Fabrication and characterization of nickel thin film as resistance temperature detector

In practical applications, thin film resistance temperature detectors (RTD) are often used in the environments that the attached substrates cannot stand high temperature. Therefore, it is necessary to prepare thin film RTDs by a low temperature process. In this study, the fabrication of nickel (Ni)...

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Bibliographic Details

Published in:	Vacuum Vol. 176; p. 109288
Main Authors:	Cui, Jinting, Liu, Hao, Li, Xingliang, Jiang, Shuwen, Zhang, Bin, Song, Ying, Zhang, Wanli
Format:	Journal Article
Language:	English
Published:	Elsevier Ltd 01.06.2020
Subjects:	Ni film RTD Room temperature preparation TCR value Temperature sensor Temperature sensor TCR value Ni film RTD Room temperature preparation
ISSN:	0042-207X, 1879-2715
Online Access:	Get full text
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