Accurate measurement of thin film mechanical properties using nanoindentation
For decades, nanoindentation has been used for measuring mechanical properties of films with the widely used assumption that if the indentation depth does not exceed 10% of the film thickness, the substrate influence is negligible. The 10% rule was originally deduced for much thicker metallic films...
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| Veröffentlicht in: | Journal of materials research Jg. 37; H. 7; S. 1373 - 1389 |
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| Hauptverfasser: | , , , |
| Format: | Journal Article |
| Sprache: | Englisch |
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Cham
Springer International Publishing
14.04.2022
Springer Nature B.V |
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| ISSN: | 0884-2914, 2044-5326 |
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| Abstract | For decades, nanoindentation has been used for measuring mechanical properties of films with the widely used assumption that if the indentation depth does not exceed 10% of the film thickness, the substrate influence is negligible. The 10% rule was originally deduced for much thicker metallic films on steel substrates and involved only the hardness measurement. Thus, the boundaries of usability for measuring thin film elastic modulus may differ. Two known material systems of Mo and MoTa thin films on Si substrates are examined with nanoindentation and numerical modeling to show the limitations in measuring elastic moduli. An assessment of the hardness and elastic modulus as a function of contact depth and accurate modeling of the film/substrate deformation confirms the 10% rule for hardness measurements. For elastic modulus, the indentation depths should be much smaller. Results provide a recommended testing protocol for accurate assessment of thin film elastic modulus using nanoindentation.
Graphical abstract |
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| AbstractList | For decades, nanoindentation has been used for measuring mechanical properties of films with the widely used assumption that if the indentation depth does not exceed 10% of the film thickness, the substrate influence is negligible. The 10% rule was originally deduced for much thicker metallic films on steel substrates and involved only the hardness measurement. Thus, the boundaries of usability for measuring thin film elastic modulus may differ. Two known material systems of Mo and MoTa thin films on Si substrates are examined with nanoindentation and numerical modeling to show the limitations in measuring elastic moduli. An assessment of the hardness and elastic modulus as a function of contact depth and accurate modeling of the film/substrate deformation confirms the 10% rule for hardness measurements. For elastic modulus, the indentation depths should be much smaller. Results provide a recommended testing protocol for accurate assessment of thin film elastic modulus using nanoindentation. For decades, nanoindentation has been used for measuring mechanical properties of films with the widely used assumption that if the indentation depth does not exceed 10% of the film thickness, the substrate influence is negligible. The 10% rule was originally deduced for much thicker metallic films on steel substrates and involved only the hardness measurement. Thus, the boundaries of usability for measuring thin film elastic modulus may differ. Two known material systems of Mo and MoTa thin films on Si substrates are examined with nanoindentation and numerical modeling to show the limitations in measuring elastic moduli. An assessment of the hardness and elastic modulus as a function of contact depth and accurate modeling of the film/substrate deformation confirms the 10% rule for hardness measurements. For elastic modulus, the indentation depths should be much smaller. Results provide a recommended testing protocol for accurate assessment of thin film elastic modulus using nanoindentation. Graphical abstract |
| Author | Zak, S. Trost, C. O. W. Kreiml, P. Cordill, M. J. |
| Author_xml | – sequence: 1 givenname: S. orcidid: 0000-0003-1329-8072 surname: Zak fullname: Zak, S. email: stanislav.zak@oeaw.ac.at organization: Erich Schmid Institute of Materials Science, Austrian Academy of Sciences – sequence: 2 givenname: C. O. W. orcidid: 0000-0002-7570-688X surname: Trost fullname: Trost, C. O. W. organization: Erich Schmid Institute of Materials Science, Austrian Academy of Sciences – sequence: 3 givenname: P. orcidid: 0000-0002-8337-5267 surname: Kreiml fullname: Kreiml, P. organization: Erich Schmid Institute of Materials Science, Austrian Academy of Sciences – sequence: 4 givenname: M. J. orcidid: 0000-0003-1142-8312 surname: Cordill fullname: Cordill, M. J. organization: Erich Schmid Institute of Materials Science, Austrian Academy of Sciences, Department of Materials Science, Montanuniversität Leoben |
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| Keywords | Elastic properties Simulation Hardness Nanoindentation Thin film |
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| Snippet | For decades, nanoindentation has been used for measuring mechanical properties of films with the widely used assumption that if the indentation depth does not... |
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| SubjectTerms | Applied and Technical Physics Biomaterials Chemistry and Materials Science Elastic deformation Elastic limit Film thickness Hardness measurement Inorganic Chemistry Materials Engineering Materials research Materials Science Mechanical properties Modulus of elasticity Nanoindentation Nanotechnology Silicon substrates Thin films |
| Title | Accurate measurement of thin film mechanical properties using nanoindentation |
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