Li, Z., Cao, K., Li, X., & Chen, R. (2021). Computational fluid dynamics modeling of spatial atomic layer deposition on microgroove substrates. International journal of heat and mass transfer, 181, 121854. https://doi.org/10.1016/j.ijheatmasstransfer.2021.121854
Chicago Style (17th ed.) CitationLi, Zoushuang, Kun Cao, Xiaobo Li, and Rong Chen. "Computational Fluid Dynamics Modeling of Spatial Atomic Layer Deposition on Microgroove Substrates." International Journal of Heat and Mass Transfer 181 (2021): 121854. https://doi.org/10.1016/j.ijheatmasstransfer.2021.121854.
MLA (9th ed.) CitationLi, Zoushuang, et al. "Computational Fluid Dynamics Modeling of Spatial Atomic Layer Deposition on Microgroove Substrates." International Journal of Heat and Mass Transfer, vol. 181, 2021, p. 121854, https://doi.org/10.1016/j.ijheatmasstransfer.2021.121854.