Chen, Z., Longo, R. C., Hummel, M., Carruth, M., Blakeney, J., Ventzek, P., & Ranjan, A. (2020). Factors influencing ion energy distributions in pulsed inductively coupled argon plasmas. Journal of physics. D, Applied physics, 53(33), . https://doi.org/10.1088/1361-6463/ab8b08
Citace podle Chicago (17th ed.)Chen, Zhiying, Roberto C. Longo, Michael Hummel, Megan Carruth, Joel Blakeney, Peter Ventzek, a Alok Ranjan. "Factors Influencing Ion Energy Distributions in Pulsed Inductively Coupled Argon Plasmas." Journal of Physics. D, Applied Physics 53, no. 33 (2020). https://doi.org/10.1088/1361-6463/ab8b08.
Citace podle MLA (9th ed.)Chen, Zhiying, et al. "Factors Influencing Ion Energy Distributions in Pulsed Inductively Coupled Argon Plasmas." Journal of Physics. D, Applied Physics, vol. 53, no. 33, 2020, https://doi.org/10.1088/1361-6463/ab8b08.