APA (7th ed.) Citation

Chen, Z., Longo, R. C., Hummel, M., Carruth, M., Blakeney, J., Ventzek, P., & Ranjan, A. (2020). Factors influencing ion energy distributions in pulsed inductively coupled argon plasmas. Journal of physics. D, Applied physics, 53(33), . https://doi.org/10.1088/1361-6463/ab8b08

Chicago Style (17th ed.) Citation

Chen, Zhiying, Roberto C. Longo, Michael Hummel, Megan Carruth, Joel Blakeney, Peter Ventzek, and Alok Ranjan. "Factors Influencing Ion Energy Distributions in Pulsed Inductively Coupled Argon Plasmas." Journal of Physics. D, Applied Physics 53, no. 33 (2020). https://doi.org/10.1088/1361-6463/ab8b08.

MLA (9th ed.) Citation

Chen, Zhiying, et al. "Factors Influencing Ion Energy Distributions in Pulsed Inductively Coupled Argon Plasmas." Journal of Physics. D, Applied Physics, vol. 53, no. 33, 2020, https://doi.org/10.1088/1361-6463/ab8b08.