1016/j.compstruct.2021.114143 – year: 2021 ident: 541_CR62 publication-title: J. Mater. Res. doi: 10.1557/s43578-021-00113-9 – volume: 24 start-page: 881 year: 1988 ident: 541_CR43 publication-title: Int. J. Solids Struct. doi: 10.1016/0020-7683(88)90039-X – volume-title: Materials Science and Engineering: An Introduction year: 2010 ident: 541_CR58 – start-page: 453 volume-title: The Science of Hardness Testing and Its Research Applications year: 1973 ident: 541_CR2 – volume: 14 start-page: 292 year: 1999 ident: 541_CR9 publication-title: J. Mater. Res. doi: 10.1557/JMR.1999.0042 – volume: 21 start-page: 507 year: 2014 ident: 541_CR56 publication-title: J. Synchrotron Radiat. doi: 10.1107/S1600577514004962 – volume: 6 start-page: 749 year: 2018 ident: 541_CR46 publication-title: Int. J. Comput. Methods Exp. Meas. doi: 10.2495/CMEM-V6-N4-749-763 – volume: 99 start-page: 171 year: 1998 ident: 541_CR7 publication-title: Surf. Coatings Technol. doi: 10.1016/S0257-8972(97)00522-7 – volume: 1253 start-page: 219 year: 2010 ident: 541_CR39 publication-title: AIP Conf. Proc. doi: 10.1063/1.3455461 – volume: 54 start-page: 958 year: 2013 ident: 541_CR45 publication-title: Mater. Trans. doi: 10.2320/matertrans.M2012400 – volume: 688 year: 2019 ident: 541_CR6 publication-title: Thin Solid Films doi: 10.1016/j.tsf.2019.137452 – volume: 24 start-page: 1114 year: 2009 ident: 541_CR12 publication-title: J. Mater. Res. doi: 10.1557/jmr.2009.0144 – volume: 321 start-page: 898 year: 2001 ident: 541_CR13 publication-title: Mater. Sci. Eng. A. doi: 10.1016/S0921-5093(01)01076-0 – volume: 49 start-page: 1021 year: 2001 ident: 541_CR29 publication-title: Acta Mater. doi: 10.1016/S1359-6454(00)00378-5 – volume: 25 start-page: 2045 year: 2009 ident: 541_CR27 publication-title: Int. J. Plasticity doi: 10.1016/j.ijplas.2008.12.015 – volume: 5 start-page: 123 year: 1990 ident: 541_CR14 publication-title: J. Mater. Res. doi: 10.1557/JMR.1990.0123 – volume: 23 start-page: 1604 year: 2008 ident: 541_CR22 publication-title: J. Mater. Res. doi: 10.1557/JMR.2008.0205 – volume: 47 start-page: 333 year: 1998 ident: 541_CR30 publication-title: Acta Mater. doi: 10.1016/S1359-6454(98)00301-2 – volume: 9 start-page: 6796 year: 2013 ident: 541_CR44 publication-title: Soft Matter doi: 10.1039/c3sm50279a – volume: 234 start-page: 2183 year: 2010 ident: 541_CR65 publication-title: J. Comput. Appl. Math. doi: 10.1016/j.cam.2009.08.072 – volume: 50 start-page: 23 year: 2002 ident: 541_CR10 publication-title: Acta Mater. doi: 10.1016/S1359-6454(01)00328-7 – volume-title: Hardness of Metals year: 1951 ident: 541_CR3 – volume: 258 start-page: 198 year: 1995 ident: 541_CR50 publication-title: Thin Solid Films doi: 10.1016/0040-6090(94)06357-5 – volume: 24 start-page: 1287 year: 1988 ident: 541_CR48 publication-title: Int. J. Solids Struct. doi: 10.1016/0020-7683(88)90091-1 – volume: 339 start-page: 443 year: 2011 ident: 541_CR52 publication-title: Compt. Rend. Mec. doi: 10.1016/j.crme.2011.05.003 – volume: 3 start-page: 47 year: 1965 ident: 541_CR17 publication-title: Int. J. Eng. Sci. doi: 10.1016/0020-7225(65)90019-4 – volume: 644 start-page: 173 year: 2017 ident: 541_CR28 publication-title: Thin Solid Films doi: 10.1016/j.tsf.2017.09.051 – volume: A234–236 start-page: 37 year: 1997 ident: 541_CR15 publication-title: Mater. Sci. Eng. A. doi: 10.1016/s0921-5093(97)00176-7 – volume: 447–448 start-page: 399 year: 2004 ident: 541_CR5 publication-title: