Ion energy analysis of a bipolar HiPIMS discharge using a retarding field energy analyser

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Bibliographic Details
Published in:Plasma sources science & technology Vol. 31; no. 6
Main Authors: Walk, F, Valizadeh, R, Bradley, J W
Format: Journal Article
Language:English
Published: IOP Publishing 01.06.2022
Subjects:
bipolar pulsing
HiPIMS
ion energy analyser
ion energy distribution function
RFEA
ISSN:0963-0252, 1361-6595
Online Access:Get full text
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Description
Bibliography:PSST-105056.R1
ISSN:0963-0252
1361-6595
DOI:10.1088/1361-6595/ac6a0d