Physics and technology of magnetron sputtering discharges

Magnetron sputtering deposition has become the most widely used technique for deposition of both metallic and compound thin films and is utilized in numerous industrial applications. There has been a continuous development of the magnetron sputtering technology to improve target utilization, increas...

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Bibliographic Details

Published in:	Plasma sources science & technology Vol. 29; no. 11
Main Author:	Gudmundsson, J T
Format:	Journal Article
Language:	English
Published:	IOP Publishing 01.11.2020
Subjects:	dc diode sputtering dc discharge E×B discharge magnetron sputtering discharge physical vapor deposition reactive sputtering sputtering
ISSN:	0963-0252, 1361-6595
Online Access:	Get full text
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