Review of Silicon Photonics Technology and Platform Development
Many breakthroughs in the laboratories often do not bridge the gap between research and commercialization. However, silicon photonics bucked the trend, with industry observers estimating the commercial market to close in on a billion dollars in 2020 <xref ref-type="bibr" rid="ref45...
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| Published in: | Journal of lightwave technology Vol. 39; no. 13; pp. 4374 - 4389 |
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| Main Authors: | , , , , , , , , , , , , |
| Format: | Journal Article |
| Language: | English |
| Published: |
New York
IEEE
01.07.2021
The Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subjects: | |
| ISSN: | 0733-8724, 1558-2213 |
| Online Access: | Get full text |
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| Abstract | Many breakthroughs in the laboratories often do not bridge the gap between research and commercialization. However, silicon photonics bucked the trend, with industry observers estimating the commercial market to close in on a billion dollars in 2020 <xref ref-type="bibr" rid="ref45">[45] . Silicon photonics leverages the billions of dollars and decades of research poured into silicon semiconductor device processing to enable high yield, robust processing, and most of all, low cost. Silicon is also a good optical material, with transparency in the commercially important infrared wavelength bands, and is a suitable platform for large-scale photonic integrated circuits. Silicon photonics is therefore slated to address the world's ever-increasing needs for bandwidth. It is part of an emerging ecosystem which includes designers, foundries, and integrators. In this paper, we review most of the foundries that presently enable silicon photonics integrated circuits fabrication. Some of these are pilot lines of major research institutes, and others are fully commercial pure-play foundries. Since silicon photonics has been commercially active for some years, foundries have released process design kits (PDK) that contain a standard device library. These libraries represent optimized and well-tested photonic elements, whose performance reflects the stability and maturity of the integration platforms. We will document the early works in silicon photonics, as well as its commercial status. We will provide a comprehensive review of the development of silicon photonics and the foundry services which enable the productization, including various efforts to develop and release PDK devices. In this context, we will report the long-standing efforts and contributions that previously IME/A * STAR and now AMF has dedicated to accelerating this journey. |
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| AbstractList | Many breakthroughs in the laboratories often do not bridge the gap between research and commercialization. However, silicon photonics bucked the trend, with industry observers estimating the commercial market to close in on a billion dollars in 2020 [45] . Silicon photonics leverages the billions of dollars and decades of research poured into silicon semiconductor device processing to enable high yield, robust processing, and most of all, low cost. Silicon is also a good optical material, with transparency in the commercially important infrared wavelength bands, and is a suitable platform for large-scale photonic integrated circuits. Silicon photonics is therefore slated to address the world's ever-increasing needs for bandwidth. It is part of an emerging ecosystem which includes designers, foundries, and integrators. In this paper, we review most of the foundries that presently enable silicon photonics integrated circuits fabrication. Some of these are pilot lines of major research institutes, and others are fully commercial pure-play foundries. Since silicon photonics has been commercially active for some years, foundries have released process design