Chen, Z., Longo, R. C., Hummel, M., Carruth, M., Blakeney, J., Ventzek, P., & Ranjan, A. (2020). Factors influencing ion energy distributions in pulsed inductively coupled argon plasmas. Journal of physics. D, Applied physics, 53(33), . https://doi.org/10.1088/1361-6463/ab8b08
Citácia podle Chicago (17th ed.)Chen, Zhiying, Roberto C. Longo, Michael Hummel, Megan Carruth, Joel Blakeney, Peter Ventzek, a Alok Ranjan. "Factors Influencing Ion Energy Distributions in Pulsed Inductively Coupled Argon Plasmas." Journal of Physics. D, Applied Physics 53, no. 33 (2020). https://doi.org/10.1088/1361-6463/ab8b08.
Citácia podľa MLA (8th ed.)Chen, Zhiying, et al. "Factors Influencing Ion Energy Distributions in Pulsed Inductively Coupled Argon Plasmas." Journal of Physics. D, Applied Physics, vol. 53, no. 33, 2020, https://doi.org/10.1088/1361-6463/ab8b08.