Thin Solid Films doi: 10.1016/S0040-6090(03)01071-X – volume: 201 start-page: 4289 year: 2006 ident: 541_CR11 publication-title: Surf. Coat. Technol. doi: 10.1016/j.surfcoat.2006.08.099 – volume: 516 start-page: 128 year: 2007 ident: 541_CR49 publication-title: Thin Solid Films doi: 10.1016/j.tsf.2007.08.131 – volume-title: Nanoindentation year: 2004 ident: 541_CR20 doi: 10.1007/978-1-4757-5943-3 – volume: 21 start-page: 243 year: 2012 ident: 541_CR55 publication-title: J. Microelectromech.l Syst. doi: 10.1109/JMEMS.2011.2174415 – volume: 10 start-page: 222 year: 1939 ident: 541_CR36 publication-title: J. Appl. Phys. doi: 10.1063/1.1707300 – volume: 6 start-page: 22670 year: 2016 ident: 541_CR42 publication-title: Sci. Rep. doi: 10.1038/srep22670 – year: 2014 ident: 541_CR16 publication-title: Met. Film. Electron. Opt. Magn. Appl. Struct. Process. Prop. doi: 10.1533/9780857096296.2.353 – volume: 40 start-page: 1393 year: 2006 ident: 541_CR64 publication-title: J. Compos. Mater. doi: 10.1177/0021998305059728 – volume: 54 start-page: 1571 year: 2006 ident: 541_CR21 publication-title: Acta Mater. doi: 10.1016/j.actamat.2005.11.026 – volume: 154 start-page: 403 year: 1987 ident: 541_CR8 publication-title: Thin Solid Films doi: 10.1016/0040-6090(87)90382-8 – volume: 24 start-page: 1279 year: 2010 ident: 541_CR38 publication-title: J. Mech. Sci. Technol. doi: 10.1007/s12206-010-0337-0 – volume: 58 start-page: 2477 year: 2018 ident: 541_CR61 publication-title: J. Chem. Inf. Model. doi: 10.1021/ACS.JCIM.8B00393/SUPPL_FILE/CI8B00393_SI_006.PDF – volume: 32 start-page: 411 year: 2006 ident: 541_CR51 publication-title: ScienceAsia doi: 10.2306/scienceasia513-1874.2006.32.411 – volume: 7 start-page: 1564 year: 1992 ident: 541_CR53 publication-title: J. Mater. Res. doi: 10.1557/JMR.1992.1564 – volume: 599 start-page: 1 year: 2016 ident: 541_CR60 publication-title: Thin Solid Films doi: 10.1016/j.tsf.2015.12.052 – volume: 161 start-page: 756 year: 1967 ident: 541_CR54 publication-title: Phys. Rev. doi: 10.1103/PhysRev.161.756 – volume: 20 start-page: 1139 year: 2004 ident: 541_CR31 publication-title: Int. J. Plasticity doi: 10.1016/j.ijplas.2003.10.007 – year: 2020 ident: 541_CR59 publication-title: Materialia doi: 10.1016/j.mtla.2020.100774 – volume: 49 start-page: 1997 year: 2001 ident: 541_CR18 publication-title: J. Mech. Phys. Solids. doi: 10.1016/S0022-5096(01)00035-7 – volume: 24 start-page: 1135 year: 2009 ident: 541_CR26 publication-title: J. Mater. Res. doi: 10.1557/jmr.2009.0136 – volume: 191 start-page: 25 year: 2005 ident: 541_CR57 publication-title: Surf. Coat. Technol. doi: 10.1016/j.surfcoat.2004.03.037 – volume: 2 start-page: 1979 year: 1971 ident: 541_CR4 publication-title: Metall. Trans. doi: 10.1007/BF02913433 – volume: 51 start-page: 1663 year: 2003 ident: 541_CR63 publication-title: Acta Mater. doi: 10.1016/S1359-6454(02)00568-2 – volume: 52 start-page: 1093 year: 2005 ident: 541_CR32 publication-title: Scr. Mater. doi: 10.1016/j.scriptamat.2005.02.009 – volume: 38A start-page: 2154 year: 2007 ident: 541_CR35 publication-title: Metall. Mater. Trans. A Phys. Metall. Mater. Sci. doi: 10.1007/s11661-006-9011-7 – year: 2021 ident: 541_CR40 publication-title: Adv. Eng. Mater. doi: 10.1002/adem.202001409
SSID	ssj0015074
Score	2.6532474
Snippet	For decades, nanoindentation has been used for measuring mechanical properties of films with the widely used assumption that if the indentation depth does not...
