Tuning size and coverage of Pd nanoparticles using atomic layer deposition

[Display omitted] •Synchrotron-based in situ GISAXS and XRF are applied during Pd plasma-enhanced ALD.•The nucleation and the evolution in Pd nanoparticle morphology is investigated.•Pre-pulses with trimethylaluminum enhance the initial coverage of Pd nanoparticles.•The role of extra O2 plasma pulse...

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Bibliographic Details

Published in:	Applied surface science Vol. 539; p. 148238
Main Authors:	Feng, Ji-Yu, Ramachandran, Ranjith K., Solano, Eduardo, Minjauw, Matthias M., Van Daele, Michiel, Vantomme, André, Hermida-Merino, Daniel, Coati, Alessandro, Poelman, Hilde, Detavernier, Christophe, Dendooven, Jolien
Format:	Journal Article
Language:	English
Published:	Elsevier B.V 15.02.2021
Subjects:	Atomic layer deposition Palladium Particle morphology Supported metal nanoparticles Well-designed catalysts Well-designed catalysts Palladium Atomic layer deposition Particle morphology Supported metal nanoparticles
ISSN:	0169-4332, 1873-5584
Online Access:	Get full text
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