kits (PDK) that contain a standard device library. These libraries represent optimized and well-tested photonic elements, whose performance reflects the stability and maturity of the integration platforms. We will document the early works in silicon photonics, as well as its commercial status. We will provide a comprehensive review of the development of silicon photonics and the foundry services which enable the productization, including various efforts to develop and release PDK devices. In this context, we will report the long-standing efforts and contributions that previously IME/A*STAR and now AMF has dedicated to accelerating this journey. Many breakthroughs in the laboratories often do not bridge the gap between research and commercialization. However, silicon photonics bucked the trend, with industry observers estimating the commercial market to close in on a billion dollars in 2020 <xref ref-type="bibr" rid="ref45">[45] . Silicon photonics leverages the billions of dollars and decades of research poured into silicon semiconductor device processing to enable high yield, robust processing, and most of all, low cost. Silicon is also a good optical material, with transparency in the commercially important infrared wavelength bands, and is a suitable platform for large-scale photonic integrated circuits. Silicon photonics is therefore slated to address the world's ever-increasing needs for bandwidth. It is part of an emerging ecosystem which includes designers, foundries, and integrators. In this paper, we review most of the foundries that presently enable silicon photonics integrated circuits fabrication. Some of these are pilot lines of major research institutes, and others are fully commercial pure-play foundries. Since silicon photonics has been commercially active for some years, foundries have released process design kits (PDK) that contain a standard device library. These libraries represent optimized and well-tested photonic elements, whose performance reflects the stability and maturity of the integration platforms. We will document the early works in silicon photonics, as well as its commercial status. We will provide a comprehensive review of the development of silicon photonics and the foundry services which enable the productization, including various efforts to develop and release PDK devices. In this context, we will report the long-standing efforts and contributions that previously IME/A * STAR and now AMF has dedicated to accelerating this journey. |
| Author | Gao, F. Guo, P. Luo, X. Zhang, W. Xie, S. W. Li, C. Li, B. Lo, G.-Q. Luo, L. W. Siew, S. Y. Zheng, H. Y. Song, A. Dong, B. |
| Author_xml | – sequence: 1 givenname: S. Y. orcidid: 0000-0001-5891-6212 surname: Siew fullname: Siew, S. Y. organization: Advanced Micro Foundry Pte Ltd, Singapore, Singapore – sequence: 2 givenname: B. surname: Li fullname: Li, B. organization: Advanced Micro Foundry Pte Ltd, Singapore, Singapore – sequence: 3 givenname: F. surname: Gao fullname: Gao, F. organization: Advanced Micro Foundry Pte Ltd, Singapore, Singapore – sequence: 4 givenname: H. Y. surname: Zheng fullname: Zheng, H. Y. organization: Advanced Micro Foundry Pte Ltd, Singapore, Singapore – sequence: 5 givenname: W. surname: Zhang fullname: Zhang, W. organization: Advanced Micro Foundry Pte Ltd, Singapore, Singapore – sequence: 6 givenname: P. surname: Guo fullname: Guo, P. organization: Advanced Micro Foundry Pte Ltd, Singapore, Singapore – sequence: 7 givenname: S. W. surname: Xie fullname: Xie, S. W. organization: Advanced Micro Foundry Pte Ltd, Singapore, Singapore – sequence: 8 givenname: A. surname: Song fullname: Song, A. organization: Advanced Micro Foundry Pte Ltd, Singapore, Singapore – sequence: 9 givenname: B. surname: Dong fullname: Dong, B. organization: Advanced Micro Foundry Pte Ltd, Singapore, Singapore – sequence: 10 givenname: L. W. surname: Luo fullname: Luo, L. W. organization: Advanced Micro Foundry Pte Ltd, Singapore, Singapore – sequence: 11 givenname: C. surname: Li fullname: Li, C. organization: Advanced Micro Foundry Pte Ltd, Singapore, Singapore – sequence: 12 givenname: X. orcidid: 0000-0002-5531-5689 surname: Luo fullname: Luo, X. email: luox@advmf.com organization: Advanced Micro Foundry Pte Ltd, Singapore, Singapore – sequence: 13 givenname: G.-Q. surname: Lo fullname: Lo, G.-Q. email: logq@advmf.com organization: Advanced Micro Foundry Pte Ltd, Singapore, Singapore |
