Chen, Z., Longo, R. C., Hummel, M., Carruth, M., Blakeney, J., Ventzek, P., & Ranjan, A. (2020). Factors influencing ion energy distributions in pulsed inductively coupled argon plasmas. Journal of physics. D, Applied physics, 53(33), . https://doi.org/10.1088/1361-6463/ab8b08
Chicago-Zitierstil (17. Ausg.)Chen, Zhiying, Roberto C. Longo, Michael Hummel, Megan Carruth, Joel Blakeney, Peter Ventzek, und Alok Ranjan. "Factors Influencing Ion Energy Distributions in Pulsed Inductively Coupled Argon Plasmas." Journal of Physics. D, Applied Physics 53, no. 33 (2020). https://doi.org/10.1088/1361-6463/ab8b08.
MLA-Zitierstil (9. Ausg.)Chen, Zhiying, et al. "Factors Influencing Ion Energy Distributions in Pulsed Inductively Coupled Argon Plasmas." Journal of Physics. D, Applied Physics, vol. 53, no. 33, 2020, https://doi.org/10.1088/1361-6463/ab8b08.