Factors influencing ion energy distributions in pulsed inductively coupled argon plasmas

Pulsed plasmas are important for the fabrication of nanoscale features. Source biasing is generally associated with the control of the ion to radical flux ratio; how the ion energy distribution function varies over a pulse period is also important. In this paper, we experimentally investigate the ef...

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Vydáno v:Journal of physics. D, Applied physics Ročník 53; číslo 33
Hlavní autoři: Chen, Zhiying, Longo, Roberto C, Hummel, Michael, Carruth, Megan, Blakeney, Joel, Ventzek, Peter, Ranjan, Alok
Médium: Journal Article
Jazyk:angličtina
Vydáno: IOP Publishing 12.08.2020
Témata:
fluid plasma simulation
ion energy distribution
pulse transient
pulsed plasma
ISSN:0022-3727, 1361-6463
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Abstract Pulsed plasmas are important for the fabrication of nanoscale features. Source biasing is generally associated with the control of the ion to radical flux ratio; how the ion energy distribution function varies over a pulse period is also important. In this paper, we experimentally investigate the effect of pulse transients (i.e. power on to power off phases) on ion energy distributions during different RF source power duty cycles (99%-20%) in a compact inductively coupled argon plasma with time average RF power of 150 W at a frequency of 13.56 MHz and pressure of 20 mT (2.67 Pa). The ion energy distributions were measured by retarding field energy analyzer. With the decrease of RF power duty cycle, the increase of ion energy and energy spread is observed and ion energy distribution changes from single peaked to bi-modal. The effect of RF power duty cycle on the ion energy transition is discussed. Fluid and test particle simulations are used to illustrate the origin of features in the measured ion energy distributions. Capacitive coupling from the RF induction coils is highlighted as the origin for important features in the ion energy distributions.
AbstractList Pulsed plasmas are important for the fabrication of nanoscale features. Source biasing is generally associated with the control of the ion to radical flux ratio; how the ion energy distribution function varies over a pulse period is also important. In this paper, we experimentally investigate the effect of pulse transients (i.e. power on to power off phases) on ion energy distributions during different RF source power duty cycles (99%-20%) in a compact inductively coupled argon plasma with time average RF power of 150 W at a frequency of 13.56 MHz and pressure of 20 mT (2.67 Pa). The ion energy distributions were measured by retarding field energy analyzer. With the decrease of RF power duty cycle, the increase of ion energy and energy spread is observed and ion energy distribution changes from single peaked to bi-modal. The effect of RF power duty cycle on the ion energy transition is discussed. Fluid and test particle simulations are used to illustrate the origin of features in the measured ion energy distributions. Capacitive coupling from the RF induction coils is highlighted as the origin for important features in the ion energy distributions.
Author Hummel, Michael
Blakeney, Joel
Chen, Zhiying
Longo, Roberto C
Carruth, Megan
Ventzek, Peter
Ranjan, Alok
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  givenname: Zhiying
  surname: Chen
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  organization: Tokyo Electron America , 2400 Grove Blvd., Austin, TX 78741, United States of America
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  givenname: Roberto C
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  surname: Carruth
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  organization: Tokyo Electron America , 2400 Grove Blvd., Austin, TX 78741, United States of America
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  givenname: Alok
  surname: Ranjan
  fullname: Ranjan, Alok
  organization: Tokyo Electron Miyagi Ltd , 1 Techno-Hills, Taiwa-cho, Kurokawa-gun, Miyagi, 9813629, Japan
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Snippet Pulsed plasmas are important for the fabrication of nanoscale features. Source biasing is generally associated with the control of the ion to radical flux...
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SubjectTerms fluid plasma simulation
ion energy distribution
pulse transient
pulsed plasma
Title Factors influencing ion energy distributions in pulsed inductively coupled argon plasmas
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