Influence of plasma ionization on the elastic modulus and tribology behavior of carbon films deposited by the HiPIMS technique

This work reveals the influence of discharge current on carbon-ion energies of plasma, elastic modulus, and friction coefficient at the nano- and macroscale of carbon films deposited via high-power impulse magnetron sputtering. Three applied discharge current conditions in deposition processes were...

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Bibliographic Details

Published in:	Ceramics international Vol. 49; no. 2; pp. 2427 - 2439
Main Authors:	Rivera-Tello, César D., Flores-Ruiz, Francisco J., Flores-Jiménez, M., Flores, M.
Format:	Journal Article
Language:	English
Published:	Elsevier Ltd 15.01.2023
Subjects:	Bonding structure Carbon-ion-energies Elastic modulus Ion-energy-distribution-function Tribology Elastic modulus Carbon-ion-energies Ion-energy-distribution-function Bonding structure Tribology
ISSN:	0272-8842, 1873-3956
Online Access:	Get full text
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