Tuning size and coverage of Pd nanoparticles using atomic layer deposition
[Display omitted] •Synchrotron-based in situ GISAXS and XRF are applied during Pd plasma-enhanced ALD.•The nucleation and the evolution in Pd nanoparticle morphology is investigated.•Pre-pulses with trimethylaluminum enhance the initial coverage of Pd nanoparticles.•The role of extra O2 plasma pulse...
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| Vydané v: | Applied surface science Ročník 539; s. 148238 |
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| Hlavní autori: | , , , , , , , , , , |
| Médium: | Journal Article |
| Jazyk: | English |
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Elsevier B.V
15.02.2021
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| ISSN: | 0169-4332, 1873-5584 |
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| Abstract | [Display omitted]
•Synchrotron-based in situ GISAXS and XRF are applied during Pd plasma-enhanced ALD.•The nucleation and the evolution in Pd nanoparticle morphology is investigated.•Pre-pulses with trimethylaluminum enhance the initial coverage of Pd nanoparticles.•The role of extra O2 plasma pulse, with H2 plasma as co-reactant, is investigated.•Precise control of the Pd nanoparticle dimensions and coverage is achieved.
The morphology evolution of supported palladium nanoparticles (Pd NPs) during plasma-enhanced atomic layer deposition using palladium hexafluoroacetylacetonate (Pd(hfac)2) as precursor was investigated using in situ and ex situ X-ray fluorescence (XRF) and grazing incidence small angle X-ray scattering (GISAXS), as well as ex situ scanning electron microscopy (SEM). The initial areal density of Pd NPs increases through adding cycles of the three-step process using Pd(hfac)2, H2 plasma and trimethylaluminum (TMA) prior to the standard Pd(hfac)2 + H2 plasma process. The participation of an O2 plasma exposure as additional co-reactant before or after the H2 plasma step also plays a role in the nucleation density and particle coalescence, affecting also the shape of the deposited particles. Based on the gathered knowledge, a synthetic approach that enables precise control of the Pd nanoparticle dimensions and coverage is developed. |
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| AbstractList | [Display omitted]
•Synchrotron-based in situ GISAXS and XRF are applied during Pd plasma-enhanced ALD.•The nucleation and the evolution in Pd nanoparticle morphology is investigated.•Pre-pulses with trimethylaluminum enhance the initial coverage of Pd nanoparticles.•The role of extra O2 plasma pulse, with H2 plasma as co-reactant, is investigated.•Precise control of the Pd nanoparticle dimensions and coverage is achieved.
The morphology evolution of supported palladium nanoparticles (Pd NPs) during plasma-enhanced atomic layer deposition using palladium hexafluoroacetylacetonate (Pd(hfac)2) as precursor was investigated using in situ and ex situ X-ray fluorescence (XRF) and grazing incidence small angle X-ray scattering (GISAXS), as well as ex situ scanning electron microscopy (SEM). The initial areal density of Pd NPs increases through adding cycles of the three-step process using Pd(hfac)2, H2 plasma and trimethylaluminum (TMA) prior to the standard Pd(hfac)2 + H2 plasma process. The participation of an O2 plasma exposure as additional co-reactant before or after the H2 plasma step also plays a role in the nucleation density and particle coalescence, affecting also the shape of the deposited particles. Based on the gathered knowledge, a synthetic approach that enables precise control of the Pd nanoparticle dimensions and coverage is developed. |
| ArticleNumber | 148238 |
| Author | Hermida-Merino, Daniel Detavernier, Christophe Ramachandran, Ranjith K. Solano, Eduardo Minjauw, Matthias M. Van Daele, Michiel Coati, Alessandro Vantomme, André Feng, Ji-Yu Poelman, Hilde Dendooven, Jolien |
| Author_xml | – sequence: 1 givenname: Ji-Yu surname: Feng fullname: Feng, Ji-Yu organization: Department of Solid State Sciences, COCOON Group, Ghent University, Krijgslaan 281, B-9000 Ghent, Belgium – sequence: 2 givenname: Ranjith K. surname: Ramachandran fullname: Ramachandran, Ranjith K. organization: Department of Solid State Sciences, COCOON Group, Ghent University, Krijgslaan 281, B-9000 Ghent, Belgium – sequence: 3 givenname: Eduardo surname: Solano fullname: Solano, Eduardo organization: Department of Solid State Sciences, COCOON Group, Ghent University, Krijgslaan 281, B-9000 Ghent, Belgium – sequence: 4 givenname: Matthias M. surname: Minjauw fullname: Minjauw, Matthias M. organization: Department of Solid State Sciences, COCOON Group, Ghent University, Krijgslaan 281, B-9000 Ghent, Belgium – sequence: 5 givenname: Michiel surname: Van Daele fullname: Van Daele, Michiel organization: Department of Solid State Sciences, COCOON Group, Ghent University, Krijgslaan 281, B-9000 Ghent, Belgium – sequence: 6 givenname: André surname: Vantomme fullname: Vantomme, André organization: Quantum Solid State Physics, KU Leuven, Celestijnenlaan 200D, B-3001 Leuven, Belgium – sequence: 7 givenname: Daniel surname: Hermida-Merino fullname: Hermida-Merino, Daniel organization: ESRF European Synchrotron, DUBBLE Beamline BM26, Avenue des Martyrs, CS40220, 38043 Grenoble, France – sequence: 8 givenname: Alessandro surname: Coati fullname: Coati, Alessandro organization: Synchrotron SOLEIL, SixS Beamline, L’Orme des Merisiers, Saint-Aubin, BP48, 91192 Gif-sur-Yvette, France – sequence: 9 givenname: Hilde surname: Poelman fullname: Poelman, Hilde organization: LCT Laboratory for Chemical Technology, Ghent University, Technologiepark 125, B-9052 Ghent, Belgium – sequence: 10 givenname: Christophe surname: Detavernier fullname: Detavernier, Christophe organization: Department of Solid State Sciences, COCOON Group, Ghent University, Krijgslaan 281, B-9000 Ghent, Belgium – sequence: 11 givenname: Jolien surname: Dendooven fullname: Dendooven, Jolien email: Jolien.Dendooven@UGent.be organization: Department of Solid State Sciences, COCOON Group, Ghent University, Krijgslaan 281, B-9000 Ghent, Belgium |
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| CitedBy_id | crossref_primary_10_1016_j_carbon_2024_119658 crossref_primary_10_1016_j_envpol_2021_117990 crossref_primary_10_1080_10408436_2023_2273463 crossref_primary_10_1039_D5CY00498E |
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| Keywords | Well-designed catalysts Palladium Atomic layer deposition Particle morphology Supported metal nanoparticles |
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| SubjectTerms | Atomic layer deposition Palladium Particle morphology Supported metal nanoparticles Well-designed catalysts |
| Title | Tuning size and coverage of Pd nanoparticles using atomic layer deposition |
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