Computational fluid dynamics modeling of spatial atomic layer deposition on microgroove substrates

•The effect of microgroove structure on the fluid dynamics and film conformality in spatial atomic layer deposition is investigated.•Microgroove structure hinders the precursor inflow and purging gas outflow, leading to non-uniformity of precursor distribution.•Both growth per cycle and film conform...

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Vydané v:	International journal of heat and mass transfer Ročník 181; s. 121854
Hlavní autori:	Li, Zoushuang, Cao, Kun, Li, Xiaobo, Chen, Rong
Médium:	Journal Article
Jazyk:	English
Vydavateľské údaje:	Oxford Elsevier Ltd 01.12.2021 Elsevier BV
Predmet:	Atmospheric models Atomic layer epitaxy Boundary conditions Carrier gases Chemical reactions Computational fluid dynamics Dynamic mesh method Film conformality Film growth Flow velocity Fluid dynamics Fluid flow Gas flow Mass transfer Microgroove structures Microstructure Nonuniformity Photovoltaic cells Precursors Purging Reaction kinetics Slip flow Spatial ALD Substrates Thin films Two dimensional models Film conformality Dynamic mesh method Microgroove structures Computational fluid dynamics Spatial ALD
ISSN:	0017-9310, 1879-2189
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