Ion energy analysis of a bipolar HiPIMS discharge using a retarding field energy analyser
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| Published in: | Plasma sources science & technology Vol. 31; no. 6 |
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| Main Authors: | , , |
| Format: | Journal Article |
| Language: | English |
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IOP Publishing
01.06.2022
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| ISSN: | 0963-0252, 1361-6595 |
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| Author | Valizadeh, R Bradley, J W Walk, F |
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| Author_xml | – sequence: 1 givenname: F orcidid: 0000-0003-0696-1358 surname: Walk fullname: Walk, F organization: ASTeC, STFC Daresbury Laboratory , Warrington, Cheshire WA4 4AD, United Kingdom – sequence: 2 givenname: R orcidid: 0000-0001-6672-3007 surname: Valizadeh fullname: Valizadeh, R organization: ASTeC, STFC Daresbury Laboratory , Warrington, Cheshire WA4 4AD, United Kingdom – sequence: 3 givenname: J W orcidid: 0000-0002-8833-0180 surname: Bradley fullname: Bradley, J W organization: University of Liverpool Department of Electrical Engineering and Electronics, Brownlow Hill, Liverpool L69 3GJ, United Kingdom |
| BookMark | eNpVkE1LAzEQhoNUsK3ePeYHuDYfm2xylKJ2oaKgHjyF2d1kTVmSkrSH_nt3qQie3uFleIZ5FmgWYrAI3VJyT4lSK8olLaTQYgWtBNJdoPlfNUNzoiUvCBPsCi1y3hFCqWLVHH3VMWAbbOpPGAIMp-wzjg4Dbvw-DpDwxr_VL--487n9htRbfMw-9ONCsgdI3TQ7b4fuP8Wma3TpYMj25jeX6PPp8WO9Kbavz_X6YVu0XKlDwVtZllC2WnVaVJVyknFNHGcAjVCcNbYSQoEVmjvHx99a6hxrGquh1LoDvkR3Z66Pe7OLxzTez4YSM2kxkwMzOTBnLfwHSTVYsA |
| CODEN | PSTEEU |
| CitedBy_id | crossref_primary_10_1016_j_apsusc_2024_160392 crossref_primary_10_1016_j_nme_2025_101877 crossref_primary_10_1063_5_0159292 crossref_primary_10_1088_1361_6595_ad52bf crossref_primary_10_1038_s44160_023_00251_4 crossref_primary_10_1088_1361_6595_ace8b8 crossref_primary_10_1116_6_0004134 crossref_primary_10_1063_5_0250673 crossref_primary_10_1016_j_surfcoat_2025_132117 crossref_primary_10_1088_1361_6595_acbc97 crossref_primary_10_1088_1361_6595_ad3e29 crossref_primary_10_1088_1361_6595_adae31 |
| ContentType | Journal Article |
| Copyright | 2022 The Author(s). Published by IOP Publishing Ltd |
| Copyright_xml | – notice: 2022 The Author(s). Published by IOP Publishing Ltd |
| DBID | O3W TSCCA |
| DOI | 10.1088/1361-6595/ac6a0d |
| DatabaseName | Institute of Physics Open Access Journal Titles IOPscience (Open Access) |
| Database_xml | – sequence: 1 dbid: O3W name: Institute of Physics Open Access Journal Titles url: http://iopscience.iop.org/ sourceTypes: Publisher |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Physics |
| EISSN | 1361-6595 |
| ExternalDocumentID | psstac6a0d |
| GrantInformation_xml | – fundername: STFC Daresbury Laboratory, UK grantid: internal funding – fundername: University of Liverpool grantid: internal funding funderid: https://doi.org/10.13039/501100000836 – fundername: ASTeC Group, STFC Daresbury Laboratory, UK grantid: internal funding |
| GroupedDBID | -~X 123 1JI 4.4 5B3 5PX 5VS 5ZH 7.M 7.Q AAGCD AAJIO AAJKP AATNI ABHWH ABJNI ABQJV ABVAM ACAFW ACGFO ACGFS ACHIP AEFHF AENEX AFYNE AKPSB ALMA_UNASSIGNED_HOLDINGS AOAED ASPBG ATQHT AVWKF AZFZN CBCFC CEBXE CJUJL CRLBU CS3 DU5 EBS EDWGO EMSAF EPQRW EQZZN HAK IHE IJHAN IOP IZVLO KOT LAP M45 N5L N9A O3W P2P PJBAE RIN RNS RO9 ROL RPA SY9 TSCCA UCJ W28 XPP ZMT |
| ID | FETCH-LOGICAL-c388t-3c644a4c98d95778f62390f32aab5832be7558ae593ff3ac6c1ff2bbe9a499da3 |
| IEDL.DBID | O3W |
| ISICitedReferencesCount | 13 |
| ISICitedReferencesURI | http://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=Summon&SrcAuth=ProQuest&DestLinkType=CitingArticles&DestApp=WOS_CPL&KeyUT=000807182100001&url=https%3A%2F%2Fcvtisr.summon.serialssolutions.com%2F%23%21%2Fsearch%3Fho%3Df%26include.ft.matches%3Dt%26l%3Dnull%26q%3D |
