Cone-beam CT reconstruction for planar object

All traditional CT reconstruction algorithms define the reconstruction slices as perpendicular to the axis of rotation. This leads to a significant inefficiency when reconstructing and visualizing multilayered planar objects such as stacked IC and MEMS devices. This paper reports an alternative solu...

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Bibliographic Details
Published in:NDT & E international : independent nondestructive testing and evaluation Vol. 45; no. 1; pp. 9 - 15
Main Author: Liu, Tong
Format: Journal Article
Language:English
Published: Kidlington Elsevier Ltd 2012
Elsevier
Subjects:
ISSN:0963-8695, 1879-1174
Online Access:Get full text
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