Physical and micro-nano-structure properties of chromium nitride coating deposited by RF sputtering using dynamic glancing angle deposition

The CrN films were grown by rf-magnetron sputtering using a dynamic glancing angle deposition technique. In this technique, the substrate oscillates in front of the sputtering target with an angular amplitude and frequency commanded by a Programmable Logic Controller. The purpose of this paper is to...

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Bibliographic Details
Published in:	Surface & coatings technology Vol. 372; pp. 268 - 277
Main Authors:	Jimenez, M.J.M., Antunes, V., Cucatti, S., Riul, A., Zagonel, L.F., Figueroa, C.A., Wisnivesky, D., Alvarez, F.
Format:	Journal Article
Language:	English
Published:	Lausanne Elsevier B.V 25.08.2019 Elsevier BV
Subjects:	Audio frequencies Chromium nitride Coatings Columnar structure Compressive properties Crystallites Deposition Dynamic glancing angle deposition Hardness Magnetron sputtering Morphology Multi-nano periodic structures Periodic structures Periodic variations Physical properties Programmable logic controllers Residual stress Substrates Thickness Time dependence Titanium carbonitride Multi-nano periodic structures Dynamic glancing angle deposition Hardness Chromium nitride
ISSN:	0257-8972, 1879-3347
Online Access:	Get full text
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