WaferSegClassNet - A light-weight network for classification and segmentation of semiconductor wafer defects

As the integration density and design intricacy of semiconductor wafers increase, the magnitude and complexity of defects in them are also on the rise. Since the manual inspection of wafer defects is costly, an automated artificial intelligence (AI) based computer-vision approach is highly desired....

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Bibliographic Details

Published in:	Computers in industry Vol. 142; p. 103720
Main Authors:	Nag, Subhrajit, Makwana, Dhruv, R, Sai Chandra Teja, Mittal, Sparsh, Mohan, C.Krishna
Format:	Journal Article
Language:	English
Published:	Elsevier B.V 01.11.2022
Subjects:	Convolution neural network Encoder-decoder architecture Image classification Image Segmentation Semiconductor wafer defect analysis Semiconductor wafer defect analysis Encoder-decoder architecture Convolution neural network Image Segmentation Image classification
ISSN:	0166-3615, 1872-6194
Online Access:	Get full text
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