WaferSegClassNet - A light-weight network for classification and segmentation of semiconductor wafer defects

As the integration density and design intricacy of semiconductor wafers increase, the magnitude and complexity of defects in them are also on the rise. Since the manual inspection of wafer defects is costly, an automated artificial intelligence (AI) based computer-vision approach is highly desired....

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Vydáno v:	Computers in industry Ročník 142; s. 103720
Hlavní autoři:	Nag, Subhrajit, Makwana, Dhruv, R, Sai Chandra Teja, Mittal, Sparsh, Mohan, C.Krishna
Médium:	Journal Article
Jazyk:	angličtina
Vydáno:	Elsevier B.V 01.11.2022
Témata:	Convolution neural network Encoder-decoder architecture Image classification Image Segmentation Semiconductor wafer defect analysis Semiconductor wafer defect analysis Encoder-decoder architecture Convolution neural network Image Segmentation Image classification
ISSN:	0166-3615, 1872-6194
On-line přístup:	Získat plný text
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