SourceID	proquest crossref springer
SourceType	Aggregation Database Enrichment Source Index Database Publisher
StartPage	1373
SubjectTerms	Applied and Technical Physics Biomaterials Chemistry and Materials Science Elastic deformation Elastic limit Film thickness Hardness measurement Inorganic Chemistry Materials Engineering Materials research Materials Science Mechanical properties Modulus of elasticity Nanoindentation Nanotechnology Silicon substrates Thin films
Title	Accurate measurement of thin film mechanical properties using nanoindentation
URI	https://link.springer.com/article/10.1557/s43578-022-00541-1 https://www.proquest.com/docview/2708280365
Volume	37
WOSCitedRecordID	wos000777242400003&url=https%3A%2F%2Fcvtisr.summon.serialssolutions.com%2F%23%21%2Fsearch%3Fho%3Df%26include.ft.matches%3Dt%26l%3Dnull%26q%3D
hasFullText	1
inHoldings	1
isFullTextHit
isPrint
journalDatabaseRights	– providerCode: PRVPQU databaseName: ABI/INFORM Collection customDbUrl: eissn: 2044-5326 dateEnd: 20241207 omitProxy: false ssIdentifier: ssj0015074 issn: 0884-2914 databaseCode: 7WY dateStart: 20110101 isFulltext: true titleUrlDefault: https://www.proquest.com/abicomplete providerName: ProQuest – providerCode: PRVPQU databaseName: ABI/INFORM Global customDbUrl: eissn: 2044-5326 dateEnd: 20241207 omitProxy: false ssIdentifier: ssj0015074 issn: 0884-2914 databaseCode: M0C dateStart: 20110101 isFulltext: true titleUrlDefault: https://search.proquest.com/abiglobal providerName: ProQuest – providerCode: PRVPQU databaseName: Materials Science Database customDbUrl: eissn: 2044-5326 dateEnd: 20241207 omitProxy: false ssIdentifier: ssj0015074 issn: 0884-2914 databaseCode: KB. dateStart: 20110101 isFulltext: true titleUrlDefault: http://search.proquest.com/materialsscijournals providerName: ProQuest – providerCode: PRVPQU databaseName: ProQuest Central customDbUrl: eissn: 2044-5326 dateEnd: 20241207 omitProxy: false ssIdentifier: ssj0015074 issn: 0884-2914 databaseCode: BENPR dateStart: 20110101 isFulltext: true titleUrlDefault: https://www.proquest.com/central providerName: ProQuest – providerCode: PRVAVX databaseName: SpringerLINK Contemporary 1997-Present customDbUrl: eissn: 2044-5326 dateEnd: 99991231 omitProxy: false ssIdentifier: ssj0015074 issn: 0884-2914 databaseCode: RSV dateStart: 19970101 isFulltext: true titleUrlDefault: https://link.springer.com/search?facet-content-type=%22Journal%22 providerName: Springer Nature
