Fabrication and characterization of nickel thin film as resistance temperature detector

In practical applications, thin film resistance temperature detectors (RTD) are often used in the environments that the attached substrates cannot stand high temperature. Therefore, it is necessary to prepare thin film RTDs by a low temperature process. In this study, the fabrication of nickel (Ni)...

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Veröffentlicht in:	Vacuum Jg. 176; S. 109288
Hauptverfasser:	Cui, Jinting, Liu, Hao, Li, Xingliang, Jiang, Shuwen, Zhang, Bin, Song, Ying, Zhang, Wanli
Format:	Journal Article
Sprache:	Englisch
Veröffentlicht:	Elsevier Ltd 01.06.2020
Schlagworte:	Ni film RTD Room temperature preparation TCR value Temperature sensor Temperature sensor TCR value Ni film RTD Room temperature preparation
ISSN:	0042-207X, 1879-2715
Online-Zugang:	Volltext
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