| BookMark | eNp9kE1Lw0AQhhepYFu9C14CnlNnv5Ldk0j9pmDRel7SZNZuSXfrJq3035tS8eDBwzAMvM-88AxIzwePhJxTGFEK-up5MhsxYHTEIcsY8CPSp1KqlDHKe6QPOeepypk4IYOmWQJQIVTeJ9evuHX4lQSbvLnalcEn00Vog3dlk8ywXPhQh49dUvgqmdZFa0NcJbe4xTqsV-jbU3Jsi7rBs589JO_3d7PxYzp5eXga30zSkmvdppLKvKSsynLLbSUBIbMVZEwooLK7odJKo7Iwn2sEq1BIqivBRDdWa82H5PLwdx3D5wab1izDJvqu0jApBNNZJlWXgkOqjKFpIlqzjm5VxJ2hYPaaTKfJ7DWZH00dkv1BStcWrQu-jYWr_wMvDqBDxN8ezRUIwfk3u8p1Iw |
| CODEN | JLTEDG |
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| ContentType | Journal Article |
| Copyright | Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2021 |
| Copyright_xml | – notice: Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2021 |
| DBID | 97E ESBDL RIA RIE AAYXX CITATION 7SP 7U5 8FD H8D L7M |
| DOI | 10.1109/JLT.2021.3066203 |
| DatabaseName | IEEE Xplore (IEEE) IEEE Xplore Open Access Journals IEEE All-Society Periodicals Package (ASPP) 1998–Present IEEE Electronic Library (IEL) CrossRef Electronics & Communications Abstracts Solid State and Superconductivity Abstracts Technology Research Database Aerospace Database Advanced Technologies Database with Aerospace |
| DatabaseTitle | CrossRef Aerospace Database Solid State and Superconductivity Abstracts Technology Research Database Advanced Technologies Database with Aerospace Electronics & Communications Abstracts |
| DatabaseTitleList | Aerospace Database |
| Database_xml | – sequence: 1 dbid: RIE name: IEEE Electronic Library (IEL) url: https://ieeexplore.ieee.org/ sourceTypes: Publisher |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Applied Sciences Physics |
| EISSN | 1558-2213 |
| EndPage | 4389 |
| ExternalDocumentID | 10_1109_JLT_2021_3066203 9380443 |
| Genre | orig-research |
| GroupedDBID | -~X 0R~ 29K 4.4 5GY 6IK 85S 8SL 97E AAJGR AARMG AASAJ AAWJZ AAWTH ABAZT ABQJQ ABVLG ACBEA ACGFO ACGFS ACIWK AEDJG AENEX AGQYO AHBIQ AKJIK AKQYR ALMA_UNASSIGNED_HOLDINGS ATHME ATWAV AYPRP AZSQR BEFXN BFFAM BGNUA BKEBE BPEOZ CS3 D-I DSZJF DU5 EBS ESBDL HZ~ IFIPE IPLJI JAVBF LAI M43 O9- OCL OFLFD OPJBK P2P RIA RIE RNS ROL ROS TN5 TR6 ZCA 5VS AAYXX AETIX AFFNX AGSQL AI. AIBXA ALLEH CITATION EJD H~9 IBMZZ ICLAB IFJZH VH1 7SP 7U5 8FD H8D L7M |
| ID | FETCH-LOGICAL-c399t-5157c12d67f3fd50e06fd06248015d500d989e8f0bb9e0f8e4519d424d42f9993 |
| IEDL.DBID | RIE |
| ISICitedReferencesCount | 679 |
| ISICitedReferencesURI | http://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=Summon&SrcAuth=ProQuest&DestLinkType=CitingArticles&DestApp=WOS_CPL&KeyUT=000665017300016&url=https%3A%2F%2Fcvtisr.summon.serialssolutions.com%2F%23%21%2Fsearch%3Fho%3Df%26include.ft.matches%3Dt%26l%3Dnull%26q%3D |
| ISSN | 0733-8724 |
| IngestDate | Mon Jun 30 10:15:02 EDT 2025 Tue Nov 18 19:37:54 EST 2025 Sat Nov 29 02:11:31 EST 2025 Wed Aug 27 02:26:23 EDT 2025 |
| IsDoiOpenAccess | true |
| IsOpenAccess | true |
| IsPeerReviewed | true |
| IsScholarly | true |
| Issue | 13 |
| Language | English |
| License | https://creativecommons.org/licenses/by/4.0/legalcode |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-LOGICAL-c399t-5157c12d67f3fd50e06fd06248015d500d989e8f0bb9e0f8e4519d424d42f9993 |
| Notes | ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 14 |
| ORCID | 0000-0001-5891-6212 0000-0002-5531-5689 |
| OpenAccessLink | https://ieeexplore.ieee.org/document/9380443 |
| PQID | 2544296658 |
| PQPubID | 85485 |
| PageCount | 16 |
| ParticipantIDs | crossref_primary_10_1109_JLT_2021_3066203 crossref_citationtrail_10_1109_JLT_2021_3066203 ieee_primary_9380443 proquest_journals_2544296658 |