| ISSN | 0963-0252 |
| IngestDate | Wed Aug 21 03:35:00 EDT 2024 |
| IsDoiOpenAccess | true |
| IsOpenAccess | true |
| IsPeerReviewed | true |
| IsScholarly | true |
| Issue | 6 |
| Language | English |
| License | Original content from this work may be used under the terms of the Creative Commons Attribution 4.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI. |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-LOGICAL-c388t-3c644a4c98d95778f62390f32aab5832be7558ae593ff3ac6c1ff2bbe9a499da3 |
| Notes | PSST-105056.R1 |
| ORCID | 0000-0003-0696-1358 0000-0001-6672-3007 0000-0002-8833-0180 |
| OpenAccessLink | https://iopscience.iop.org/article/10.1088/1361-6595/ac6a0d |
| PageCount | 9 |
| ParticipantIDs | iop_journals_10_1088_1361_6595_ac6a0d |
| PublicationCentury | 2000 |
| PublicationDate | 20220601 |
| PublicationDateYYYYMMDD | 2022-06-01 |
| PublicationDate_xml | – month: 6 year: 2022 text: 20220601 day: 01 |
| PublicationDecade | 2020 |
| PublicationTitle | Plasma sources science & technology |
| PublicationTitleAbbrev | PSST |
| PublicationTitleAlternate | Plasma Sources Sci. Technol |
| PublicationYear | 2022 |
| Publisher | IOP Publishing |
| Publisher_xml | – name: IOP Publishing |
| SSID | ssj0011827 |
| Score | 2.4217293 |
| SourceID | iop |
| SourceType | Publisher |
| SubjectTerms | bipolar pulsing HiPIMS ion energy analyser ion energy distribution function RFEA |
| Title | Ion energy analysis of a bipolar HiPIMS discharge using a retarding field energy analyser |
| URI | https://iopscience.iop.org/article/10.1088/1361-6595/ac6a0d |
| Volume | 31 |
| WOSCitedRecordID | wos000807182100001&url=https%3A%2F%2Fcvtisr.summon.serialssolutions.com%2F%23%21%2Fsearch%3Fho%3Df%26include.ft.matches%3Dt%26l%3Dnull%26q%3D |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://cvtisr.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwpV09T8MwED2VAhIL34hveYAxNIljxxYTQlTtQKkEiDJFF8euuiRVWvj92E5UgcSAxJbh5DjPse_se-8McMUTqVmM7sSdmSBRtAhknGKQ6CJFLnikw-ayiXQ0EpOJHHfgdqWFqebt0n9jH5tCwQ2ELSFO9CLKo8CVweuh4hgWa7BOBePuJ3-ib6sUgg2cvVZa-kQli9sc5W8tWL9iX_bNr_R3_tWjXdhuw0ly15juQUeX-7DpaZ1qcQDvw6ok2sv7CLblR0hlCJJ8NnebWjKYjYePz8SJc13NJE0cEX5qDRwPsXaOjXiS289WdH0Ir_2Hl_tB0F6mECgqxDKgykY-mCgpCsnSVBgb98jQ0BgxZ3Za5zplTKBmkhpD7XeoyJg4z7VEuykqkB5Bt6xKfQwEURhmPX9ozROMcyGFpjKiyJniYc5O4NoilbWTYZH5PLcQmYMpczBlDUynf7Q7g63YiQ782cc5dJf1h76ADfW5nC3qSz_qXzdirSA |
| linkProvider | IOP Publishing |
| linkToPdf | http://cvtisr.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwpV07T8MwED5BeYiFN-KNBxhDkzhO7BEBVSugVAIETNHFsVGXpEoLvx_bsRBIDEhsGU6O8yn2ffbddwdwmiZCsRjtjTvTQSJpGYg4wyBRZYYpTyMVts0msuGQv7yIke9z6rQw9cRv_efmsS0U3ELoE-J4N6JpFNgyeF2UKYZld1LqeVhglFHbu-GePn-FEQx5dnpp4YKVLPZxyt9GMb7FvPCbb-mt_XtW67DqaSW5aM03YE5Vm7Dk0jvldAteB3VFlJP5EfRlSEitCZJiPLGHW9IfjwZ3D8SKdG3tJEVsQvybMbD5iI11cMQlu_0cRTXb8NS7frzsB76pQiAp57OASsOAMJGCl4JlGdeG_4hQ0xixYGZ5FypjjKNigmpNzbfISOu4KJRAczgqke5Ap6ortQsEkWtmGEBozBOMCy64oiKimDKZhgXbgzODVu4XxTR38W7OcwtVbqHKW6j2_2h3Asujq15-OxjeHMBKbHUI7jrkEDqz5l0dwaL8mI2nzbH7CT4BQZayfw |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Ion+energy+analysis+of+a+bipolar+HiPIMS+discharge+using+a+retarding+field+energy+analyser&rft.jtitle=Plasma+sources+science+%26+technology&rft.au=Walk%2C+F&rft.au=Valizadeh%2C+R&rft.au=Bradley%2C+J+W&rft.date=2022-06-01&rft.pub=IOP+Publishing&rft.issn=0963-0252&rft.eissn=1361-6595&rft.volume=31&rft.issue=6&rft_id=info:doi/10.1088%2F1361-6595%2Fac6a0d&rft.externalDocID=psstac6a0d |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0963-0252&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0963-0252&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0963-0252&client=summon |