Development of Nonlinear Electromechanical Coupled Macro Model for Electrostatic MEMS Cantilever Beam

The deployment of MicroElectroMechanical System (MEMS) cantilever in the electronic systems is continuously increasing. These devices are usually interfaced with electronic circuits. It is important to build its macro model for rapid system design and simulation. This paper proposes development of a...

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Bibliographic Details
Published in:IEEE access Vol. 7; pp. 140596 - 140605
Main Authors: Singh, Akanksha D., Patrikar, Rajendra M.
Format: Journal Article
Language:English
Published: Piscataway IEEE 2019
The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects:
Cantilever beams
Circuits
Coupling
Electric components
Electric potential
Electrical properties
Electronic circuits
Electronic systems
Electrostatic devices
Electrostatics
Force
Integrated circuit modeling
Integrated circuits
Load distribution (forces)
macro model
Mathematical model
Mechanical properties
Microelectromechanical systems
Micromechanical devices
Optimization
Simulation
Solid modeling
Spring constant
Stress concentration
Structural beams
System dynamics
Systems design
Voltage
ISSN:2169-3536, 2169-3536
Online Access:Get full text
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Summary:The deployment of MicroElectroMechanical System (MEMS) cantilever in the electronic systems is continuously increasing. These devices are usually interfaced with electronic circuits. It is important to build its macro model for rapid system design and simulation. This paper proposes development of an electromechanical coupling macro model of electrostatically actuated MEMS cantilever for straight and curled beam configurations. It consists of linear electrical components and nonlinear dependent sources, which represent mechanical parameters and electromechanical coupling in the system. In order to model device mechanics, analytical formulations are done and calculations are adapted to macro model. A methodology to derive electromechanical coupling as a function of bias voltage is developed. This electrical model is capable of predicting the device characteristic behaviour before the onset of pull-in instability region and estimates pull-in voltage. Such macro model can be easily implemented in any circuit simulation platform and be used to demonstrate the possible advantage of using this scheme for device and system dynamics optimization. To arrive at equivalence, an analytical formulation for spring constant and pull-in voltage of cantilever based on the partial load distribution and curling is derived. It utilizes the methodology based on nonlinear electrostatic pressure approximated by its linearized uniform counterpart and mechanical force-deflection model. An electrical characterization of fabricated MEMS cantilever is done to obtain the experimental value of pull-in voltage. Simulation Program with Integrated Circuit Emphasis (SPICE) simulations results for the developed model is obtained for actual device dimensions and is in good agreement with analytical and experimental results.
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ISSN:2169-3536
2169-3536
DOI:10.1109/ACCESS.2019.2943422