link	http://cvtisr.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1LT8MwDLZ4SnDgjRiPKQduENR26ZIeAQ0hwSbEm1OVeg1M2rpp3fj9OH0wQIAEl0pVEquyk352Yn8B2CcQMm2UMa970nDhG58Hsa1G84yDqh2gzLIJ7y9lq6UeH4OroigsLbPdyyPJ7E-d3dFDYXsqLDELt9nn1s9wOcU8swR3yi7H65v797MD8nBE7jsK7gWuKEplvpfxGY4mPuaXY9EMbc6W__edK7BUeJfsOJ8OqzAVJ2uw-IFzcA3ms5xPTNeheYw4tkwRrDfZKGR9w0YvnYSZTrdHDbYw2NqRDeyu_dDSrzKbK__MEp30LddiXruUbMDdWeP29JwXtytwJAwacd8IF7VSgaEYSRNM1ePIIfR2UMia10btaJSeUSidSOoIjdJaoNSWEz7CwKltwkzST-ItYLESEY2REckSCoWK2ySmhtI3KtK-qIBbKjnEgnrc3oDRDW0IQkoLc6WFpLQwU1roVuDgfcwgJ974tfduabuwWIRp6EnLz0cQ7VfgsLTVpPlnadt_674DC15mbsFdsQszo-E43oM5fB110mEVpuXDUxVmTxqtq2t6uzg5omfTOa1m0_YNvZfh0A
linkProvider	Springer Nature
linkToHtml	http://cvtisr.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1LT8MwDLYQDwEHHgPEYEAO3CBS26VLepwQaIgxIRjTblHqNTBpdGjt-P0kfWyAAAnOSazKTvrZif0Z4NSAkB4gj2jD45oyX_s0iGw1mqcdFIMAeZZN2GvzTkf0-8FdURSWlNnu5ZNk9qfOevSYsD1hlpiF2uxz62e41MQ8S8wglk3ku3_ozd4OjIfDct-RUS9wWVEq872Mz3A09zG_PItmaHO1-b_v3IKNwrskzXw7bMNCFFdg_QPnYAVWspxPTHbgtok4tUwR5GV-UUjGmqTPw5jo4ejFDNjCYGtH8mpv7SeWfpXYXPknEqt4bLkW89qleBcery67Fy1adFegaDAopb5mLiohAm1iJGVgqhGFjkFvBxmvewNUjkLuaYHcCbkKUQulGHJlOeFDDJz6HizG4zjaBxIJFpo1PDSymEAmooERU0fuaxEqn1XBLZUssaAetx0wRtKGIEZpMleaNEqTmdKkW4Wz2ZrXnHjj19m10nayOISJ9Ljl5zMQ7VfhvLTVfPhnaQd_m34Cq63ubVu2rzs3h7DmZaZn1GU1WEwn0-gIlvEtHSaT42yjvgNyFeBV
linkToPdf	http://cvtisr.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwpV1LT8MwDLYQL8GBN2I8c-AGEW2XLulxAiYQMCHxELcodRuYNLppK_x-4rZjgAAJcU5iVXaqz47tzwD7DoRsgjLljUBaLkIb8iilbrTAeqiSCGVRTXh_Kdtt9fAQXX_o4i-q3UcpybKngViasvyon9hyXo8L4YeCSFo4VaKTz-FzF_9MCRoaRPH6zf17HsF5O6L0IwUPIl9UbTPfy_gMTWN_80uKtECe1uL_v3kJFiqvkzXLa7IME2m2AvMfuAhXYKaoBcXhKlw1EV-IQYI9jx8QWc-y_KmTMdvpPrsFahgm-7I-veYPiJaVUQ39I8tM1iMOxrKnKVuDu9bp7fEZr6YucHTYlPPQCh-NUpF1sZNx8NVIY8-huodC1oMEjWdQBlah9GJpYrTKGIHSEFd8jJFXX4fJrJelG8BSJWJ3RsZOllAoVJo4MXWUoVWxCUUN_JHCNVaU5DQZo6spNHFK06XStFOaLpSm_RocvJ_pl4Qcv-7eHtlRVz_nUAeSePscdIc1OBzZbbz8s7TNv23fg9nrk5a-PG9fbMFcUFhecF9sw2Q-eEl3YBpf885wsFvc2TftWuk5
openUrl	ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Accurate+measurement+of+thin+film+mechanical+properties+using+nanoindentation&rft.jtitle=Journal+of+materials+research&rft.au=Zak%2C+S&rft.au=Trost+C+O+W&rft.au=Kreiml%2C+P&rft.au=Cordill%2C+M+J&rft.date=2022-04-14&rft.pub=Springer+Nature+B.V&rft.issn=0884-2914&rft.eissn=2044-5326&rft.volume=37&rft.issue=7&rft.spage=1373&rft.epage=1389&rft_id=info:doi/10.1557%2Fs43578-022-00541-1&rft.externalDBID=HAS_PDF_LINK
thumbnail_l	http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0884-2914&client=summon
thumbnail_m	http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0884-2914&client=summon
thumbnail_s	http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0884-2914&client=summon