Fabrication and characterization of nickel thin film as resistance temperature detector

In practical applications, thin film resistance temperature detectors (RTD) are often used in the environments that the attached substrates cannot stand high temperature. Therefore, it is necessary to prepare thin film RTDs by a low temperature process. In this study, the fabrication of nickel (Ni)...

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Vydané v:	Vacuum Ročník 176; s. 109288
Hlavní autori:	Cui, Jinting, Liu, Hao, Li, Xingliang, Jiang, Shuwen, Zhang, Bin, Song, Ying, Zhang, Wanli
Médium:	Journal Article
Jazyk:	English
Vydavateľské údaje:	Elsevier Ltd 01.06.2020
Predmet:	Ni film RTD Room temperature preparation TCR value Temperature sensor Temperature sensor TCR value Ni film RTD Room temperature preparation
ISSN:	0042-207X, 1879-2715
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