| PublicationCentury | 2000 |
| PublicationDate | 2021-07-01 |
| PublicationDateYYYYMMDD | 2021-07-01 |
| PublicationDate_xml | – month: 07 year: 2021 text: 2021-07-01 day: 01 |
| PublicationDecade | 2020 |
| PublicationPlace | New York |
| PublicationPlace_xml | – name: New York |
| PublicationTitle | Journal of lightwave technology |
| PublicationTitleAbbrev | JLT |
| PublicationYear | 2021 |
| Publisher | IEEE The Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher_xml | – name: IEEE – name: The Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
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| SSID | ssj0014487 |
| Score | 2.7380428 |
| SecondaryResourceType | review_article |
| Snippet | Many breakthroughs in the laboratories often do not bridge the gap between research and commercialization. However, silicon photonics bucked the trend, with... |
| SourceID | proquest crossref ieee |
| SourceType | Aggregation Database Enrichment Source Index Database Publisher |
| StartPage | 4374 |
| SubjectTerms | Commercialization Foundries Integrated circuits Integrators Libraries optical device fabrication Optical materials Optical waveguides photonic integrated circuits Photonics Research facilities Semiconductor devices Silicon Silicon compounds silicon photonics Transceivers |
| Title | Review of Silicon Photonics Technology and Platform Development |
| URI | https://ieeexplore.ieee.org/document/9380443 https://www.proquest.com/docview/2544296658 |
| Volume | 39 |
| WOSCitedRecordID | wos000665017300016&url=https%3A%2F%2Fcvtisr.summon.serialssolutions.com%2F%23%21%2Fsearch%3Fho%3Df%26include.ft.matches%3Dt%26l%3Dnull%26q%3D |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| journalDatabaseRights | – providerCode: PRVIEE databaseName: IEEE Electronic Library (IEL) customDbUrl: eissn: 1558-2213 dateEnd: 99991231 omitProxy: false ssIdentifier: ssj0014487 issn: 0733-8724 databaseCode: RIE dateStart: 19830101 isFulltext: true titleUrlDefault: https://ieeexplore.ieee.org/ providerName: IEEE |
| link | http://cvtisr.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwlV1RS8MwED62oeCL001xOiUPvgh2y5K0SZ5ExCEiY-CEvZW2SVAYnaydv9-kzaagCD4UWkhKucs13-XuvgO4VBxnUcRJwEZEB4wxGQhKTYDD1Fh4n2oS1c0m-GQi5nM5bcD1thZGa10ln-mBu61i-WqZrd1R2VBSgRmjTWhyzutarW3EwLoZVWk0p9RaOGGbkCSWw8enmXUEyWhAHd35pj2W34Kqnio_fsTV7jJu_--7DmDfo0h0W6v9EBo670DbI0rk7bXowG6V4JkVXbipgwBoadDz28KqP0fT12XpiHEL9HW-jpJcoekiKR2WRd8yio7gZXw_u3sIfPOEILOYowwsTuHZiKiIG2pUiDWOjMIRcXQxoX3GSgqphcFpKjU2QjueGcUIs5exqJEeQytf5voEkAwJC1Mmk4QK60_h1BquSjIj0iiNKCY9GG7kGWeeWdw1uFjElYeBZWw1EDsNxF4DPbjaznivWTX-GNt1Et-O88LuQX-jstibXRE7vjViHbhQnP4-6wz23LvrfNs-tMrVWp_DTvZRvhWri2pFfQLzJMWD |
| linkProvider | IEEE |
| linkToHtml | http://cvtisr.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwlV3dS8MwED_mVPTF-YnzMw--CNalSdomTyLi8GOOgRN8K22T4GB0Yqt_v0mbTkERfCi0kNByl2t-l7v7HcCJjHAWhhHxmE-UxxgTHqdUezhItYH3qSJh3WwiGg7587MYteBsXgujlKqSz9S5va1i-XKWvdujsp6gHDNGF2AxYIz4dbXWPGZgHI2qODqi1Ng4YU1QEove3WBsXEHin1NLeN40yHKbUNVV5cevuNpf-p3_fdk6rDkciS5rxW9AS-Wb0HGYEjmLLTZhuUrxzIotuKjDAGim0eNkahZAjkYvs9JS4xbo64QdJblEo2lSWjSLvuUUbcNT_3p8deO59gleZlBH6RmkEmU-kWGkqZYBVjjUEofEEsYE5hlLwYXiGqepUFhzZZlmJCPMXNrgRroD7XyWq11AIiAsSJlIEsqNR4VTY7oyyTRPwzSkmHSh18gzzhy3uG1xMY0rHwOL2GggthqInQa6cDqf8VrzavwxdstKfD7OCbsLB43KYmd4RWwZ14hx4QK-9_usY1i5GT8M4sHt8H4fVu176uzbA2iXb-_qEJayj3JSvB1Vq-sTZpHIyg |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Review+of+Silicon+Photonics+Technology+and+Platform+Development&rft.jtitle=Journal+of+lightwave+technology&rft.au=Siew%2C+S.+Y.&rft.au=Li%2C+B.&rft.au=Gao%2C+F.&rft.au=Zheng%2C+H.+Y.&rft.date=2021-07-01&rft.pub=IEEE&rft.issn=0733-8724&rft.volume=39&rft.issue=13&rft.spage=4374&rft.epage=4389&rft_id=info:doi/10.1109%2FJLT.2021.3066203&rft.externalDocID=9380443 |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0733-8724&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0733-8724&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0733-8724&client=summon |