Development of Nonlinear Electromechanical Coupled Macro Model for Electrostatic MEMS Cantilever Beam

The deployment of MicroElectroMechanical System (MEMS) cantilever in the electronic systems is continuously increasing. These devices are usually interfaced with electronic circuits. It is important to build its macro model for rapid system design and simulation. This paper proposes development of a...

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Veröffentlicht in:	IEEE access Jg. 7; S. 140596 - 140605
Hauptverfasser:	Singh, Akanksha D., Patrikar, Rajendra M.
Format:	Journal Article
Sprache:	Englisch
Veröffentlicht:	Piscataway IEEE 2019 The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Schlagworte:	Cantilever beams Circuits Coupling Electric components Electric potential Electrical properties Electronic circuits Electronic systems Electrostatic devices Electrostatics Force Integrated circuit modeling Integrated circuits Load distribution (forces) macro model Mathematical model Mechanical properties Microelectromechanical systems Micromechanical devices Optimization Simulation Solid modeling Spring constant Stress concentration Structural beams System dynamics Systems design Voltage
ISSN:	2169-3536, 2169-3536
Online-Zugang:	Volltext
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